Share Email Print
cover

Proceedings Paper

Process monitoring and control of integrated-circuit manufacturing using Fourier transform infrared spectroscopy
Author(s): Shaohua Liu; John R. Haigis; Marie B. DiTaranto; Karen Kinsella; James R. Markham; Qi Li; David B. Fenner; Peter R. Solomon; Stuart Farquharson; Philip W. Morrison Jr.
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A computer algorithm, which matches theoretical to measured infrared reflectance spectra, was successfully employed to determine multiple thin film properties of integrated circuits. Properties, such as film thickness, dielectric constant, and free carrier concentration were determined for a variety of important electronic films both in the laboratory and in process reactors. The latter measurements were accomplished by optically interfacing a Fourier transform infrared (FT-IR) spectrometer to several reactors. Real-time process monitoring allowed determination of deposition rate, free carrier activation temperature, and the influence of reactor conditions on film properties. Finally, these measurements were nondestructive, performed in-situ and within seconds, demonstrating the utility of this method for real-time process monitoring and control.

Paper Details

Date Published: 19 January 1995
PDF: 12 pages
Proc. SPIE 2367, Optical Sensors for Environmental and Chemical Process Monitoring, (19 January 1995); doi: 10.1117/12.199664
Show Author Affiliations
Shaohua Liu, Advanced Fuel Research, Inc. (United States)
John R. Haigis, Advanced Fuel Research, Inc. (United States)
Marie B. DiTaranto, Advanced Fuel Research, Inc. (United States)
Karen Kinsella, Advanced Fuel Research, Inc. (United States)
James R. Markham, Advanced Fuel Research, Inc. (United States)
Qi Li, Advanced Fuel Research, Inc. (United States)
David B. Fenner, Advanced Fuel Research, Inc. (United States)
Peter R. Solomon, Advanced Fuel Research, Inc. (United States)
Stuart Farquharson, Advanced Fuel Research, Inc. (United States)
Philip W. Morrison Jr., Case Western Reserve Univ. (United States)


Published in SPIE Proceedings Vol. 2367:
Optical Sensors for Environmental and Chemical Process Monitoring
Ishwar D. Aggarwal; Stuart Farquharson; Eric Koglin, Editor(s)

© SPIE. Terms of Use
Back to Top