Proceedings Paper
Polar-coordinate laser writer for binary optics fabrication| Format | Member Price | Non-Member Price |
|---|---|---|
| $17.00 | $21.00 |
Paper Abstract
A Laser Writer system for recording centro-symmetric patterns in photoresist has been
developed as an alternative method for binary optics mask and component fabrica.-
tion.This system is capable of generating binary amplitude patterns with linewidths
below 1 tm and with a positional accuracy of less than 0.ljim on up to 3 in. diameter
planar substrates. The measured wavefront error and diffraction efficiency of a directwrite
two-phase-level F/10 lens confirm that high quality components can be fabricated
quickly, easily, and at low cost.
Paper Details
Date Published: 1 May 1990
PDF: 11 pages
Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17934
Published in SPIE Proceedings Vol. 1211:
Computer and Optically Formed Holographic Optics
Ivan Cindrich; Sing H. Lee, Editor(s)
PDF: 11 pages
Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17934
Show Author Affiliations
William C. Goltsos, Lincoln Lab./MIT (United States)
Sharlene A. Liu, Lincoln Lab./MIT (United States)
Published in SPIE Proceedings Vol. 1211:
Computer and Optically Formed Holographic Optics
Ivan Cindrich; Sing H. Lee, Editor(s)
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