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Proceedings Paper

Polar-coordinate laser writer for binary optics fabrication
Author(s): William C. Goltsos; Sharlene A. Liu
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Paper Abstract

A Laser Writer system for recording centro-symmetric patterns in photoresist has been developed as an alternative method for binary optics mask and component fabrica.- tion.This system is capable of generating binary amplitude patterns with linewidths below 1 tm and with a positional accuracy of less than 0.ljim on up to 3 in. diameter planar substrates. The measured wavefront error and diffraction efficiency of a directwrite two-phase-level F/10 lens confirm that high quality components can be fabricated quickly, easily, and at low cost.

Paper Details

Date Published: 1 May 1990
PDF: 11 pages
Proc. SPIE 1211, Computer and Optically Formed Holographic Optics, (1 May 1990); doi: 10.1117/12.17934
Show Author Affiliations
William C. Goltsos, Lincoln Lab./MIT (United States)
Sharlene A. Liu, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1211:
Computer and Optically Formed Holographic Optics
Ivan Cindrich; Sing H. Lee, Editor(s)

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