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Proceedings Paper

Specialized CCDs for high-frame-rate visible imaging and UV imaging applications
Author(s): Peter A. Levine; Gordon Charles Taylor; Frank V. Shallcross; John R. Tower; William B. Lawler; Lorna J. Harrison; Dennis George Socker; Mike Marchywka
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Paper Abstract

This paper reports recent progress by the authors in two distinct charge coupled device (CCD) technology areas. The first technology area is high frame rate, multi-port, frame transfer imagers. A 16-port, 512 X 512, split frame transfer imager and a 32-port, 1024 X 1024, split frame transfer imager are described. The thinned, backside illuminated devices feature on-chip correlated double sampling, buried blooming drains, and a room temperature dark current of less than 50 pA/cm2, without surface accumulation. The second technology area is vacuum ultraviolet (UV) frame transfer imagers. A developmental 1024 X 640 frame transfer imager with 20% quantum efficiency at 140 nm is described. The device is fabricated in a p-channel CCD process, thinned for backside illumination, and utilizes special packaging to achieve stable UV response.

Paper Details

Date Published: 15 November 1993
PDF: 16 pages
Proc. SPIE 1952, Surveillance Technologies and Imaging Components, (15 November 1993); doi: 10.1117/12.161422
Show Author Affiliations
Peter A. Levine, David Sarnoff Research Ctr. (United States)
Gordon Charles Taylor, David Sarnoff Research Ctr. (United States)
Frank V. Shallcross, David Sarnoff Research Ctr. (United States)
John R. Tower, David Sarnoff Research Ctr. (United States)
William B. Lawler, U.S. Army Research Lab. (United States)
Lorna J. Harrison, U.S. Army Research Lab. (United States)
Dennis George Socker, Naval Research Lab. (United States)
Mike Marchywka, Naval Research Lab. (United States)

Published in SPIE Proceedings Vol. 1952:
Surveillance Technologies and Imaging Components
Sankaran Gowrinathan; C. Bruce Johnson; James F. Shanley, Editor(s)

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