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    Advanced Lithography | Proceedings

    Advanced Lithography 2011
    Full-text papers on CD-ROM from all 6 Proceedings volumes. PC, Macintosh, and Unix compatible.
    (Includes Vols. 7969-7974),
    Order No. CDS426 • Est. pub. April 2011
    Meeting attendee: $135
    Nonattendee member price: $475
    Nonattendee nonmember price: $620

    Printed Proceedings: Editor-reviewed papers from individual conferences are printed within six weeks of the meeting.

    Browse Defense, Security, and Sensing 2011 papers

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