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Journal of Micro/Nanolithography, MEMS, and MOEMS

Chris A. Mack

Editorial Board

Information for Authors

Submit a Manuscript

The Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3) publishes peer-reviewed papers on the science, development, and practice of lithographic, fabrication, packaging, and integration technologies necessary to address the needs of the electronics, microelectromechanical systems, micro-optoelectromechanical systems, and photonics industries. The wide range of such devices also includes biomedical microdevices, microfluidics, sensors and actuators, adaptive optics, and digital micromirrors. The scope is broad to facilitate synergy and interest between the communities served by the journal. Topical areas covered include:

Lithography: tools, materials, and processes associated with the patterning of structures that have submicrometer and nanometer-scale features. Included are imaging and nonimaging approaches using optics, electron and other particle beams, nanoimprint, molecular self-assembly, and their hybrids. Applications include semiconductor fabrication, but also patterning for other micro/nanodevices.

Microelectromechanical systems (MEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain both electrical and mechanical elements.

Micro-optoelectromechanical systems (MOEMS): the design, fabrication, operation, reliability, and testing of microdevices that contain electrical, mechanical, and optical elements (that is, the merging of micro-optics and MEMS).

Microfabrication: technologies to shape three-dimensional structures leading to the fabrication of active and passive electronics, photonics, MEMS, MOEMS, micro/nano-optics, and other micro/nanodevices.

Metrology: metrology and process control for the above devices and their fabrication processes.

If you are interested in submitting a manuscript to the Journal of Micro/Nanolithography, MEMS, and MOEMS, please read our guidelines for authors and submit a manuscript online.

 Special Section Calls for Papers

JM3 Video Intro Introduction to the Journal of Micro/Nanolithography, MEMS, and MOEMS from the Editor-in-Chief, Chris Mack.

Abstracting and Indexing

  • Science Citation Index Expanded
  • Materials Science Citation Index
  • Current Contents - Physical, Chemical & Earth Sciences
  • Current Contents - Engineering, Computing & Technology
  • Inspec
  • Scopus
  • Ei Compendex
  • Astrophysics Data System

Editorial Office

Contact the JM3 staff at:

P.O. Box 10
Bellingham, WA 98227-0010 USA
tel: +1 360 676 3290
fax: +1 360 647 1445


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JM3 Facts and Figures

ISSN: 1932-5150
E-ISSN: 1932-5134
Publisher: SPIE
Frequency: Quarterly (4 issue/year)
Year established: 2002
Format: Online and Print
Impact Factor*: 1.350
5-Year Impact Factor*: 1.273
*2016 Journal Citation Reports®
CiteScore 2016:  1.21
h5-index: 18