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Journal of Nanophotonics

Loss analysis in nitride deep ultraviolet planar cavity
Author(s): Zhongming Zheng; Yingqian Li; Onkundi Paul; Hao Long; Samuel Matta; Mathieu Leroux; Julien Brault; Leiying Ying; Zhiwei Zheng; Baoping Zhang
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Paper Abstract

In recent decades, literatures about visible vertical cavity surface emitting lasers (VCSELs) have been reported. However, due to high optical loss in the cavity, lasing from deep ultraviolet (DUV) VCSEL was still rarely achieved. The optical loss in nitride DUV microcavity was analyzed in detail. DUV nitride vertical Fabry–Pérot microcavity with active layer of AlGaN-based quantum dots and double-side HfO2  /  SiO2 distributed bragger reflectors was fabricated. Optical losses with of the order of 103  cm  −  1 were deduced from the Q value of the cavity modes. The main origination of optical loss in DUV cavity was calculated and ascribed to the interface scattering. The interface roughness appearing after laser lift-off process and overlap between rough interface and standing optical wave were two key parameters that contributed to interface scattering loss. We believe that our results will provide useful information for improving DUV VCSEL devices.

Paper Details

Date Published: 18 May 2018
PDF: 8 pages
J. Nanophoton. 12(4) 043504 doi: 10.1117/1.JNP.12.043504
Published in: Journal of Nanophotonics Volume 12, Issue 4
Show Author Affiliations
Zhongming Zheng, Xiamen Univ. (China)
Yingqian Li, Xiamen Univ. (China)
Onkundi Paul, Xiamen Univ. (China)
Hao Long, Xiamen Univ. (China)
Samuel Matta, Ctr. de recherche sur l'hétéroepitaxie et ses applications (France)
Mathieu Leroux, Ctr. de recherche sur l'hétéroepitaxie et ses applications (France)
Julien Brault, Ctr. de recherche sur l'hétéroepitaxie et ses applications (France)
Leiying Ying, Xiamen Univ. (China)
Zhiwei Zheng, Xiamen University, Optoelectronics Engineering Research Center, Department of Electronic Engineering (China)
Baoping Zhang, Xiamen Univ. (China)

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