Dr. Timothy A. Brunner

Fellow Member | Director
Brunner, Timothy A.
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SPIE Membership: 27.1 years
SPIE Awards: Fellow status | 2006 Frits Zernike Award in Microlithography
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Area of Expertise: microlithography, optical lithography, process control, IC production lithography
Social Media: LinkedIn
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Profile Summary

Since 1980, I have been working in the area of lithographic patterning for IC production - a most fascinating, interdisciplinary area. Some particular interests include advanced image formation, simulation, process control, metrology methods, data analysis, and EUV lithography.
I have a B.A. from Carleton College in 1975 and a doctorate from MIT in 1980, both in physics. Before joining ASML in 2019, I worked for GLOBALFOUNDRIES, IBM, Xerox PARC and Perkin-Elmer Corporation.

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