Takayuki Uchiyama

Director, Lithography at Huawei Technologies Japan KK
SPIE Leadership: Retrieving Data, please wait...
SPIE Involvement: Retrieving Data, please wait...
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Research and development of advanced lithography
Experience includes the production engineering of Lithography process and the development of i-line, KrF, ArF and ArF immersion lithography
The chairman of lithography team in Japan of ITRS from 2009 to 2012.
A pioneer in terms of ArF immersion lithography and SMO (source mask co-optimization)

SPIE Volunteer Activities

Retrieving Data, please wait...

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray