Dr. Susumu Iida

Chief specialist at IMEC (Toshiba Memory assignee)
Iida, Susumu
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Area of Expertise: Lithography, Metrology, Crystal growth, Inspection, Electron beam
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Profile Summary

Susumu Iida received his BS and MS degrees in 1995 and 1997, respectively, and in 2000, he earned his PhD in engineering, all from Shizuoka University, Japan. He joined the Research and Development Center, Toshiba Corporation, where he carried out research on GaN-based blue laser diodes and the development of patterned mask inspection tools. In 2011, he was assigned to EIDEC, where he engaged in development of EB inspection tool and defect inspection standard technology. In 2019, he was assigned to imec. He is a chief specialist at TOSHIBA Memory Corporation.

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