Jang-Sun Sunny Kim

Principle Engineer at SAMSUNG Electronics Co Ltd
Kim, Jang-Sun Sunny
SPIE Leadership: Retrieving Data, please wait...
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: Overlay control, Machine learning, Metrology, CD control, Data science
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Lithography Scanners : Canon, Nikon and ASML system
Co-optimization : Overlay to Alignment, CD to Leveling & Dose
Metrology and Mark design : DBO, SCOL, Focus, Cell overlay
Device Integration and Yield Engineering - DRAM / FLASH
Semiconductor Manufacturing Systems – APC control, Machine learning, Scanner diagnostic system

SPIE Volunteer Activities

Retrieving Data, please wait...

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray