Dr. Soo-Yong Lee

SAMSUNG Electronics Co Ltd
SPIE Leadership: Retrieving Data, please wait...
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: OPC, PPC, RET, Machine Learning, AI, DFM
Contact Details:
Sign In to send a private message or view contact details

Profile Summary

Dr. Sooyong Lee is a principle engineer at Samsung Semiconductor Research and Development(SRD). Dr. Lee received a bachelor's and doctorate in physics from POSTECH and majored in theoretical condensed matter physics. He has served as a postdoctoral researcher at POSTECH and Sungkyunkwan University and a visiting researcher at MIT. His research interests were mainly in electronic interferometers and topological matter based on mesoscopics and manybody system. After joining SRD, he changed his career to OPC. Since then, he has mainly developed the resolution enhancement technology for minimum feature patterning in memory devices. He has also contributed to improve accuracy and dispersion on wafer by applying OPC and PPC using machine learning. Recently, he completed training for AI experts at Seoul National University and is interested in applying the latest AI technologies to OPC and PPC.

Upcoming Presentations

Most Recent | Show All
Retrieving Data, please wait...

Publications

Most Recent | Show All
Retrieving Data, please wait...

Conference Committee Involvement

Most Recent | Show All
Retrieving Data, please wait...

Course Instructor

Most Recent | Show All
Retrieving Data, please wait...
PREMIUM CONTENT
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?
close_icon_gray