de Groot, Peter J.

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Dr. Peter J. de Groot

Executive Director of R&D
Zygo Corp
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Area of Expertise: Interferometry, Optical metrology, Intellectual property protection, R&D management, Science education
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Summary
Peter is a Physics PhD specializing in applied optics. Peter has published 150 technical papers, tutorials and book chapters in the fields of physics, optical testing, surface structure analysis, semiconductor wafer process metrology, stage motion measurement, international standards for metrology, and large-scale coordinate measurement. His research has led to 135 US patents and several commercial products. He is a Fellow of the SPIE and of the Optical Society of America, an Honorary Professor at the University of Nottingham, winner of the Rudolf Kingslake medal, a multiple award winner for innovation, a conference organizer and active contributor in the optics community
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