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SPIE Leadership:
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11.0 years
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SPIE Conference Proceeding | December 27, 2002 Paul DePesa; Danny KeoganProc. SPIE. 4889, 22nd Annual BACUS Symposium on Photomask Technology KEYWORDS: Computed tomography, Optical proximity correction, Operating systems, Databases, Data processing, Sun, Photomasks, Beam shaping, Analytical research, Beam analyzers SPIE Conference Proceeding | August 1, 2002 Paul DePesa; Danny KeoganProc. SPIE. 4754, Photomask and Next-Generation Lithography Mask Technology IX KEYWORDS: Computed tomography, Databases, Photomasks, Optical proximity correction, Data processing, Resolution enhancement technologies, Beam shaping, Vestigial sideband modulation, Logic, Computer aided design SPIE Conference Proceeding | January 22, 2001 Charles Howard, Paul DePesa, et al.Proc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology KEYWORDS: Inspection, Reticles, Manufacturing, Photomasks, Optical proximity correction, Databases, Computed tomography, Standards development, Binary data, Lithography SPIE Conference Proceeding | January 22, 2001 Paul DePesa; Wolfgang LeitermannProc. SPIE. 4186, 20th Annual BACUS Symposium on Photomask Technology KEYWORDS: Computed tomography, Databases, Photomasks, Manufacturing, Windows NT, Sun, Optical proximity correction, Logic, Array processing, Photomask technology SPIE Conference Proceeding | December 7, 1994 Rudolf von Buenau, Ricardo Diola, et al.Proc. SPIE. 2322, 14th Annual BACUS Symposium on Photomask Technology and Management KEYWORDS: Photomasks, Reflectivity, Photomask technology, Photoresist materials, Aluminum, Thin films, Head, Opacity, Solids, Lithography
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