Böwering, Norbert R.

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Dr. Norbert R. Böwering

Senior Technical Consultant
Univ Bielefeld


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Summary
Solving challenging issues in key nanotechnology applications: BökoTech
EUV lithography applications:
Cleaning of highly sensitive EUV optics
Phase transformation of tin
Development of advanced EUV light sources for metrology applications
Studies of novel nanomaterials
Theme: May the source be with you!
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