Dr. Alex Zepka

Staff Engineer at Synopsys Inc
SPIE Leadership: Retrieving Data, please wait...
SPIE Membership: 5.0 years
SPIE Involvement: Retrieving Data, please wait...
Area of Expertise: E-Beam Lithography, Proximity Correction, Direct-Write Lithography, Mask Data Prep, Mask Error Correction
Websites: Personal Website
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Profile Summary

I have been working as the technical lead in several projects in the area of E-Beam Proximity Correction and Data Preparation for New Generation Lithography (NGL). I have extensive experience in customer support as well as technology development. I was one of the Group Leader in the European-sponsored MAGIC project, managing the software datapath development for Multi-Beam Direct-Write technology. I have a similar role in the IMAGINE project for MBDW as well as other efforts in NGL

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