Quasi-static MEMS scanners for an integrated cavity in a trapped ion quantum computer

This work presents AlScN driven quasi-static MEMS scanners for the stabilization of a laser mode inside of an ion trap cavity. Quasi-statically, the MEMS scanners FoV surpasses 20° TOSA at ±105 V in x- and y-direction and 16° TOSA during spiral scanning. Driven in resonance, a scan angle of 100° TOSA at 550 Hz in a single axis and 50° in spiral scanning are measured. Additionally, the reflecting plane moves by more than 100 μm at ±5 V in z-direction in the resonant piston mode. This 3D movement can stabilize an optical resonator in an ion trap to promote the Purcell effect which drastically increases the read-out efficiency of the trapped ions quantum state. This addresses a significant scalability challenge in trapped ion quantum computing for systems exceeding 100 Qubits. Therefore, miniaturization and customization of the MEMS-scanners for further integration into the ion trap cavity are ongoing.