Exhibition - final day 10 AM - 4 PM
Find top companies
>
Conference 12006 > Paper 12006-33
Paper 12006-33

A device library for the ultra-low loss Si3N4 platform

24 January 2022 • 3:50 PM - 4:10 PM PST | Room 301 (Level 3 South)

Abstract

The last few years have shown the success of silicon nitride platforms for ultra-low loss tightly confining waveguides. In addition to the low optical losses, the high Kerr nonlinearity, the high power handling capability and small bending radii makes the platform ideal for nonlinear photonics. Therefore, the potential for applications is huge: LiDAR, microwave optics, quantum photonics, neuromorphic computing, telecommunication, sensors… Here, we present our 200mm platform based on 800nm-thick LPCVD Si3N4 with optical losses below 5dB/m. It is completed with a set of photonic components: grating couplers, edge couplers, MMI, directional couplers, Y-junction and AWG multiplexer, which constitute the building blocks for advanced applications.

Presenter

Q. Wilmart
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Quentin Wilmart received the Ph.D. degree in physics from the Ecole Normale Supérieure, Paris, France in 2015. He joined CEA-Leti in 2016, working on design, fabrication and characterization of silicon photonic integrated circuits. His current research interests include the use of silicon nitride and IIIV materials for high-speed optical communication and quantum photonics.
Presenter/Author
Q. Wilmart
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
S. Guerber
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
Thales Research and Technology, III-V Lab. (France)
Author
Camille Petit-Etienne
Univ. Grenoble Alpes, CNRS, CEA/LETI-Minatec, Grenoble INP, LTM, F-38054 (France)
Author
Univ. Grenoble Alpes, CNRS, CEA/LETI-Minatec, Grenoble INP, LTM, F-38054 (France)
Author
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
André Myko
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
Univ. Grenoble Alpes, CEA, LETI, MINATEC Campus, CEA-Grenoble (France)
Author
François Duport
Thales Research and Technology, III-V Lab. (France)
Author
Univ. Grenoble Alpes, CNRS, CEA/LETI-Minatec, Grenoble INP, LTM, F-38054 (France)
Author
Univ. Grenoble Alpes, CNRS, CEA/LETI-Minatec, Grenoble INP, LTM, F-38054 (France)