Flexible and fast non-contact measurement of a large off-axis non-circular AR-coated freeform optic

R. Henselmans; C. van Drunen

doi:10.1117/12.2602140

28 October 2021 Flexible and fast non-contact measurement of a large off-axis non-circular AR-coated freeform optic

R. Henselmans, C. van Drunen

Proceedings Volume 11889, Optifab 2021; 1188907 (2021) https://doi.org/10.1117/12.2602140
Event: SPIE Optifab, 2021, Rochester, New York, United States

Abstract

The NMF600 S non-contact measurement machine for freeform optics by Dutch United Instruments (DUI) was used to measure a large concave surface with a polygon outside contour with typical diagonal of 250 mm. The surface is a higher order freeform off-axis surface, which was measured centered on the table. The total non-rotationally symmetric freeform departure during this measurement was 3.5 mm PV. Moreover, the surface has an anti-reflective coating. Depending on the pointspacing and measurement aperture, the measurements take between 7 and 23 minutes. They show a repeatability of well below 5 nm rms on a total form error after 6DOF fitting of 1.53 um rms. The pointspacing of 0.1 mm clearly shows the mid-spatial errors and raster polishing residuals.

Conference Presentation

Citation Download Citation

R. Henselmans and C. van Drunen "Flexible and fast non-contact measurement of a large off-axis non-circular AR-coated freeform optic", Proc. SPIE 11889, Optifab 2021, 1188907 (28 October 2021); https://doi.org/10.1117/12.2602140

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