Microfocus laboratory soft x-ray source for vacuum optical test facilities

Grazing incident Soft X-ray source (SXR) mirrors find applications in astrophysics, space plasma research, hot plasma research and in various imaging and spectroscopy laboratory systems. SXR sources and vacuum optical beamlines are needed for their characterization and testing. A micro focus laboratory Soft X-ray source, which can be used in facilities for SXR optical components metrology, was designed and realized. The source in vacuum consists of an electron gun with stabilized electron beam focused to a 200 um spot on a target from appropriate material. Four different targets allowing generation of SXR with four different energies from four different elements are placed on a rotational turret. Required photon energy can be selected without vacuum interruption.