David Markle: The genesis of lithography

The best is yet to come in lithography and other technologies says a long-time lithography expert -- but companies must be more flexible in their approach to new ideas and developments.

28 June 2013

David Markle is co-founder of Periodic Structures Inc. (USA), a start-up company developing practical lithography solutions based on interference.

Markle began his career in lithography at Perkin Elmer Corporation where he developed the Micralign and Micrascan series systems after working on a number of near-space and space-borne astronomical payloads. In 1984, he joined Ultratech as Vice President of Advanced Technology and later became CTO and Chairman of the Technical Advisory Board, positions he held until he retired in 2007 as the company's first Fellow.

Throughout his career, Markle has made major contributions to engineering theory and practice and has played an instrumental role in the development of advanced photolithography systems used in the manufacture of semiconductor devices. In 2004, he was elected to the U.S. National Academy of Engineering, one of the highest professional distinctions accorded an engineer.

Markle is the 2013 recipient of the Frits Zernike Award for Microlithography in recognition of his pivotal role in the development of numerous lithography tools, including the Perkin-Elmer Micralign and Micrascan tools, and the Ultratech Stepper. He was honored for his insights and engineering talents that have helped to guide both mechanical and optical designs of lithography tools for the last 40 years.

Markle has a BS in engineering physics from the University of Alberta (Canada), an MS in reactor physics from the University of Birmingham (UK) and a Diploma in Business Administration from the London School of Economics (UK).

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