SPIE-BACUS Scholarship

The $5,000 SPIE-BACUS Scholarship recognizes outstanding contributions to the photomask industry that have at least one of the following attributes: a fundamental change or innovation, an enduring contribution, and/or an enabling contribution.

This scholarship is awarded to a full-time undergraduate or graduate student in the field of microlithography with an emphasis on optical tooling and/or semiconductor manufacturing technologies. 

The SPIE-BACUS Scholarship was set up in 1998 to reward the most qualified students who wish to work in the fields of photomask and microlithography manufacturing for the semiconductor industry. The BACUS Steering Committee, in concert with the SPIE Scholarship Committee, will work with institutions of higher learning to identify candidates and award scholarships to help prepare them to make significant contributions to industry.

For more information, contact scholarships@spie.org.

The 2024 application is open. Applications will be accepted until 31 May 2024. 

Apply online

2023 recipient


Dong Gi Lee

Hanyang Univ. (Republic of Korea)

Dong Gi Lee is pursuing a PhD in Material Science and Engineering under the guidance of Professor Jinho Ahn at Hanyang University, Seoul, Republic of Korea. Lee is developing an extreme ultraviolet (EUV) ptychography microscope for actinic mask inspection and investigating the effects of EUV pellicle defects on mask imaging performance via through-pellicle mask imaging. 

Read the press release to learn more. 

2022 recipient


Bin Wang

Univ. of Colorado Boulder (United States)

Bin Wang, pursuing a PhD in physics at JILA, a joint institution of University of Colorado Boulder and the National Institute of Standards and Technology, was awarded the 2022 SPIE-BACUS Scholarship. 

Read the press release to learn more. 

2021 recipient


Maryam Baker

The Univ. of Arizona (United States)

Maryam Baker, pursuing a PhD in the Wyant College of Optical Sciences at The University of Arizona, was awarded the 2021 SPIE-BACUS Scholarship.

Read the press release to learn more.

2020 recipient


David Ren

Univ. of California, Berkeley (United States)

David Ren, pursuing a PhD in Electrical Engineering and Computer Sciences at the University of California, Berkeley, was awarded the 2020 SPIE-BACUS Scholarship.

Read the press release to learn more. 

2019 recipient


Dennis Rich

Univ. of Illinois (United States)

Dennis Rich, a graduating senior from the University of Illinois at Urbana-Champaign, where he received a dual degree in Electrical Engineering and Engineering Physics, was awarded the 2019 SPIE-BACUS Scholarship to pursue a PhD at Stanford University in Electrical Engineering.

Read the press release to learn more.