Conference 11910 > Paper 11910-23
Paper 11910-23

Surface mitigation of polycrystalline ZnSe optics for durable AR coatings

On demand starting 12 October 2021


Optical surface of polycrystalline ZnSe optics with single-point diamond turning (SPDT) were analyzed in terms of top surface roughness and subsurface damage. An adhesion issue of AR coating on the SPDT p-ZnSe surface was associated with the subsurface damage. An in-situ plasma etching process was employed to remove the predetermined SSD prior to a plasma assisted dispensation, leading to durable AR coatings for the surface mitigated SPDT p-ZnSe optics. The durable AR coating performance in the middle-wave infrared was presented by taking account of coating surfaces and interfaces as well as lens surface curvature into consideration.


Corning Incorporated (United States)
Jue Wang is a principal scientist at Corning Advanced Optics, a senior member of SPIE, and a chairman of OSA - Thin Film Technical Group. Before joining Corning in 2000, he was a full professor of physics at Tongji University. He was German Volkswagen and DAAD research fellows at Wurzburg University. He received his BS and Ph.D. degrees in physics and optics from Fudan University and SITP, CAS. He authored 100+ publications and 25 US patents.
Corning Incorporated (United States)
Gary A. Hart
Corning Incorporated (United States)