Join your colleagues in Monterey

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.Escape the everyday and talk with scientists and engineers and share the spontaneous ideas that only happen when we gather in person.

Discuss your product requirements with top optics and photonics suppliers at the free two-day exhibition. Meet with industry partners who can help you solve problems, cut costs, and increase your capabilities. Register now and make plans to attend.

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Come for the robust program

Find research being presented in technical sessions, and schedule time for plenary and keynote speakers. Save time for networking to make new connections and reconnect with experts in your field.

Explore the two conferences to see where your research fits best


Photomask technology
Extreme ultraviolet lithography technology

Come to hear outstanding plenary speakers


Geoffrey Akiki

Geoffrey Akiki

President of HOYA LSI
Hoya Corp. USA (USA)

Uday Mitra, Vice President, Technology Roadmap and Strategy, Semiconductor Products Group at Applied Materials

Uday Mitra

Vice President, Technology Roadmap and Strategy, Semiconductor Products Group
Applied Materials (USA)

Ryan Russell, Corporate Vice President and Co-General Manager of Logic Technology Development Intel, (USA)

Ryan Russell

Corporate Vice President and Co-General Manager of Logic Technology Development
Intel, (USA)

Dan Sanders

Dan Sanders

Principal Research Staff Member and Senior Manager, Materials Discovery
IBM Research (USA)

View the 2021 award recipients


See who won in 2021

View the winners announced at the SPIE Photomask Technology + Extreme Ultraviolet Lithography 2021 Digital Forum. Celebrate the important work being done and further help the industry support student participation. View the 2021 winners and start planning for the 2022 award submissions.

Attention students


Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and sponsorships for students. See what happened in 2021 and check back soon for 2022 opportunities.

Don't miss the exhibition


The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.