29 September - 3 October 2024
Monterey, California, US

Share your research and join the outstanding program for 2024

Make plans to join the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies.

Present your research in Monterey. Present your research in Monterey, 29 September - 3 October 2024. The call for papers is open.

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Present your research: view important information

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Explore the 2024 conferences

Photomask technology
Extreme ultraviolet lithography technology

BACUS-sponsored webinars

Photomask in new technologies

In this BACUS quarterly webinar recording, Larry Melvin presents on how photomask technology can support progress in AR/VR hardware.

Sign in to or create a free SPIE account to view all past webinar recordings from the photomask and lithography community. 

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Don't miss the exhibition

The mask-making industry's premier event

Attend the premier exhibition for mask makers, EUVL, emerging technologies, and mask business. Connect with top suppliers showcasing the newest products, innovations, and latest technologies.

Attention students

Student opportunities

Find ways to learn about the technology, the industry, and make important connections for your future. This event includes special awards, sessions, and grants for students—learn how to attend for free!

View the award recipients

See the accomplishments

Award recipients from SPIE Photomask Technology + Extreme Ultraviolet Lithography gain the recognition they deserve. Celebrate the important work being done and further help the industry support student participation. View previous recipients and start planning for the 2024 award submissions.