Schedule of live events
View the program

The premier technical meeting for mask makers, EUVL, and emerging technologies

All of the 2021 Digital Forum presentations will be held live—including technical and keynote presentations—offering opportunities to hear directly from presenters and engage in question and answer sessions at a specific time. Recordings will be available for registered attendees within a few days of each session. Attendees will also enjoy opportunities to connect with other participants at live special events.

Join your colleagues at the premier worldwide technical meeting for photomasks, patterning, metrology, materials, inspection/repair, mask business, extreme UV lithography, and emerging technologies. Browse the program to see the schedule, register, and join us online.

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Review the program

Find live presentations taking place throughout the week: technical sessions, keynote presentations, special events for students, and more.

Photomask technology
Extreme Ultraviolet Lithography
Plenary speakers
Shimmering photomask reflects the light

Attention students: exciting opportunities for you

Join live student events

Find events in the digital forum program designed specifically for students. Don't miss your opportunity to learn about the technology, the industry, and make important connections for your future.

Exhibition postponed to 2022

The SPIE Photomask Technology + EUV Lithography 2021 online event will not include a digital exhibition. The exhibition will take place in 2022.

Exhibitors sharing their technology with Photomask Technology + EUVL attendees