• Photomask Technology + Extreme Ultraviolet Lithography
    Award Winners
    Plan to Participate
    Incident Reporting
    SPIE Event Policies
    For Authors and Presenters
    Abstract Submission Guidelines
    Oral Presentation Guidelines
    Poster Presentation Guidelines
    Manuscript Submission Guidelines
    For Chairs and Committees
    For Exhibitors
Monterey Conference Center and Monterey Marriott
Monterey, California, United States
20 - 24 September 2020
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Information for Authors and Presenters

Explore the conferences and submit an abstract

Find where your research fits best – browse the symposia below to find a conference that most closely matches the topics in your abstract. Ready to submit your research? View Submission Guidelines

Photomask Technology ›
  Call for Papers PDF | coming soon
EUV Lithography ›
  Call for Papers PDF | coming soon

Important Dates

Abstracts Submission Deadline 22 April 2020
Acceptance Notification Sent to Contact Author 22 June 2020
Manuscripts Due 26 Augst 2020

Prepare to Present at the Conference

• Apply for a visa and/or request an invitation letter

Apply for an SPIE Student Author Travel Grant - see information below

• Prepare poster presentations: Poster Presentation Guidelines

• Prepare and upload oral presentations: Oral Presentation Guidelines and Upload Instructions

• View the SPIE Anti-Harassment Policy and SPIE Code of Conduct

• Register for the conference. Registration opens in Summer 2020.

Presentation Questions? Contact the Program Coordinator (listed in your SPIE.org account)

Present a Better Paper

Prepare to make the best presentation – take one of these online courses from SPIE:

• Making the Most of Your Presentation

• Structuring Your Research Paper

These courses are free for SPIE Members.

Prepare and Submit your Manuscript

• SPIE Guidelines for Ethical Publishing

• Manuscript Policies and Review Information

• Format your manuscript and view sample templates

• Submit your manuscript (The manuscript submission site will be open 5 weeks before the manuscript due date.)

• Submit your copyright form

Manuscript Questions? Contact the Proceedings Coordinator (listed in your SPIE.org account)

Student travel grant

Apply for a travel grant

The EUVL Conference Steering Committee Student Scholarship Award aims to encourage student contributions to the conference. This scholarship opportunity is open to any student contributing an abstract in the area of EUVL. Selection will be based on abstract quality. Awarded scholarships will include full coverage of registration fees and possible coverage of travel expenses.

Who is eligible?
 • Only students may apply
 • Students must be SPIE members
How do I apply?
 • Student authors submitting an abstract will need to enter 'Yes' in the EUVL Student Scholarship Award field
 • Student authors will need to include a 1000 word abstract instead of the 500 word abstract
 • Abstracts may include a supplemental file with figures to help support the abstract