• Photomask Technology + Extreme Ultraviolet Lithography
    Plan to Participate
    Other Information:
    SPIE Event Policies
    For Authors and Presenters
    Abstract Submission Guidelines
    Manuscript Submission Guidelines
    For Exhibitors
Monterey Conference Center
Monterey, California, United States
26 - 30 September 2021
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Author and presenter information

Information for authors and presenters

Find where your research fits best – browse the symposia below to find a conference that most closely matches the topics in your abstract. Plus, this page includes timelines, information on a student grant opportunity, and more.

Ready to submit your research? View submission guidelines

Abstracts due
12 May 2021

Author notification
23 June 2021

Manuscripts due
25 August 2021

Student grant opportunity
details below

Photomask Technology ›
  Call for Papers PDF
EUV Lithography ›
  Call for Papers PDF

Important dates

Abstracts submission deadline 12 May 2021
Acceptance notification sent to contact author 23 June 2021
Manuscripts due 25 Augst 2021

Prepare to present at the conference

A to-do list leading up to the conference:

• Apply for a visa and/or request an invitation letter

Apply for an SPIE Student Author Grant - view details at the bottom of this page

• Prepare poster presentations

• Prepare and upload oral presentations

• View the SPIE Anti-Harassment Policy and SPIE Code of Conduct

• Register for the conference. Registration opens in July 2021.

Presentation questions? Contact the Program Coordinator (listed in your SPIE.org account)

Present a Better Paper

Prepare to make the best presentation – take one of these online courses from SPIE:

• Making the Most of Your Presentation

• Structuring Your Research Paper

These courses are free for SPIE Members.

Prepare and submit your manuscript

• SPIE Manuscript Submission Guidelines

Manuscript Questions? Contact the Proceedings Coordinator (listed in SPIE.org account)

Students: apply for a grant to cover costs

The EUVL Conference Steering Committee Student Scholarship Award aims to encourage student contributions to the conference. Schoarlship award selection will be based on abstract quality. 

Who is eligible?
 • Only students may apply
 • Students must be contributing an abstract in the area of EUVL
 • Students must be SPIE members
What does the scholarship cover?
 • Full coverage of registration fees
 • Possible coverage of travel expenses
How do I apply?
 • Student authors submitting an abstract will need to enter 'Yes' in the EUVL Student Scholarship Award field
 • Student authors will need to include a 1,000 word abstract instead of the 500 word abstract
 • Abstracts may include a supplemental file with figures to help support the abstract

EUVL online Call for Papers  ›