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    Past Event Overview

    View 2015 News and Photos

    Thank you for all those who attended SPIE Advanced Lithography 2015, the premier conference for the lithography community. For 40 years, SPIE has brought together industry leaders to solve the latest challenges in lithography and patterning in the semiconductor industry.

    See what happened: 2015 onsite news and photos

    Review the 2015 Program
    2015 Final Technical Program (4 MB PDF)
    2015 Technical Abstracts (1 MB PDF)
    2015 Exhibition Guide (2 MB PDF)

    2015 Plenary Speakers
     Dr. Xiaowei Shen

    Internet-of-Things: Cloud Platform and Industry Solutions
    Dr. Xiaowei Shen
    Director, IBM Research,

     Dr. Tsu-Jae King Liu

    Sustaining the Silicon Revolution: From 3D Transistors to 3D Integration
    Dr. Tsu-Jae King Liu
    Chair of the Dept. of Electrical Engineering and Computer Sciences,
    Univ. of California, Berkeley

    View Dr. Tsu-Jae King Liu's 2015 presentation

     Dr. Alan Willner

    Activities of the National Photonics Initiative
    Dr. Alan Wilner
    Sample Chaired Professor of Engineering,
    Univ. of Southern California

    View Dr. Alan Wilner's 2015 presentation

    Plenaries sponsored by: