• Advanced Lithography
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Digital Forum
Online Only
22 - 26 February 2021
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Thank you for joining us online for SPIE Advanced Lithography 2021

SPIE Advanced Lithography 2021

Thank you for participating in Advanced Lithography 2021

The Digital Forum offered live plenary talks, on-demand technical presentations and discussions, virtual networking and special events, the ability to make business connections, and more.

Thanks to your participation, the presentations were successful and the conversations on Slack were active. The channel will remain open so the dialogue can continue. Registrants will continue to have access to all of the recorded sessions and on-demand content for a week after the has closed. 

The conference continues to be the leading event for the lithography community and where leaders come to solve challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.

Save the date:
SPIE Advanced Lithography
27 February - 3 March 2022

We look forward to gathering with you in San Jose in 2022.

Event Schedule PDF
Register today

Thank you to our sponsor:


Welcome: awards, recognition, and a tribute

Advanced Lithography has become a tradition for the semiconductor industry — a time to gather, learn, and collaborate. The awards, recognition, and tributes highlight community accomplishments. Words from the chair provide insight into upcoming opportunities. 

See all that was offered online - both live and recorded

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2021 Conference topics

SPIE Advanced Lithography 2020 call for paper topical areas
• Extreme Ultraviolet (EUV) Lithography
• Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS
• Metrology, Inspection, and Process Control for Microlithography
• Advances in Patterning Materials and Processes
• Optical Microlithography
• Design-Process-Technology Co-optimization for Manufacturability
• Advanced Etch Technology for Nanopatterning

Learn more

2021 Symposium Chairs

Kafai Lai

Kafai Lai
Univ. of Hong Kong (USA)
2021 Symposium Chair

Qinghuang Lin

Qinghuang Lin
LAM Research Corp. (USA)
2021 Symposium Co-Chair

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