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San Jose Convention Center
San Jose, California, United States
23 - 27 February 2020
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See what happened in 2019 at the premier lithography event

See the hightlights from the 2019 SPIE Advanced Lithography

Get the scoop
Find interesting links and see photos from SPIE Advanced Lithography 2019, the leading global lithography event. Over the years, the event has provided the key forum for industry experts, researchers, and key players working on patterning technology development. Participants learn and share the latest developments in important areas vital to several technology fields. 

Thank you for a great 2019 event, we hope to see you next year.

Don't miss this year's event!
23-27 February 2020

Download 2019 PDFs
Final Program
Exhibition Guide

View the Plenary Presentation

See photos captured throughout the week

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