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22 - 26 February 2021
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Advanced Lithography: Manuscript Submission Guidelines

Manuscript submission process

How to prepare your manuscript for publication

Please read the following information to facilitate the successful submission of your work. These guidelines include best practices for manuscript submission, as well as for multimedia files for publication.

Manuscripts due
3 February 2021

Format Your Manuscript


LENGTH: Publish a 4-page minimum in Proceedings of SPIE in the SPIE Digital Library.

   • COLOR: All color will be retained in SPIE’s digital publications at no charge.
   • FILE TYPE: The required file format is .PDF
   • MARGINS US Standard Size: .875 in left/right, 1.0 in top, 1.25 in bottom
   • MARGINS A4 Size: 1.925 cm left/right, 2.54 cm top, 4.94 cm bottom
   • FONTS: Use Times New Roman or equivalent for all text. 
   • SPACING: Single-space all text in one column. Allow extra space between paragraphs.
   • Please, do NOT add headers, footers, or page numbers.

Manuscript Templates

Letter Icon MS Word Template - US Letter
MSWord Template - Letter (Blank)
MSWord Template (.doc) - Letter (with sample content)

A4 Icon MS Word Template - A4
MSWord Template - A4 (Blank)
MSWord Template (.doc) - A4 (with sample content)

Sample PDF
View and Download Sample Manuscripts in PDF Format

The text of these samples detail SPIE's format preferences.
Sample Manuscript PDF - Letter
Sample Manuscript PDF - A4
LaTeX logo Using LaTeX
Style files are available to authors who are preparing manuscripts with LaTeX here: 
logo        You can also use the Overleaf authoring tool.
The SPIE Proceedings template is now available in the Overleaf authoring tool. Originally developed to simplify LaTeX authorship, this free online tool has numerous benefits, including:

real-time collaboration between authors
an intuitive user interface
easy document sharing and security options
real-time preview of formatting and equations
inline error warnings
a rich-text mode that will look familiar to collaborators who are more comfortable authoring in Microsoft Word

quick submission to SPIE proceedings by following the link "Submit to SPIE Proceedings" at the top of the Overleaf template.
The SPIE Proceedings template can be found on Overleaf, along with helpful LaTeX tutorials and a free introductory course for authors who are new to Overleaf and LaTeX.

Submit Your Manuscript

   • Sign in to http://SPIE.org/myaccount to log in, or create an account. 
   • Next, click on Manage My Active Submissions and the name of the meeting. You will see your paper number (Ex: 10049-57), your paper title, and a link to submit.

You must be designated as the Contact Author in order to access, submit, and make revisions to the manuscript.  

   • Follow the steps as they appear in the SPIE Manuscript Submission Wizard.

Add Multimedia Files

You may associate a video or audio file with your research paper to better communicate your paper's main points. A video or animation, published online with your manuscript, can show how data changes over time, conveying more to your audience than is possible through a static paper alone.

Create a representative screenshot for each video or audio file and place them in your paper as you would a regular figure.

  1) Choose from 1 to 10 short files you believe would enhance the reader's understanding of your paper's main points.

Multimedia files must be one of the following types:

  • Video: mpeg, mov (Quicktime), or wmv (Windows Media Player) file formats
  • Audio: wav, mp3 file formats
  • Each file should be less than 5 MB in size.
  3) Create a representative screenshot for each video or audio file and place them in your paper as you would a regular figure  

  • Include a descriptive caption beginning with Video 1, Audio 3, etc.
At the end of the caption, include this line: http://dx.doi.org/doi.number.goes.here

  • SPIE staff will edit this text and link it to the archived multimedia file

Your multimedia files will be submitted through the SPIE manuscript submission wizard along with your manuscript.

SPIE Guidelines for Ethical Publishing

image SPIE Guidelines for Ethical Publishing
Download the PDF
graphic Policy regarding use of the “Lena” image in Proceedings
SPIE no longer publishes submissions containing the Lena image without convincing scientific justification for its use. Authors are advised to use other suitable images to illustrate and compare image processing algorithms. Any author who chooses to include a Lena image will be contacted and the decision as to whether the image is published remains with SPIE.


Please do not submit a draft of your paper with the intent of later submitting a revised final version. If you are under pressure to submit your paper, but need more time, please contact your SPIE Proceedings Coordinator and ask if an extension is possible.

Conference volumes are published within three to four weeks post conference. The Contact Author for the manuscript will receive an e-mail from SPIE once it has been published to the SPIE Digital Library.

If a revision to your manuscript is requested, either by SPIE staff or by the Conference Chair, you will have five business days to submit your revision. To submit a revision, sign in to your account at http://SPIE.org/myaccount and click on the name of the meeting. Then, select the, “Submit Manuscript Revision” link for your paper.

Manuscript submission is expected, preferred, and appreciated. SPIE strives to ensure that the published proceedings accurately and completely reflect the program content.

A "Transfer of Copyright" should be completeted and returned to SPIE when you submit your manuscript, or as soon as possible thereafter. The online form is preferred, but you may download and email the PDF version if necessary. The copyright agreement protects both SPIE and authors/employers, and specifies rights for both parties with respect to publication and reuse of the material.

SPIE publication policy permits manuscripts based partly or entirely on scientific content previously reported in SPIE proceedings to be submitted to SPIE journals. In most cases, it is anticipated that the journal submission will be a substantively expanded and revised manuscript relative to the proceedings paper to fully satisfy the standards of significance, originality, and presentation quality that may result in acceptance through the journal peer review process.

Disclosure: If a manuscript (or portion of a manuscript) was previously published in a conference proceedings or is under consideration for publication in a proceedings, this information must be disclosed when the manuscript is submitted to an SPIE journal. Authors should also reference or acknowledge the prior proceedings paper within the submitted journal article. For more detailed information about the Proceedings to Journals pathway, please read this link

SPIE Proceedings papers are indexed in all major science and engineering indexes, search engines, and library discovery platforms, including Web of Science Conference Proceedings, Scopus, Ei Compendex, Astrophysical Data System (ADS), Chemical Abstracts (selected content), CrossRef, Semantic Scholar, Dimensions, DeepDyve, Inspec, Portico, Primo, Summon, and others.