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22 - 26 February 2021
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Advanced Lithography: Abstract Submission Guidelines

Submission Guidelines for Advanced Lithography

Present your research

Follow these instructions to develop a successful abstract and accompanying manuscript for the conference and for publication in the Proceedings of SPIE in the SPIE Digital Library.

Post-Deadline Abstracts
See instructions below

Presentations and Manuscripts Due
3 February 2021

How to submit a post-deadline abstract

1. Browse the conference program and select one conference that most closely matches the topics in your abstract. You may submit your abstract to only one conference at a time.
 Call for Papers PDF  › 

2. Submit your post-deadline abstract for approval. You must indicate the conference volume number (i.e., 11609, 11610, 11611, 11612, 11613, 11614, or 11615) in the custom tracking field when prompted.
 Post-Deadline Abstract  › 

If your submission is related to an application track, indicate the appropriate track when prompted during the submission process:

Machine Learning, Stochastics, or Overlay

Machine Learning ›
 Call for Papers PDF
Stochastics ›
 Call for Papers PDF
Overlay ›

What you will need to submit

A completed electronic submission should include the following:

1. Title
2. Author(s) information
3. 250-word abstract for technical review
4. 100-word summary for the program
5. 2- to 3-page extended summary for technical review (select conferences; if summaries are required, this is indicated in the individual conference Call for Papers)

6. Keywords used in search for your paper (optional)
7. Your decision on publishing your presentation recording to the SPIE Digital Library (slide capture and audio)
8. Some conferences may indicate additional requirements in the Call for Papers (for example: instructions for competing for awards)

Note: Only original material should be submitted. Commercial papers, papers with no new research/development content, and papers with proprietary restrictions will not be accepted for presentation.

Submission agreement

Presenting authors, including keynote, invited, oral, and poster presenters, agree to the following conditions by submitting an abstract. An author or coauthor will:

Register and attend the meeting.
Present as scheduled.

Publish a 4-page minimum in Proceedings of SPIE in the SPIE Digital Library. 

Obtain funding for registration fees, travel, and accommodations, independent of SPIE, through their sponsoring organizations.
Ensure that all clearances, including government and company clearance, have been obtained to present and publish. If you are a DoD contractor in the USA, allow at least 60 days for clearance.

Important dates

Abstracts due 16 September 2020
Post-Deadline Abstract Submission Portal OPENSubject to Chair approval
Registration Now open
Digital Forum Upload System Available 15 January - 3 February 2021
Pre-recorded Presentations / Manuscripts Due 3 February 2021

Review and program placement

To ensure a high-quality conference, all submissions will be assessed by the Conference Chair/Editor for technical merit and suitability of content.
Conference Chairs/Editors reserve the right to reject for presentation any paper that does not meet content or presentation expectations.
Final placement in an oral or poster session is subject to the Chair discretion.

Publication of Proceedings on the SPIE Digital Library

Conference Chairs/Editors may require manuscript revision before approving publication and reserve the right to reject for publication any paper that does not meet acceptable standards for a scientific publication.
Conference Chair/Editor decisions on whether to allow publication of a manuscript are final.
Authors must be authorized to transfer copyright of the manuscript to SPIE, or they must provide a suitable publication license.

Only papers presented at the conference and received according to publication guidelines and timelines will be published in the conference Proceedings of SPIE in the SPIE Digital Library.
Oral presentations are recorded, and the slides are synced with the presenter's audio. Only those with author permission will be published in the SPIE Digital Library.

SPIE partners with relevant scientific databases to enable researchers to find the papers in the Proceedings of SPIE easily. The databases that abstract and index these papers include Astrophysical Data System (ADS), Ei Compendex, CrossRef, Google Scholar, Inspec, Scopus, and Web of Science Conference Proceedings Citation Index.

More publication information available on the SPIE Digital Library.

Contact information

For questions about your presentation, submitting an abstract post-deadline, or the meeting, contact Aron Miller, your Conference Program Coordinator.

For questions about your manuscript, contact AuthorHelp@spie.org.