• Advanced Lithography
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San Jose Marriott and San Jose Convention Center
San Jose, California, United States
21 - 25 February 2021
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To the lithography community: thank you for particpating in the 2020 event

See the hightlights from the 2020 SPIE Advanced Lithography

Get the scoop
Find interesting links and see photos from SPIE Advanced Lithography 2020, the leading global lithography event. Over the years, the event has provided the key forum for industry experts, researchers, and key players working on patterning technology development. Participants learn and share the latest developments in important areas vital to several technology fields. 

Review the materials below, see the Call for Papers, and make your plans to attend in 2021.

Abstract Due Date
16 September 2010

Nick Cobb Scholarship
9 October 2020

Registration opens
November 2020

See photos of the 2020 event. Thank you for participating.


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