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San Jose Convention Center
San Jose, California, United States
23 - 27 February 2020
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Courses at SPIE Advanced Lithography

Maintain your competitive edge with courses at Advanced Lithography

Training from Industry Experts
Make the most of your conference experience by taking a course. Advanced Lithography offers courses taught by recognized experts in industry and academia.

Registration opens 8 November 2019.


Instructor and Attendee Information

Information for Course Instructors
Information for Course Attendees
 • SPIE Student Members get up to 60% off courses

SPIE Advanced Lithography

Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Introductory
Instructor: Murrae J. Bowden, EMP Consultants (United States); Ralph R. Dammel, EMD Performance Materials Corp. (United States)
$610.00 Members  |  $730.00 Non-members
Date: 24 February 2020
Time: 1:30 PM - 5:30 PM
Course Level: Introductory
Instructor: Chi-Min (Chi) Yuan, NXP Semiconductors (United States)
$345.00 Members  |  $410.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Advanced
Instructor: Uzodinma Okoroanyanwu, Univ. of Massachusetts at Amherst (United States)
$710.00 Members  |  $830.00 Non-members
Date: 23 February 2020
Time: 1:30 PM - 5:30 PM
Course Level: Introductory
Instructor: Hugo Cramer, ASML Netherlands B.V. (Netherlands); Igor Turovets, Nova Measuring Instruments Ltd. (Israel)
$345.00 Members  |  $410.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Intermediate
Instructor: Harry J. Levinson, HJL Lithography (United States)
$655.00 Members  |  $775.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 12:30 PM
Course Level: Intermediate
Instructor: Kafai Lai, IBM Thomas J. Watson Research Ctr. (United States)
$345.00 Members  |  $410.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 12:30 PM
Course Level: Intermediate
Instructor: Eric Solecky, IBM Corp. (United States); Ofer Adan, Applied Materials, Inc. (Israel)
$345.00 Members  |  $410.00 Non-members
Date: 23 February 2020
Time: 1:30 PM - 5:30 PM
Course Level: Introductory
Instructor: Alexander Starikov, I & I Consulting (United States)
$350.00 Members  |  $415.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Intermediate
Instructor: Chris A. Mack, Fractilia, LLC (United States); John S. Petersen, IMEC (Belgium)
$610.00 Members  |  $730.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Advanced
Instructor: James P. Shiely, Synopsys, Inc. (United States)
$655.00 Members  |  $775.00 Non-members
Date: 27 February 2020
Time: 8:30 AM - 12:30 PM
Course Level: Introductory
Instructor: Ralph R. Dammel, EMD Performance Materials (United States)
$345.00 Members  |  $410.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Intermediate
Instructor: Mircea V. Dusa, ASML US, Inc. (United States); Stephen D. Hsu, ASML San Jose (United States)
$610.00 Members  |  $730.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Intermediate
Instructor: Vivek Bakshi, EUV Litho, Inc. (United States); Jinho Ahn, Hanyang Univ. (South Korea); Patrick P. Naulleau, Lawrence Berkeley National Lab. (United States)
$845.00 Members  |  $965.00 Non-members
Date: 23 February 2020
Time: 8:30 AM - 5:30 PM
Course Level: Introductory
Instructor: Qinghuang Lin, ASML US, Inc. (United States); Ying Zhang, Applied Materials, Inc. (United States)
$610.00 Members  |  $730.00 Non-members

Continuing Education Units

IACET Authorzed Provider
SPIE is accredited by the International Association for Continuing Education and Training (IACET) and is authorized to issue the IACET CEU.


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