Make your plans to attend
Vaccination required

The conference for emerging technology in the semiconductor industry

Submit your abstract and join other leading researchers who are solving challenges in optical and EUV lithography, patterning technologies, metrology, and process integration for semiconductor manufacturing and adjacent applications.
#SPIElitho Twitter logo Facebook logo Instagram logo Youtube logo Linkedin logo

Present your research at Advanced Lithography + Patterning 2022 in San Jose

Browse call for papers Browse call for papers Browse call for papers ...
Abstract submission guidelines Abstract submission guidelines Abstract submission guidelines ...
Download call for papers Download call for papers Download call for papers ...

Prepare your abstract

Review everything you need to know about presenting at SPIE Advanced Lithography + Patterning in 2022. With the call for papers open, abstracts are due 1 September 2021.

Researchers in the following topics are encouraged to participate

  • Extreme ultraviolet (EUV) lithography
  • Novel patterning technologies for semiconductors, MEMS/NEMS and MOEMS
  • Metrology, inspection, and process control for microlithography
  • Advances in patterning materials and processes
  • Optical microlithography 
  • Design-process-technology co-optimization for manufacturability 
  • Advanced etch technology for nanopatterning

See what Advanced Lithography + Patterning is all about

Participants at SPIE Advanced Lithography
Presenter at SPIE Advanced Lithography

Come to hear from experts

H.S. Philip Wong, Department of Electrical Engineering, Standford (USA) -- a plenary speaker at the 2022 event

H.S. Philip Wong

Department of Electrical Engineering, Standford (USA), presents: Does lithography still matter after high NA EUV?

Luc Van den Hove, President & CEO, imec (Belgium) -- a plenary speaker at the 2022 event

Luc Van den Hove

President & CEO, imec (Belgium), presents: The power of deeptech: a tale of bits, molecules and ecosystems

Take a closer look

Learn about the technical conferences

Review the six topic areas to see where your research fits best. We welcome your participation.

Exhibit at Advanced Lithography + Patterning

Connect with the semiconductor community

The exhibition at Advanced Lithography + Patterning is where people gather to collaborate and to get business done.

Thank you to the following supporting organizations

Student information, scholarships, and opportunities

Share information for students with your networks

SPIE Advanced Lithography + Patterning offers numerous opportunities for students to engage and learn about the industry, as well as share their latest research. The best part? Leading companies support student participation by providing scholarships.

Find past proceedings in the SPIE Digital Library

Access the 2021 research and recordings

SPIE Advanced Lithography 2021 conference proceedings papers and presentation recordings are published in the SPIE Digital Library as they become available. All 2021 paid conference registrations included one volume for ongoing access.

Stay connected

Mail icon: Sign up for emails to stay informed about SPIE Advanced Lithography + Patterning Sign up for emails Sign up for emails ...
Phone icon: Find the SPIE app that keeps you connected to Advanced Lithography + Patterning Get the conference app Get the conference app ...