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Conference 12053 > Paper 12053-5
Paper 12053-5

High throughput scanning probe metrology for high-NA EUV photoresist profiling

2 February 2022 • 11:40 AM - 12:00 PM PST

Abstract

Improved resolution of the High-NA EUV technology comes with thinner photoresist and smaller aspect-ratio requirements. Trade-offs include more stringent process control needs for resist loss and line roughness. Traditional metrologies like OCD or CD-SEM lose sensitivity due to diminishing interaction volume. A metrology technique that thrives in this regime is Scanning Probe Microscopy: thinner resist allows for higher scanning speed, and smaller aspect ratio for higher measurement accuracy. Here we propose a High-Throughput SPM technique as key enabler for High-NA EUV process control. Detailed, high-density full wafer measurements of resist loss, CD and roughness are enabled by a high-throughput, 4-head SPM toolset, and compared for different resist thicknesses down to 10nm. Sampling schemes consistent with scanner throughput are considered.

Presenter

Nearfield Instruments B.V. (Netherlands)
Cornel Bozdog is the Product Marketing Director at Nearfield Instruments in Rotterdam, NL. He is a 20-year semiconductor industry veteran, an expert in metrology for films, structure and materials. Prior to Nearfield, he managed the metrology technology roadmap for Micron in Boise, ID, and held technical and business roles with Nova Measuring Instruments in Santa Clara, CA. He cultivates and nurtures metrology technologies into commercial products. Cornel holds a PhD in Physics from Lehigh University. He authored over 50 papers and over 10 patents in metrology, semiconductor process control and process integration.
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Artem Khatchaturiants
Nearfield Instruments B.V. (Netherlands)
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Marta Mucientes
Nearfield Instruments B.V. (Netherlands)
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Nearfield Instruments B.V. (Netherlands)
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Nearfield Instruments B.V. (Netherlands)
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imec (Belgium)
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Janusz Bogdanowicz
imec (Belgium)
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imec (Belgium)
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imec (Belgium)
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imec (Belgium)
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Anne-Laure Charley
imec (Belgium)
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Maarten E. van Reijzen
Nearfield Instruments B.V. (Netherlands)
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Nearfield Instruments B.V. (Netherlands)
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imec (Belgium)
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Hamed M. Sadeghian
Nearfield Instruments B.V. (Netherlands)