• About the Society
  • Community Support
  • Advocacy
  • Get Involved
  • International Day of Light
  • Awards Programs
  • Press Room
  • Media Contacts
    Press Registration
    SPIE Logos and Name
  • Jobs at SPIE
  • Online Donation
 
Print PageEmail Page

Exhibition photo gallery

Advanced Lithography Exhibition − Tuesday 28 February − Wednesday 1 March

Featured technologies included:

  • Etch technology for nanoprinting
  • Lithography: immersion, double patterning, e-beam, EUV, optical/laser, and RET
  • Metrology, inspection, OPC, and process control
  • Design and manufacturing software
  • Materials and chemicals
  • Imaging equipment
  • Lasers
  • Resist materials and processing
  • Nano-imprint
  • IC and chip fabrication
  • Nanoscale imaging


...