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Advances in Metrology for X-Ray and EUV Optics VI
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Volume Details

Volume Number: 9962
Date Published: 5 December 2016

Table of Contents
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Front Matter: Volume 9962
Author(s): Proceedings of SPIE
New operational mode of the pencil beam interferometry based LTP
Author(s): Gary Centers; Brian V. Smith; Valeriy V. Yashchuk
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Nanometer accuracy with continuous scans at the ALBA-NOM
Author(s): Josep Nicolas; Pablo Pedreira; Igors Šics; Claudio Ramírez; Juan Campos
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Development of a long trace profiler at SPring-8 using a newly developed slope sensor
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi
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EPICS-based control and data acquisition for the APS slope profiler (Conference Presentation)
Author(s): Joseph Sullivan; Lahsen Assoufid; Jun Qian; Peter R. Jemian; Tim Mooney; Mark L. Rivers; Kurt Goetze; Ronald L. Sluiter; Keenan Lang
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Surface measurements in "grazing incidence" interferometry for long x-ray mirrors: theoretical limits and practical implementations
Author(s): Maurizio Vannoni; Idoia Freijo Martìn
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Subaperture stitching interferometry with reduced reference errors for ultrasmooth surfaces
Author(s): Xudong Xu; Qiushi Huang; Zhengxiang Shen; Zhanshan Wang
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Development of metrology for one-meter-long mirrors (Conference Presentation)
Author(s): Shinya Aono; Hiroki Nakamori; Akihiko Ueda; Takashi Tsumra; Hiromi Okada
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Measurement of aspheric mirror by nanoprofiler using normal vector tracing
Author(s): Takao Kitayama; Hiroki Shiraji; Kazuya Yamamura; Katsuyoshi Endo
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Development of surface profiler for master mandrel of x-ray ellipsoidal mirror
Author(s): Yoshinori Takei; Hidekazu Mimura
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Fiber-optic based in situ atomic spectroscopy for manufacturing of x-ray optics
Author(s): George Atanasoff; Christopher J. Metting; Hasso von Bredow
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Modeling surface topography of state-of-the-art x-ray mirrors as a result of stochastic polishing process: recent developments
Author(s): Valeriy V. Yashchuk; Gary Centers; Yuri N. Tyurin; Anastasia Tyurina
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Ray-tracing as a tool for efficient specification of beamline optical components
Author(s): P. Pedreira; I. Sics; M. Llonch; J. Ladrera; Ll. Ribó; C. Colldelram; J. Nicolas
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