Share Email Print


MOEMS and Miniaturized Systems XIV
For the purchase of this volume in printed format, please visit

Volume Details

Volume Number: 9375
Date Published: 26 March 2015

Table of Contents
show all abstracts | hide all abstracts
Front Matter: Volume 9375
Author(s): Proceedings of SPIE
Hybrid assembled micro scanner array with large aperture and their system integration for a 3D ToF laser camera
Author(s): Thilo Sandner; Claudia Baulig; Thomas Grasshoff; Michael Wildenhain; Markus Schwarzenberg; Hans-Georg Dahlmann; Stefan Schwarzer
Show Abstract
MEMS scanner mirror based system for retina scanning and in eye projection
Author(s): Franziska Woittennek; Jens Knobbe; Tino Pügner; Hans-Georg Dallmann; Uwe Schelinski; Heinrich Grüger
Show Abstract
Rotational MEMS mirror with latching arm for silicon photonics
Author(s): Jonathan Brière; Philippe-Olivier Beaulieu; Menouer Saidani; Frederic Nabki; Michael Menard
Show Abstract
Centimeter-scale MEMS scanning mirrors for high power laser application
Author(s): F. Senger; U. Hofmann; Thomas von Wantoch; C. Mallas; J. Janes; W. Benecke; Patrick Herwig; P. Gawlitza; Moises A. Ortega Delgado; C. Grune; J. Hannweber; A. Wetzig
Show Abstract
High brightness MEMS mirror based head-up display (HUD) modules with wireless data streaming capability
Author(s): Veljko Milanovic; Abhishek Kasturi; Volker Hachtel
Show Abstract
A study of integrated position sensors for PZT resonant micromirrors
Author(s): S. Gu-Stoppel; H. J. Quenzer; Felix Heinrich; J. Janes; W. Benecke
Show Abstract
2D tilting MEMS micro mirror integrating a piezoresistive sensor position feedback
Author(s): S. Lani; Dara Z. Bayat; M. Despont
Show Abstract
Spatially resolved contrast measurement of diffractive micromirror arrays
Author(s): Cornelius Sicker; Jörg Heber; Dirk Berndt; Florian Rückerl; Jean-Yves Tinevez; Spencer Shorte; Michael Wagner; Harald Schenk
Show Abstract
Image based wavefront compensation with deformable mirror for small satellite remote sensing
Author(s): Norihide Miyamura
Show Abstract
Advanced MEMS spectral sensor for the NIR
Author(s): Jarkko E. Antila; Uula Kantojärvi; Jussi Mäkynen; Matti Tammi; Janne Suhonen
Show Abstract
Far infrared microbolometers for radiometric measurements of ice cloud
Author(s): Linh Ngo Phong; Christian Proulx; El-Hassane Oulachgar; François Châteauneuf
Show Abstract
Compact MEMS mirror based Q-switch module for pulse-on-demand laser range finders
Author(s): Veljko Milanović; Abhishek Kasturi; Bryan Atwood; Yu Su; Kevin Limkrailassiri; John E. Nettleton; Lew Goldberg; Brian J. Cole; Nathaniel Hough
Show Abstract
Tuning mechanical resonant frequencies of nanoelectromechanical systems with light
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng
Show Abstract
Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers
Author(s): Anna Rissanen; Andreas Langner; Kai H. Viherkanto; Rami Mannila
Show Abstract
Large size MOEMS Fabry-Perot interferometer filter for focal plane array hyperspectral imaging
Author(s): J. Chee; J. Hwu; T. S. Kim; J. Kubby; S. Velicu; N. Gupta
Show Abstract
Technological platform for vertical multi-wafer integration of miniature imaging instruments
Author(s): S. Bargiel; M. Baranski; N. Passilly; C. Gorecki; M. Wiemer; J. Frömel; D. Wünsch; W. -S. Wang
Show Abstract
A biaxial PZT optical scanner for pico-projector applications
Author(s): K. Ikegami; T. Koyama; T. Saito; Y. Yasuda; H. Toshiyoshi
Show Abstract
CMOS compatible fabrication of 3D photonic crystals by nanoimprint lithography
Author(s): M. Eibelhuber; T. Uhrmann; T. Glinsner
Show Abstract
Piezoelectrically driven translatory optical MEMS actuator with 7mm apertures and large displacements
Author(s): H.- J. Quenzer; S. Gu-Stoppel; F. Stoppel; J. Janes; U. Hofmann; W. Benecke
Show Abstract
Multi-wafer bonding technology for the integration of a micromachined Mirau interferometer
Author(s): Wei-Shan Wang; Justine Lullin; Joerg Froemel; Maik Wiemer; Sylwester Bargiel; Nicolas Passilly; Christophe Gorecki; Thomas Gessner
Show Abstract
Tunable optical buffer based on III-V MEMS design
Author(s): Wing H. Ng; Nina Podoliak; Peter Horak; Jiang Wu; Huiyun Liu; William J. Stewart; Anthony J. Kenyon
Show Abstract
Integrated packaging of 2D MOEMS mirrors with optical position feedback
Author(s): Marcus Baumgart; M. Lenzhofer; M. P. Kremer; A. Tortschanoff
Show Abstract
Improvement of Varioptic's liquid lens based on electrowetting: how to obtain a short response time and its application in the design of a high resolution iris biometric system
Author(s): Benjamin Burger; Serge C. Meimon; Cyril Petit; Minh Chau Nguyen
Show Abstract
Volume refractometry of liquids using stable optofluidic Fabry-Pérot resonator with curved surfaces
Author(s): Noha Gaber; Yuto Takemura; Maurine Malak; Frédéric Marty; Diaa Khalil; Dan Angelescu; Elodie Richalot; Tarik Bourouina
Show Abstract
Fiber-coupled Fabry-Pérot notch filter combining in-plane axis, high speed MEMS tunability and large etching depth
Author(s): Yasser M. Sabry; Yomna M. Eltagoury; Ahmed Shebl; Mostafa Soliman; Diaa Khalil
Show Abstract
MEMS-based frequency modulation of fiber ring laser
Author(s): Kamal Khalil; Khaled Hassan; Ahmed Shebl; Mostafa Soliman; Fares Al-Arifi; Mohammed Al-Otaibi; Yomna M. Eltagoury; Yasser M. Sabry; Diaa Khalil
Show Abstract
Large MOEMS diffraction grating results providing an EC-QCL wavelength scan of 20%
Author(s): Jan Grahmann; André Merten; Andreas Herrmann; Ralf Ostendorf; Daniela Bleh; Christian Drabe; Jörg Kamenz
Show Abstract
Resonant micro optic gyro using tens of centimeters long optical fiber coil
Author(s): Huilian Ma; Jianjie Zhang; Linglan Wang; Zhonghe Jin
Show Abstract
Modeling and simulations of new electrostatically driven, bimorph actuator for high beam steering micromirror deflection angles
Author(s): John P. Walton; Ronald A. Coutu Jr.; LaVern Starman
Show Abstract
Mechanical analysis and optimal design of a new kind of spherical mobile robot with two modes of locomotion
Author(s): Hanxu Sun; Wei Zhao; Ping Sun
Show Abstract
Optical metrology of AlN piezomachined ultrasonic transducer arrays and piezopumps
Author(s): Mateusz Mądzik; Inas Taha; Raquel Flores; Ricardo Janeiro; Jaime Viegas
Show Abstract

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?