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MOEMS and Miniaturized Systems XII
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Volume Details

Volume Number: 8616
Date Published: 26 March 2013

Table of Contents
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Front Matter: Volume 8616
Author(s): Proceedings of SPIE
Towards future systems with nano-optics contributions
Author(s): Bozena Kaminska; Mohamadreza Najiminaini; Yindar Chuo; Clint Landrock; Badr Omrane; Jeffrey J. L. Carson
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MOEMS pressure sensors for geothermal well monitoring
Author(s): William Challener; Sabarni Palit; Roger Jones; Li Airey; Russell Craddock; Aaron Knobloch
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Optical probe design with extended depth-of-focus for optical coherence microscopy and optical coherence tomography
Author(s): Seungwan Lee; Minseog Choi; Eunsung Lee; Kyu-Dong Jung; Jong-hyeon Chang; Woonbae Kim
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3D micro-optical lens scanner made by multi-wafer bonding technology
Author(s): S. Bargiel; C. Gorecki; M. Barański; N. Passilly; M. Wiemer; C. Jia; J. Frömel
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Electrostatic MEMS resonating micro-polygonal scanner for circumferential endoscopic bio-imaging
Author(s): Xiaojing Mu; Guangya Zhou; Hongbin Yu; Julius Ming-Lin Tsai; Wee Keong Neo; A Senthil Kumar; Fook Siong Chau
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A water-immersible two-axis scanning mirror microsystem for ultrasound and photoacoustic microscopic imaging applications
Author(s): Chih-Hsien Huang; Junjie Yao; Lihong V. Wang; Jun Zou
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Optical scanners based on thermo-optical tuning of an integrated-optical waveguide mode
Author(s): E. Markweg; M. Hoffmann
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Resonant biaxial 7-mm MEMS mirror for omnidirectional scanning
Author(s): U. Hofmann; M. Aikio; J. Janes; F. Senger; V. Stenchly; M. Weiss; H.-J. Quenzer; B. Wagner; W. Benecke
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Position sensing and tracking with quasistatic MEMS mirrors
Author(s): S. Richter; M. Stutz; A. Gratzke; Y. Schleitzer; G. Krampert; F. Hoeller; U. Wolf; L. Riedel; D. Doering
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Aluminum nitride supported 1D micromirror with static rotation angle >11°
Author(s): Stefan Weinberger; Martin Hoffmann
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Wide steering angle microscanner based on curved surface
Author(s): Yasser Sabry; Diaa Khalil; Bassam Saadany; Tarik Bourouina
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SOI based electromagnetic MEMS scanners and applications in laser systems
Author(s): G. Brown; R. Bauer; W. Lubeigt; D. Uttamchandani
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Arrayed beam steering device for advanced 3D displays
Author(s): Jungmok Bae; Yoon-Sun Choi; Kyuhwan Choi; Yunhee Kim; Yongjoo Kwon; Hoon Song; Eoksu Kim; Seungyeol Choi; Junghoon Lee; Sangyoon Lee
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2D electrostatic micromirror array with high field factor for high-power application
Author(s): S. Lani; D. Bayat; Y. Pétremand
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Fabrication of vertical moving micro-optical switch for display applications
Author(s): Dongsik Shim; Woonbae Kim; Hyung Choi
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Development of a fully programmable MEMS diffraction grating
Author(s): F. Zamkotsian; B. Timotijevic; R. Lockhart; R. P. Stanley; P. Lanzoni; M. Luetzelschwab; M. Canonica; W. Noel; M. Tormen
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Design and characterization of a hybrid-integrated MEMS scanning grating spectrometer
Author(s): Heinrich Grüger; Jens Knobbe; Tino Pügner; Harald Schenk
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SWIFTS: a groundbreaking integrated technology for high-performance spectroscopy and optical sensors
Author(s): Christophe Bonneville; Fabrice Thomas; Mikhael de Mengin Poirier; Etienne Le Coarer; Pierre Benech; Thierry Gonthiez; Alain Morand; Olivier Coutant; Eric Morino; Renaud Puget; Bruno Martin
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Fabrication and evaluation of a 500 W cladding-light stripper
Author(s): A. Kliner; Kai-Chung Hou; M. Plötner; Ch. Hupel; Th. Stelzner; T. Schreiber; R. Eberhardt; A. Tünnermann
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Spatial beam splitting for fully integrated MEMS interferometer
Author(s): Kareem Khirallah; Inas Ramsis; Mohamed Serry; Mohamed Swillam; Sherif Sedky
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In-plane diffraction loss free optical cavity using coated optical fiber and silicon micromachined spherical mirror
Author(s): Yasser Sabry; Tarik Bourouina; Bassam Saadany; Diaa Khalil
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A tunable split-ladder photonic crystal cavity by nanoelectromechanical actuator
Author(s): Feng Tian; Guangya Zhou; Fook Siong Chau; Jie Deng; Ramam Akkipeddi; Xiaosong Tang; Siew Lang Teo; Yee Cheong Loke
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Compact holographic printer using RGB waveguide holographic optical elements
Author(s): Kyungsuk P. Pyun; Chilsung Choi; Alexander V. Morozov; Sunil Kim; Jungkwuen An
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Innovative approach to high stroke electrostatic actuators
Author(s): N. Lange; F. Wippermann; E. Beckert; R. Eberhardt; A. Tünnermann
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Tunable MEMS diffraction gratings with improved displacement profile of the fixed-fixed beams
Author(s): V. Gowri Suresh; Shanti Bhattacharya; Nandita Dasgupta
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Optimization of biogas production using MEMS based near infrared inline-sensor
Author(s): Ray Saupe; Thomas Seider; Volker Stock; Olaf Kujawski; Thomas Otto; Thomas Gessner
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InGaAsP optical device integration on SOI platform by Ar/O2 plasma assisted bonding
Author(s): A. Higo; L. Li; E. Higurashi; M. Sugiyama; Y. Nakano
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A new fabrication method for nano-gratings based on the high flexibility of PDMS
Author(s): Min Cui; Yong Zhang; Binzhen Zhang; Wanjun Wang
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Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
Author(s): Wolfgang Kronast; Ulrich Mescheder; Bernhard Müller; Rolf Huster
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Development of adaptive liquid microlenses and microlens arrays
Author(s): Shaun R. Berry; Jason B. Stewart; Todd A. Thorsen; Ingrid Guha
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Tunable cylindrical microlenses based on aluminum nitride membranes
Author(s): Steffen Leopold; Daniel Paetz; Fabian Knoebber; Oliver Ambacher; Stefan Sinzinger; Martin Hoffmann
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Liquid lens based on electrowetting: actual developments on larger aperture and multiple electrodes design for image stabilization or beam steering
Author(s): Bruno Berge; Jérôme Broutin; Hilario Gaton; Géraldine Malet; Eric Simon; Florent Thieblemont
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The fabrication of out of plane aspherical microlens arrays
Author(s): Yong Zhang; Wanjun Wang
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MOEMS-based time-of-flight camera for 3D video capturing
Author(s): Jang-Woo You; Yong-Hwa Park; Yong-Chul Cho; Chang-Young Park; Heesun Yoon; Sang-Hun Lee; Seung-Wan Lee
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Simultaneous multispectral imaging using lenslet arrays
Author(s): Michele Hinnrichs; James Jensen
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Batch fabrication of micro-optical sensing and imaging devices
Author(s): F. C. Wippermann; A. Reimann; A. Oelschläger; P. Dannberg; F. Blöhbaum; C. Koburg; T. Köhler
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Diffraction and photometric limits in today's miniature digital camera systems
Author(s): Andreas Brückner; Michael Schöberl
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Optical MEMS in space instruments for Earth observation and astronomy
Author(s): F. Zamkotsian; A. Liotard; P. Lanzoni; T. Viard
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Closed-loop control driver for quasi-static MOEMS mirrors
Author(s): A. Tortschanoff; D. Holzmann; M. Lenzhofer; T. Sandner; A. Kenda
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