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Advances in Metrology for X-Ray and EUV Optics IV
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Volume Details

Volume Number: 8501
Date Published: 26 September 2012

Table of Contents
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Front Matter: Volume 8501
Author(s): Proceedings of SPIE
Review of substrate materials, surface metrologies and polishing techniques for current and future-generation EUV/x-ray optics
Author(s): Regina Soufli; Sherry L. Baker; Eric M. Gullikson; Tom McCarville; Jeffrey C. Robinson; Dennis Martínez-Galarce; Mónica Fernández-Perea; Michael J. Pivovaroff
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Development of surface profile measurement method for ellipsoidal x-ray mirrors using phase retrieval
Author(s): Takahiro Saitou; Yoshinori Takei; Hidekazu Mimura
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Measurement of groove density variation of varied-line-space grating for high-resolution soft x-ray monochromator
Author(s): Y. Senba; H. Kishimoto; T. Miura; H. Ohashi; S. Goto; T. Ishikawa
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Cross comparison of surface slope and height optical metrology with a super-polished plane Si mirror
Author(s): Nikolay A. Artemiev; Daniel J. Merthe; Daniele Cocco; Nicholas Kelez; Thomas J. McCarville; Michael J. Pivovaroff; David W. Rich; James L. Turner; Wayne R. McKinney; Valeriy V. Yashchuk
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Using MountainsMap (Digital Surf) surface analysis software as an analysis tool for x-ray mirror optical metrology data
Author(s): Alan Duffy; Brian Yates; Peter Takacs
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Optimal setting of bendable optics based on FEA calculations
Author(s): Nikolay A. Artemiev; Ken P. Chow; Daniele La Civita; Daniel J. Merthe; Yi-De Chuang; Wayne R. McKinney; Valeriy V. Yashchuk
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Methodology for optimal in situ alignment and setting of bendable optics for diffraction-limited focusing of soft x-rays
Author(s): Daniel J. Merthe; Valeriy V. Yashchuk; Kenneth A. Goldberg; Martin Kunz; Nobumichi Tamura; Wayne R. McKinney; Nikolay A. Artemiev; Richard S. Celestre; Gregory Y. Morrison; Erik Anderson; Brian V. Smith; Edward E. Domning; Senajith B. Rekawa; Howard A. Padmore
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Ex situ tuning of bendable x-ray mirrors for optimal beamline performance
Author(s): Wayne R. McKinney; Valeriy V. Yashchuk; Daniel J. Merthe; Nikolay A. Artemiev; Kenneth Goldberg
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Development of a high-speed nanoprofiler using normal vector tracing
Author(s): T. Kitayama; H. Matsumura; K. Usuki; T. Kojima; J. Uchikoshi; Y. Higashi; K. Endo
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Progress of multi-beam long trace-profiler development
Author(s): Mikhail V. Gubarev; Daniel J. Merthe; Kiranmayee Kilaru; Thomas Kester; Ron Eng; Brian Ramsey; Wayne R. McKinney; Peter Z. Takacs; Valeriy V. Yashchuk
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Dynamic surface roughness profiler
Author(s): Brad Kimbrough; Neal Brock; James Millerd
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Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Author(s): M. Trost; S. Schröder; C. C. Lin; A. Duparré; A. Tünnermann
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Improved thermal stability of Mg/Co multilayer by introducing Zr barrier layer
Author(s): Haochuan Li; Sika Zhou; Xiaoqiang Wang; Jingtao Zhu; Zhanshan Wang
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Microroughness measurements and EUV calibration of the solar ultraviolet imager multilayer-coated mirrors
Author(s): Dennis Martínez-Galarce; Regina Soufli; David L. Windt; Marilyn Bruner; Eric Gullikson; Shayna Khatri; Eberhard Spiller; Jeff Robinson; Sherry Baker; Evan Prast
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Development of grating-based hard x-ray Talbot interferometry for optics and beam wavefront characterization at the advanced photon source
Author(s): Shashidhara Marathe; Michael J. Wojcik; Naresh G. Kujala; Albert T. Macrander; Han H. Wen; Chian Liu; Kamel Fezzaa; Ralu Divan; Derrick C. Mancini; Lahsen Assoufid
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