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Micromachining and Microfabrication Process Technology XVI
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Volume Details

Volume Number: 7926
Date Published: 10 February 2011

Table of Contents
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Front Matter: Volume 7926
Author(s): Proceedings of SPIE
IR photodetector based on an optically cooled micromirror as a light pressure sensor
Author(s): Gennady P. Berman; Alan R. Bishop; Boris M. Chernobrod; Umar Mohideen
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Endurance analysis of optical master stamps for UV-replication
Author(s): F. C. Wippermann; A. Reimann; G. Leibeling
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Thermo-optic coefficients of SiC, GaN, and AlN up to 512°C from infrared to ultraviolet region for tunable filter applications
Author(s): Naoki Watanabe; Tsunenobu Kimoto; Jun Suda
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Laser processing inside transparent materials: dependence on pulse length and wavelength
Author(s): U. Loeschner; J. Schille; R. Ebert; H. Exner
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Sub-micron texturing of silicon wafer with fiber laser
Author(s): Hamid Farrokhi; Wei Zhou; Hong Yu Zheng; Zhongli Li
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First results on electrostatic polymer actuators based on UV replication
Author(s): N. Lange; F. Wippermann; R. Leitel; C. Bruchmann; E. Beckert; R. Eberhardt; A. Tünnermann
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Commercial plexiglass mirrors and MEMS: new approach toward low cost polymer microsystems
Author(s): A. Khosla; B. L. Gray
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Fabrication of electrostatic-actuated single-crystalline 4H-SiC bridge structures by photoelectrochemical etching
Author(s): Naoki Watanabe; Tsunenobu Kimoto; Jun Suda
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Poly-HDDA microstructure fabrication using microstereolithography for microcantilever-based sensor technology
Author(s): Ankur Goswami; Arindam Phani; Ankit Krisna; N. Balashanmugam; Giridhar Madras; A. M. Umarji
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MEMS product engineering: methodology and tools
Author(s): Dirk Ortloff; Jens Popp; Thilo Schmidt; Kai Hahn; Matthias Mielke; Rainer Brück
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Automated measurement of centering errors and relative surface distances for the optimized assembly of micro-optics
Author(s): Patrik Langehanenberg; Eugen Dumitrescu; Josef Heinisch; Stefan Krey; Aiko K. Ruprecht
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Impact of using filtration on global and local uniformity of spin on glue materials
Author(s): S. Bernard; R. A. Miller; V. Pepper; J. Braggin; F. F. C. Duval
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Design and fabrication of a CMOS MEMS logic gate
Author(s): Chun-Yin Tsai; Tsung-Lin Chen; Hsin-Hao Liao; Chen-Fu Lin; Ying-Zong Juang
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Development of a novel thermal switch through CMOS MEMS fabrication process
Author(s): You-Liang Lai; Lei-Chun Chou; Ying-Zong Juang; Hann-Huei Tsai; Sheng-Chieh Huang; Jin-Chern Chiou
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Large scale micropatterning of multi-walled carbon nanotube/polydimethylsiloxane nanocomposite polymer on highly flexible 12x24 inch substrates
Author(s): A. Khosla; D. Hilbich; C. Drewbrook; D. Chung; B. L. Gray
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