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Micromachining and Microfabrication Process Technology XV
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Volume Details

Volume Number: 7590
Date Published: 10 February 2010

Table of Contents
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Front Matter: Volume 7590
Author(s): Proceedings of SPIE
Ultrafast pulsed laser micro-deposition printing on transparent media
Author(s): Bing Liu; Zhendong Hu; Yong Che
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Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control
Author(s): Paul J. L. Webster; Ben Y. C. Leung; Joe X. Z. Yu; Mitchell D. Anderson; Tony P. Hoult; James M. Fraser
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Sub-micron machining of semiconductors: femtosecond surface ripples on GaAs by 2 um laser light
Author(s): Mark Ramme; Jiyeon Choi; Troy Anderson; Ilja Mingareev; Martin Richardson
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Polarization converted laser beams for micromachining applications
Author(s): Ulrich Klug; Jan F. Düsing; Takashi Sato; Kunihiko Washio; Rainer Kling
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Enhancing laser scanner accuracy by grid correction
Author(s): Roni-Jussi Halme; Tero Kumpulainen; Reijo Tuokko
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Multilayer metal micromachining for THz waveguide fabrication
Author(s): Adam Rowen; Andrew E. Hollowell; Michael Wanke; Christopher D. Nordquist; Christian Arrington; Rusty Gillen; Jonathan J. Coleman
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Fabrication of plastic microlens arrays for array microscopy by diamond milling techniques
Author(s): Brian McCall; Gabriel Birch; Michael Descour; Tomasz Tkaczyk
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Diamond turning of aspheric steel molds for optics replication
Author(s): F. Klocke; O. Dambon; B. Bulla
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Alternative technology for fabrication of nano- or microstructured mould inserts used for optical components
Author(s): M. Wissmann; M. Guttmann; M. Hartmann
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Development of micro-incandescent light sources on silicon substrate
Author(s): A. H. Gollub; D. O. Carvalho; G. Rehder; M. I. Alayo
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Optimizing galvanic pulse plating parameters to improve indium bump to bump bonding
Author(s): Jonathan J. Coleman; Adam Rowen; Seethambal S. Mani; W. Graham Yelton; Christian Arrington; Rusty Gillen; Andrew E. Hollowell; Daniel Okerlund; Adrian Ionescu
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Advances in photonic MOEMS-MEMS device thinning and polishing
Author(s): James J McAneny; Mark Kennedy; Tom McGroggan
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Kinetic investigations on TiO2 nanoparticles as photo initiators for UV-polymerization in acrylic matrix
Author(s): Carsten Becker-Willinger; Sabine Schmitz-Stöwe; Dirk Bentz; Michael Veith
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Investigation on particle generation by micro-electro discharge machining
Author(s): Sourav Mitra; . Muralidhara; N. J. Vasa; Singaperumal M.
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Estimation of tool wear compensation during micro-electro-discharge machining of silicon using process simulation
Author(s): . Muralidhara; Nilesh J. Vasa; Singaperumal M.
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Alternative method for steam generation for thermal oxidation of silicon
Author(s): Jeffrey J. Spiegelman
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Manufacturability of gas sensor with ZnO nanoparticles suspension deposited by ink jet printing
Author(s): V. Conedera; P. Yoboue; F. Mesnilgrente; N. Fabre; P. Menini
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Electrode micropatterning by microcontact printing method to large area substrates using nickel mold
Author(s): Atsushi Takakuwa; Takeshi Shibuya; Kiyoshi Yase
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Laser microstructuring of sapphire wafer and fiber
Author(s): Yutang Dai; Gang Xu; Jianlei Cui; Fan Bai
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