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Laser Applications in Microelectronic and Optoelectronic Manufacturing XV
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Volume Details

Volume Number: 7584
Date Published: 18 February 2010

Table of Contents
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Front Matter: Volume 7584
Author(s): Proceedings of SPIE
Flexible fabrication of deep microstructures by laser-induced backside wet etching
Author(s): Tadatake Sato; Ryozo Kurosaki; Aiko Narazaki; Yoshizo Kawaguchi; Hiroyuki Niino
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Excimer ultraviolet sources for thin film deposition: a 15 year perspective
Author(s): Ian W. Boyd; Irving I. Liaw
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Holographic femtosecond laser processing
Author(s): Yoshio Hayasaki
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Effect of target structure on interfering femtosecond laser processing
Author(s): Y. Nakata; T. Hiromoto; N. Miyanaga
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Two-photon lithography and nanoprocessing with picojoule extreme ultrashort 12 femtosecond laser pulses
Author(s): Karsten König; Aisada Uchugonova; Michael Schug; Huijing Zhang; Sumarie Saremi; Dara Feili; Helmut Seidel
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Individually controlled multi-focus laser processing for two-photon polymerization
Author(s): Kotaro Obata; Jürgen Koch; Boris N. Chichkov
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Up-conversion of crystal oscillator frequency in silicon package by near infrared, ultrashort laser
Author(s): Yoshiro Ito; Fumiya Sato; Yuuki Shinohe; Rie Tanabe; Kozo Tada
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Density amplification in laser-assisted protein adsorption by photobleaching
Author(s): Jonathan M. Bélisle; Santiago Costantino
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Nano-aquarium fabrication with cut-off filter for mechanism study of Phormidium assemblage
Author(s): Y. Hanada; K. Sugioka; I. Ishikawa; H. Kawano; A. Miyawaki; K. Midorikawa
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Processing of metals and dielectric materials with ps-laserpulses: results, strategies, limitations and needs
Author(s): Beat Neuenschwander; Guido F. Bucher; Christian Nussbaum; Benjamin Joss; Martin Muralt; Urs W. Hunziker; Peter Schuetz
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Laser texturing of doped borosilicate glasses
Author(s): Alexander Streltsov; James Dickinson; Richard Grzybowski; Daniel Harvey; Stephan Logunov; Alper Ozturk; James Sutherland; Marcel Potuzak
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Lasers in the manufacturing of LEDs
Author(s): Marco Mendes; Jie Fu; Christian Porneala; Xiangyang Song; Mat Hannon; Jeff Sercel
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Recent advancements in technology of compact laser plasma EUV sources
Author(s): Henryk Fiedorowicz; Andrzej Bartnik; Roman Jarocki; Jerzy Kostecki; Ladislav Pina; Mirosław Szczurek; Przemysław Wachulak
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Femtosecond laser direct writing of volume Fresnel zone plates
Author(s): Pornsak Srisungsitthisunti; Okan K. Ersoy; Xianfan Xu
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High-quality percussion drilling of silicon with a CW fiber laser
Author(s): Joe X. Z. Yu; Paul J. L. Webster; Ben Y. C. Leung; James M. Fraser
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Laser micromachining of metallic glasses: investigation of the material response to machining with micro-second and pico-second lasers
Author(s): I. Quintana; T. Dobrev; A. Aranzabe; G. Lalev
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355nm DPSS UV laser micro-processing for the semiconductor and electronics industry
Author(s): Fei Zhang; Jun Duan; XiaoYan Zeng; XiangYou Li
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Investigation on production of highly textured Sb doped polycrystalline silicon using solid state Nd:YAG laser for photovoltaic application
Author(s): I. A. Palani; N, J. Vasa; M, Singaperumal; T, Okada
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Laser scattering based identification of micro-surface conditions for the inspection of solar cell wafer
Author(s): Yeon Ki Hong; Gyung Bum Kim; Young-Jun Jin
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Modeling of laser drilled microhole profiles in carbon fiber composites in low fluence regime
Author(s): Frank F. Wu
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Comparison of the modeling and experimental data of the laser drilled microhole profiles in carbon fiber composites in low fluence regime
Author(s): Frank F. Wu
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Second harmonic optimization of a hologram
Author(s): S. Hasegawa; Y. Hayasaki
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Near-IR femtosecond and VUV nanosecond laser processing of TeO[sub]2[/sub] crystals
Author(s): S. Beke; K. Sugioka; K. Midorikawa; J. Bonse
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MOPA fiber laser with controlled pulse width and peak power for optimizing micromachining applications
Author(s): Sami T. Hendow; Sami A. Shakir; Joao M. Sousa
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Ronchi test with equivalent wavelength
Author(s): Anmi García-A.; Fermín Solomon Granados-A.; Alejandro Cornejo-R.
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Centimeter-long microfluidic channel with an aspect ratio above 1,000 directly fabricated in fused silica by femtosecond laser micromachining
Author(s): Fei He; Ya Cheng; Zhizhan Xu; Koji Sugioka; Katsumi Midorikawa
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