In this paper the most recent investigations in ultrasonic assisted diamond machining of hardened steel at the Fraunhofer IPT is presented. The goal of this technology is to unify the outrageous specifications of diamond machining process with steel material. The focus lies on the kinematic influence of the discrete frequencies 40 kHz and 60 kHz. Special interest is given to the reachable surface roughness depending on process parameters. The machined steel (1.2083, X40Cr14, STAVAX ESU) is a common mold die material for optical replication processes.Results of the accomplished investigations show the potential of the ultrasonic assisted process and recent developments. By increasing the frequency from 40 kHz to 60 kHz the overall process stability is increased. This makes the process less vulnerable towards feed rate variation or towards the variation of machined material hardness. Furthermore no tool wear is detected at high material removal rates or high cutting distances during component machining.

Based on the characteristics of off-axis aspherical surface, a new method used for polishing off-axis aspherical mirrors-Double-Swing Method (DSM) is proposed in this paper, and the polishing mechanism of DSM is introduced. The mathematical model of the DSM with steady movement state is established. The movement of this mathematical model is simulated in a programming language; the comparison of simulation effects under different parameters is made. In order to achieve optimal parameters, a high order off-axis rectangle aspherical mirror has been polished by DSM. The final result of profile measurements of 12nm, RMS is achieved. The result indicates that the method is of practice and has even higher working efficiency and precision.

In diamond fly-cutting of microstructured surface, the cutting force plays a crucial role in the establishment of cutting plans, the setting of cutting conditions and the determination of the characteristics of cutting processes like tool wear and surface texture. The characteristics of cutting force are introduced and a mechanistic cutting force model for predicting the cutting force in diamond fly-cutting of microstructured surface is proposed in this study. In the model the cutting edge radius of single crystal diamond tool is considered. Furthermore the contribution of elastic deformation of the workpiese to the total force is also accounted. The force components in the horizontal 'X' and 'Y' direction are calculated from material hardness, elastic modulus, uncut chip area, tool geometry and the average value of shear angle respectively. And the predicted cutting forces are consistent with experimental cutting force.

Precision Glass Molding Process is adopted for mass production of aspheric lenses, micro-lens array, diffractive optical elements and free-form lenses which are difficult to be manufactured by using conventional methods. In this research, high order aspheric lenses with 6th item are molded using the glass material P-SK57 which is characterized by a low glass transition temperature (Tg) 493°C and thermal expansion coefficient (TEC) 8.9×10^-6. Some of the molding conditions are as follow: 1) the molding temperature is 565°C, 2) the pressure force is kept at 4KN for 90 seconds and 3) the lens is cooling at an annealing velocity of 1.5~2°C /s to a release temperature of 180°C. The total molding cycle time is about 16 minutes. Molded aspheric lenses are measured with a Taylorsurf contact profilometer and a Zygo Newview white-light interferometer. As a result, the shape accuracy of molded lenses is less than 0.5um (PV) and surface finish quality is less than 2nm.

With the rapid development of information technology and electro-optical communication industry, various micro optical lenses have been used widely. Especially, because of great advantages concerning life, stability and imaging characteristics, the demand for glass lens is increasing the high-precision imaging. This paper studies on the ultra-precision parallel grinding technique of micro glass lens mould and investigates the form error compensation technique in grinding process. Grinding test of micro-lens mould with 10mm in diameter is conducted, and the surface roughness of R_a 5.98nm, Rz 34.95nm and form accuracy of PV 113nm, RMS 23nm are obtained.

Silicon based advanced ceramics show advantages in comparison to other materials due to their extreme hardness, wear and creep resistance, low density and low coefficient of thermal expansion. As a matter of course, machining requires high efforts. In order to reach demanded low roughness for optical or tribological applications a defect free surface is indispensable. In this paper, polishing of silicon nitride and silicon carbide is investigated. The objective is to elaborate scientific understanding of the process interactions. Based on this knowledge, the optimization of removal rate, surface quality and form accuracy can be realized. For this purpose, fundamental investigations of polishing silicon based ceramics are undertaken and evaluated. Former scientific publications discuss removal mechanisms and wear behavior, but the scientific insight is mainly based on investigations in grinding and lapping. The removal mechanisms in polishing are not fully understood due to complexity of interactions. The role of, e.g., process parameters, slurry and abrasives, and their influence on the output parameters is still uncertain. Extensive technological investigations demonstrate the influence of the polishing system and the machining parameters on the stability and the reproducibility. It is shown that the interactions between the advanced ceramics and the polishing systems is of great relevance. Depending on the kind of slurry and polishing agent the material removal mechanisms differ. The observed effects can be explained by dominating mechanical or chemo-mechanical removal mechanisms. Therefore, hypotheses to state adequate explanations are presented and validated by advanced metrology devices, such as SEM, AFM and TEM.

More and more precision freeform parts are required by defense technology and national economy today and in the future. The applications of freeform parts have traditionally conformed to the limitations imposed by practical limits on high effective fabricating technology. Single point diamond turning is one of the important methods of machining freeform surface parts. Generally speaking, optical freeform surfaces have complex geometrical surface shapes and require ultra smooth surface (roughness down to 10nm) and high form accuracy (form accuracy down to several ten nanometers). So, the ultra precision turning lathe must improve the motion accuracy, dynamic stiffness and bandwidth of every axis. Direct drive technology combined with aerostatic bearing do not affect by frication and eliminate the micro-backlash and creeping; reduce the number of transmission element, shorten the transmitted chains and be propitious to improve dynamic stiffness and bandwidth. This paper presents a ultra precision diamond turning lathe with linear motor and aerostatic guide drive system. Combined with the lathe a FTS (Fast Tool Servo) system driven by voice coil actor is use to machining free form surface. The turning experiments show that this lathe can satisfy the requirement of machine freeform surface.

LBO crystal with high quality surface, which must be defect-free and super smooth, is urgently needed because of its applications in high energy laser system. Chemical mechanical polishing (CMP) is adopted to raise surface quality and processing efficiency in super precision polishing of LBO crystal. The polyurethane pad and colloidal SiO2 slurry are chosen and the polishing experiments are performed on Logitech PM5 Precision Lapping & Polishing Machine. The slurry pH is changed and its influence on material removal rate (MRR) and surface roughness is studied. The polished surface roughness is measured by using atomic force microscope. MRR is calculated through the difference of the crystal thickness between before and after polishing by polishing time. In the pH range from 2 to 6, MRR of LBO crystal increases with pH decreasing and there is an optimal pH for surface roughness. While in the pH range from 7 to 13, MRR and surface roughness vibrate with pH. The maximal MRR reaches 758 nm/min when slurry pH is kept at 2 and the best surface roughness reaches 0.197 nm RMS when it at 4.

Based on the edge effects in the ultra precision polishing process, a revised skin model is used to predict material removal rate (MRR) of circular wafer. With force equation and torque equation, in order to calculate the skin width and the pressure distribution, a revised formula is given. According to Preston's equation, by using Math-Cad software, the material removal rate (MRR) of circular wafer is simulated, and two factors which influence MRR are discussed.One is the distance between the circular wafer center and the polishing tool center; the other is the ratio of the angular velocity of circular wafer to the polishing tool angular velocity.

With the application of finite element (FE) software, a finite element model is established to simulate the cutting procedure for KDP crystals. Based on this model, the influential factors on cutting force of KDP crystal in ultra-precision cutting is analyzed. The study shows that the cutting forces will enlarge with the increment of the depth of cut, but the influence of depth of cut on the cutting force is more significant. The cutting force decreases as the cutting speed increases. The surface roughness decreases as the negative rake increases in the same cutting condition. Super-smooth surface of KDP crystal can be obtained when edge angle is negative rake angle. Finally, cutting experiments are carried out to validate the FE simulated results.

Experiments are taken to investigate the effect of abrasive grain size on the lapping uniformity of sapphire wafer, macro and micro surface profiles are measured and compared by contact and contactless measurement methods. For W14 carbide boron abrasive lapping process, rolling and extruding effects are the main material removal mechanism and leaves high density micro-crack on the lapped sapphire surface. On the other hand, W3.5 carbide boron abrasive grain performs a ductile cutting process for material remove process under the same operated parameters, only scratch on sapphire surface can be viewed by AFM. Experimental results show that abrasive grain size has a great effect on the surface integrity of the lapped sapphire, charging status of abrasive grain into the lapping plate and its effect on the surface integrity should be considered when choosing the abrasive grain size for precision lapping process. Lapping uniformity both for macro and micro level, roughness and flatness of sapphire wafer can be achieved by using W3.5 carbide boron abrasive grain and acceptable by pre-polishing process.

Micro-crack is one of the most effective factor to the intensity and service life of optical components. Owing to the micro-crack on surface, actual strength of optical components is reduced severely, even less than ten-percent of its theoretical strength. According to fracture mechanics, the mechanisms of the formation and propagation of micro-crack and the growth theory of sub-critical micro-crack are discussed in the paper firstly. Based on practice, an on-line test method disposing etching holes-the molecule-infiltrating method and the principles of acid-etching method disposing micro-crack are described. Followed by the demolishing mechanism of abrasives and a more reasonable removal redundancy of fine-grinding and polishing during ,optical production is given by using abrasives in different-size orderly.

In this paper, a nanoparticle colloid jet machining system has been developed for shaping and polishing ultra smooth surfaces of brittle materials. Nanoparticle colloid jet machining is an ultra smooth surface processing technique which utilizes surface chemical reaction between work surface atoms and nanoparticles in alkaline colloid to remove the uppermost surface atoms. The purpose of the paper is to investigate the surface removal mechanism and process of optical glass in nanoparticle colloid jet machining. Removal experiments have been conducted to show the removal process. A K9 glass sample with a regulated surface profile has been polished and flattened in nanoparticle colloid jet machining. The roughness of the K9 glass surface has been reduced from 31.6 nm RMS to less than 1 nm RMS. Atomic force microscopy (AFM) were used to observe the surface microscopic morphological characteristics of K9 glass sample processed by nanoparticle colloid jet machining. The observation results show that the protuberant sites on the work surface are preferentially removed in nanoparticle colloid jet machining. Power spectral density analyses have been done to evaluate the performance of the nanoparticle colloid jet machining. The PSD curves show that the surface has been flattened within spatial wavelength of 0.04~10 μm after nanoparticle colloid jet machining.

The optical design of 350X zoom lens with Diffractive Optical Element (DOE) is demonstrated at the proposal. This lens is composed of front elements, a zoom motor group and a compensation group. The compensation group is specially designed to meet the further step motors under the control of DSP chips. Besides, location of DOE will be determined by HTGA (Hybrid Taguchi Genetic Algorism) for further elimination of chromatic aberration. The results show that regardless of whether chromatic aberration is axial or longitudinal, issues concerning the optical lens's DOE location could be determined and chromatic aberration could be significantly reduced.

The distributions of velocity and pressure during polishing process are analyzed in this paper and the effects of which on material removed/removal rate (MR/MRR) are discussed. Usually, polished wafer moves in planetary kinematics pattern, and when the rotation rate of wafer is identical with that of polishing pad the velocity distribution is theoretically uniform from the viewpoint of wafer-pad interface as a whole. On the other hand, when a load is applied to the top surface of wafer pressure distribution is even in the interior of wafer while the pressure sharply increases at the wafer's border, which will inevitably affect the non-uniformity (NU) of MR/MRR, and therefore we have to adjust other parameters, such as rotation rate of pad (or wafer) or improve motion pattern of wafer with respect to polishing pad, to optimize the NU.

To meet the requirement for high efficiency machining of the ultra-precision, ultra-smooth micro structured optical surface, an ultra-precision three axes micro milling machine was developed. The overall size of the machine is 600mm×500mm×700mm and all the strokes of three axes are 75mm. To overcome nonlinearity that always exists in conventional servo mechanism driven by ball screw, permanent-magnet linear motor is used to directly drive the aerostatic bearing slide. Linear encoder with 1.2 nm resolution was used as the feedback of position to buildup closed loop control system. The open architected CNC system is composed of the high performance embedded PMAC motion control card and standard industrial PC, and the control algorithm is based on "PID + velocity/acceleration feed forward + notch filter" strategy. Test results indicate that the positioning accuracy of all the three axes is less than ±0.25μm, and the repetitive positioning accuracy is less than ±0.2μm. The machine is proved to achieve nanometer scale through step response and sinusoidal signal track. The preparatory milling experiments with micro cemented carbide milling cutter further proves the processing capacity.

A new method magnetorheological finishing (MRF) used for deterministical finishing of optical aspheric mirrors is applied to overcome some disadvantages including low finishing efficiency, long iterative time and unstable convergence in the process of conventional polishing. Based on the introduction of the basic principle of MRF, the key techniques to implement deterministical MRF are also discussed. To demonstrate it, a 200 mm diameter K9 class concave asphere with a vertex radius of 640mm was figured on MRF polish tool developed by ourselves. Through one process about two hours, the surface accuracy peak-to-valley (PV) is improved from initial 0.216λ to final 0.179λ and root-mean-square (RMS) is improved from 0.027λ to 0.017λ (λ = 0.6328um ). High-precision and high-efficiency convergence of optical aspheric surface error shows that MRF is an advanced optical manufacturing method that owns high convergence ratio of surface figure, high precision of optical surfacing, stabile and controllable finishing process. Therefore, utilizing MRF to finish optical aspheric mirrors determinately is credible and stabile; its advantages can be also used for finishing optical elements on varieties of types such as plane mirrors and spherical mirrors.

The microcapsules can act as novel optical functional material in which the optical recording substance such as color-forming substance, photoinitiator and prepolymer are encapsulated. In this paper, the microcapsules with average particle diameter of 300nm are prepared with interfacial polymerization method. The optical responding character of the microcapsule is analyzed based on IR spectra and image density technique. Results show that the microcapsule material encapsulated prepolymer TMPTA and photoinitiator Irgacure-ITX, TPO has thermal phase-change at 140°C, at which the penetrability of the microcapsule has the highest efficiency. With the increase of exposure time, the reduction in absorption intensities of the prepolymer TMPTA are observed at 1635cm^-1 of C=C stretching and 898cm^-1 of C-H stretching on the C=C molecular bond. Such a result can be ascribed to the double bond cleavage process of the prepolymer TMPTA is initiated by the optical-exposed photoinitiator, and superpolymer network is formed. The image density contrast between the unexposed and exposed microcapsule is enhanced with exposure time increased.

A brand-new technology for manufacturing SiC reflecting mirror that is different from the traditional method is adopted, which is called as fixed abrasive surfacing technology. Not only the new method achieves better mirror quality with bigger diamond in diameter quickly , but also because of the fixed motion between the abrasive and workpiece and it will be good for surface finishing. During experiment, material removal characteristic which is on SiC under certain rotation speed and pressure by W7,W5,W3.5,W1.5 pellets has been tested. Through those removal curves, we come to a conclusion that the technology not only has a higher removal rate, but also has much more stability. In addition, the surface roughness experiment is mentioned. In the first stage, we achieved a mirror with surface roughness 42.758nm rms with W7 pellets. The surface roughness is descending as we change pellets with smaller diamond in diameter . At the end of experiment, a smooth surface with roughness 1.591nm rms has been achieved after using W1.5 pellets. Experiment results indicate that the technology which manufactures SiC reflecting mirror with fixed abrasive is able to replace the traditional slurry abrasive completely in certain finishing phase and also has a great foreground in application.

For improving laser direct writing in spacial spherical parallel grids, some definitions and descriptions of spacial spherical parallels structure are presented. According to the formational principle of spacial spherical parallels and geometry of space about the parallel grids, the mathematic model of spacial spherical grids is built up. Through analyzing the part area of spacial spherical parallel grids and the angles constituted of the parallels, the angle formula and area formula of spherical parallel grids are deduced. The relation of "the exactly square arc-shaped" and "the irregular square" of the spherically parallel grids are studied. The program of these formulas is composed. And some experiments are made to show its validity.

Using boundary conditions of electromagnetic waves , a new transfer matrix method that study electromagnetic waves in thin films and a dispersive formula of 1D photonic crystal are derived. Using the formula reflection and refraction of light is studied, the forbidden band of 1D photonic crystal is studied. The transfer matrix method and the classic characteristic matrix method are compared. The transfer matrix method can not only solve the problem that characteristic matrix method can solve, the transfer matrix method can also solve the problem that characteristic matrix method can not solve. Therefore the transfer matrix method is a more fundamental and wider range of application.

A design method of aspherical surface for panoramic imaging system with two mirrors using multi-populations genetic algorithms is proposed. Astigmatism induced by mirrors may significantly compromise image resolution. To solve this problem, we induced algebraic expression of astigmatism in panoramic imager based on generalized Coddington equation and theory of geometric optics. Then, we propose an optimization process for mirror profile design to eliminate astigmatism and provide purposely-designed projection formula with aid of MPGA. A series of polynomial expressions of aspherical surfaces are obtained and procedures of the design are presented. In order to facilitate ray tracing and aberration calculation, even asphere surface model is obtained by using of hybrid schemes combining MPGA and damped least squares. Finally, a prototype of the catadioptric panoramic imager has been developed and panoramic ring image is obtained.

During chemical mechanical planarization polishing (CMP), with the increase of the concentration of abrasives slurry, there are three regions of material removal rate (MRR). It is a noticeable phenomenon for several wafer material, including copper, aluminum, tungsten, silicon and silicon oxide. In this paper, a new abrasion mechanism model in solid-solid contact mode of the CMP, proposed by Luo and David, is revised to explain the three regions and two transitions between these regions. Experiment data from fast polishing process (FPP) supports the prediction of material removal rate regions.

In this study, YSZ thin films with different Y₂O₃ content have been prepared by electron beam evaporation on different types of substrates. The film properties such as surface roughness, microstructure, refractive index and transmission spectra were characterized by using Scanning Probe Microscopy (SPM), X-ray diffraction, SEM, ellipsometer and spectrophotometer respectively. The results indicate that the film properties and microstructure correlate with the annealing process dramatically. It is found the film structure undergoes from amorphous to tetragonal phase then ultimately to tetragonal and monoclinic phase with the temperature increasing from 100 to 1100°C, while the surface roughness increases from 1.3 to 24.6nm, and the refractive index varies from 1.86 to 2.02. XRD analysis shows the grain size increased with the annealing temperature, the reduction of defect and surface compact incurred by the high temperature process results in the increase of refractive index. Further investigations show that the optical properties of YSZ films have little effect with the content of Y₂O₃ and the variation of refractive index is caused by the compactness due to the crystallization of the films under high temperature.

In aspheric mirror polishing progress, the deformable polishing lap can change the lap surface to fit the surface of aspheric optical mirror. A novel method of designing deformable polishing lap is brought forward by using PZT actuator. It consists of an aluminum disk which can change surface profile continuously under the control of PZT actuators. When the deformable aspherical polishing lap moves on the surface of aspherical mirror, the needed deformation of each PZT actuator is calculated at any location. After each PZT actuator deforming, the surface profile of deformable aspherical polishing lap is changed to an off-axis surface of aspheric optical mirror at that location. In this paper, the rational of the PZT actuated deformable aspheric polishing lap is introduced,and the calculation method of deformation is explored also.By using finite element method, the deforming capability of the PZT actuated deformable aspheric polishing lap is simulated to reform a hyperboloid mirror with diameter 350mm,k=-1.112155,R=840.0 mm. Two type of PZT actuator arrangements are compared and analyzed. The results show that the PZT actuated deformable aspheric polishing lap can reshape to fit the surface of aspheric mirror and the RMS is less than 2um.

Diamond-like Carbon(DLC) films are deposited by Ti:Sapphire femtosecond pulsed laser(800nm, 120fs-2ps, 3.3W, 1-1000Hz) at room temperature. The substrate is n-type Si(100), and the target is 99.999%-purity graphite. After a great lot of experiments, optimal technical parameters, which are 1000Hz repetition frequency, 120fs pulse-width, 5cm-distance between target and underlay and 10¹⁴W/cm² power-density, were used to deposite 443nm thick DLC film. Raman spectrum measurement shows a broad peak with a center at 1550 cm^-1 for all films, similar to those of typical diamond-like carbon films prepared using other methods. And sp³-bond content reaches 67% analyzed by XPS. There is no nick on the film when scraped 10⁵ times by a RS-5600 friction test machine under the pressure of 9.8N. The infrared transmittance increases along with the oxygen pressure when between 0.03 Pa and 2 Pa. The result shows that oxygen is effective in etching sp²-bond content. The extreme infrared transmittance of Si slice deposited DLC film on single surface is higher than 64% at 3-5μm, superior to 53% when being uncoated.

The cutting parameters have important effects on the surface condition of KDP crystal by single point diamond turning. In this paper, the characteristics of single point diamond turning have been researched, and a model that related the residual height of surface to the cutting parameters is established. The influence of spindle speed and the feed rate of cutting on KDP crystal surface roughness have been studied. Experimental results show that the surface condition can be improved by decreasing the cutting feed rate of KDP crystal. Another important trend is that by decreasing the spindle speed of the main-axis can't improve surface roughness efficiently while increasing the approaching velocity of KDP crystal at the same time. The reason can be explained as that the high spindle speed will cause exceeded temperature of the deformed zone, which will change the deformation mechanism of KDP crystal.

First of all, kinematics model of the lathe is built by synthetically applying the robot kinematics theory and multi-body kinematics theory. Secondly, the influence of tool presetting error in different position on surface radius of curvature and surface accuracy is theoretically analyzed respectively. The variation of surface accuracy (P-V value) and central residual height with tool presetting error is gained through theoretical approach. Finally, experiments are carried out on the ultra-precision lathe for validating the analysis results.

The mechanism and process of laser shock forming metal sheet is analyzed, which requires laser beam irradiating vertical to the surface of metal sheet. The metal sheet surface becomes complex after rough shocking and how to acquire normal vector of the complex surface is researched. Intelligent sensor of high resolution and numerical control system is adopted to configure a simple three-coordinate measurement system. The three-dimension information of the shocking point and its adjacent points is acquired through calculation and measurement. The normal vector of shocking point is estimated according to micro tangent plane. Two groups of data are measured for accuracy improvement and measuring process is given, as well as error evaluation. The key problem of precision forming metal sheet under laser shock is solved.

According to elastic-plastic finite element theory, micro-milling nonlinear elastic-plastic finite element simulation analysis on micro-optical component material aluminum alloy 2A12 is carried out.Simulation and analysis on milling force, milling temperature, minimum chip thickness of micro-milling have been done, which provide the basis for improving machining accuracy of micro-optical component. Use Johnson-Cook's coupled thermal-mechanical model to build micro milling processing two-dimensional finite element model. By means of FEM analysis, simulation results under different rotating speed, different feed per tooth, different tool edge radius are obtained and analyzed. By this way, influencing regularities of kinds of factors on milling force and milling temperature are obtained. Finally experimental study on influencing factors of milling force is done.

To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors, a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided, showing that the amorphous film has great thermal shock resistance. Then, polishing experiments on 10±0.5μm thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026λ RMS (λ=0.6328nm) and less than 0.5nm RMS respectively. Moreover, reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors.

The influence of polishing an optical workpiece with a polyurethane pad is examined in this paper, including material removal rate, surface roughness and surface form error. Usually, optical polishing pitch is applied to polish optical workpieces, but the material removal rate (MRR) of pitch is quite low, and polyurethane foam is thus substituted for polishing pitch. With the polyurethane pad a much higher MRR is obtained. Surface roughness and surface error form of workpieces are also examined. We are gratified to find that there is surface form error and surface roughness is comparable to the result of pitch polishing.

A novel orthogonal cylindrical lens arrays (OCLA) system has been proposed to obtain two-dimensional (2D) uniform irradiation with controllable focus width and transformation of beam-shape at the same time. The system is composed of two pairs of mutual OCLA and aspheric lens. Based on adaxial matrix optics and scalar quantity diffraction integral theory, the principle of this system with controllable focus profile is analyzed and optimum design of system parameter are presented in detail respectively. The simulated results show that by a suitable choice of system parameters two-dimensional uniform focusing of laser beams with controllable focus width from several hundred microns to several millimeters can be achieved. And the system converts a circular laser beam into a flat-top square focal spot of steeper edges without side lobes. In order to confirm our theoretical considerations, with Zemax optical design software, confirm regular focus width with the variation of the distance between two groups of mutual OCLA, the shape and intensity distribution of focal spot is confirmed in agreement quite well with theory.

This paper does research on the shrinkage deformation caused by photosensitive colophony solidification in manufacturing aspheric surface lens. With Finite Element Analysis, Orthogonal Experiment, and BP Neural Network methods, the relationship between the shrinkage deformation of aspheric lens and structure parameters is built up. With the mathematic model, the shrinkage compensable software for aspheric lens manufacturing is compiled to find out the original shape after the shrinkage deformed shape is given. As a result, the mould surface curve is easily obtained in accordance with the given aspheric lens shape.

The manufacturing procedure of a φ1070mm in diameter F/1.5 ellipsoid mirror is introduced in detail. For testing the rough-ground surface, guiding shaping and fine grinding, a three dimension X-θ-Z profilometer is developed, the instrument measures surface profiles with 1μm accuracy and the biggest mirror being tested is φ1200mm in diameter. During polishing and fine figuring, we chose null test by null corrector with point source at infinity, the designed null corrector includes two piece of lenses and the designed residual wave front aberration is less than 0.008λ(λ=0.6328μm)PV. For avoiding the influence of gravity deformation during polishing and testing, a kind of support system with multipoint unequal support force is developed by applying FEA-based optimization. The mirror was finally figured to the shape accuracy of 0.016λRMS.

In order to obtain high accuracy and a fine surface finish of large area workpiece, position control of machine tool has become the main concern to achieve high precision position control. In this system, diamond turning with a fast tool servo (FTS) driven by a piezoelectric actuator along with a capacitive displacement sensor was chosen as the fabrication method. A laser interferometer is implemented to measure the straightness error of the translational slide accurately. The detected error signals are compensated by the FTS during the cutting process. To achieve better tracking performance, proportional integral (PI) feed back control with a feed-forward predictor is implemented. Experimental results show that the FTS can effectively and successfully compensate the straightness errors of the X-axis translational slide of the miniature ultra-precision lathe.

Mass production of high order aspherical lens can only use CNC fabrication system. The moving tools belong to CNC system can only be controlled by scattered point. To make manufacturer easy to fabricate high order aspherical lens, it should keep surface smooth that's means there is no sharp oscillation of tool during working process. Generally, the smoothing surface is of c¹ and c² continuous. It is known that c¹ ad c² continuous standing for height sequence and radius sequence of special point sequence in different direction are continuous. In this paper, we introduce a method to judge surface smoothing and propose a method to prevent high order aspherical lens surfacefrom being bad smoothingness. This method proves mess production by Mason optics for several years.

With uniform illumination, multi-step diffractive optical elements (DOE) are fabricated with ion beam multiple mask etching technology. According to the technical process of ion beam multiple mask etching on DOE, a distribution of surface error based on LKJ-150 ion beam etching machine is presented. Numerical analysis indicates that the surface distribution of etching error results in lower performance of multi-step DOE, which consumedly reduces the uniformity of target field with uniform illumination. After each etching process, the sample i.e, multi-step DOE fabricated by LKJ-150 ion beam etching machine is measured. Through measurement data, we get the etching error. On the basis of etching error, the mask can be made. Numerical analysis shows this method can reduce the impact of surface error on the performance of DOE and increase the etching uniformity of. ion beam multiple mask

In Computer Controlled Optical Surfacing (CCOS), polishing tool-path is the base of solving other control parameters such as dwell time. In order to improve the fabrication results of polishing off-axis aspheric, a novel method to optimize the tool-path is discussed in this paper. The optimizing method named weighted-iterative algorithm is according to the balance principle of the particle system. The power factor of each dwell point represents the requirement of dwell density. Considering the factors which influence the polishing result, the power factors cosist of three elements include constant, error distribution and dwell distance of workpiece edge. The tool-path is solved by numerical iterative method. In the end, an error data is simulated with actual parameters using the matrix-based algorithm with two different tool-paths. The one is X-Y uniform spacing model and the other one is to optimize it based on the first. The comparison shows that the results of the optimized one are much better than traditional one, especially the rms convergence rate. Theory of the algorithm is simple and exercisable, and it satisfies practical requirement as well.

The influences of thickness (d) and substrate temperature (Ts) on electrical and optical properties of In₂O₃-ZnO (IZO) films are investigated. IZO films are deposited on quartz substrates by reactive direct current magnetron sputtering. The target is 80 wt.% In₂O₃ and 20 wt.% ZnO mixtures. d of the films deposited at room temperature varied from 63 to 651 nm. Ts of the films with thickness of about 200 nm varied from room temperature to 400 °C. Transmittances of the films are measured by spectrophotometer. The electrical properties such as resistivity, carrier concentration and mobility are studied by van der Pauw method. Experimental results show that the resistivity (ρ) monotonously decreases from about 1.2 × 10^-3 to 5.0 × 10^-4 Ωcm when d increases from 63 to 300 nm. As d=160 nm, the average transmittance in visible spectral region has a maximum (87%). Additionally, the average transmittances in visible spectral region for all the films deposited at different T_s are about 82%, but the transmittance in near infrared spectral region decreases with the increase of T_s. When T_s increases from 100 °C to 400 °C, ρ and mobility monotonously decrease, but carrier concentration increases.

Transparent conductive Al-doped ZnO (AZO)/metal (Ag or Cu) dual-layer films were deposited on glass substrates by direct current magnetron sputtering at room temperature. AZO layer thickness was about 30 nm. The thickness of Ag layer changed from 4.0 to 12.0 nm, and the thickness of Cu layer varied from 2.7 to 8.1 nm. The influence of metallic layer thickness on the structure, optical and electrical properties of dual-layer films was analyzed. Ag (111) crystalline peak was clearly observed in X-ray diffraction pattern as Ag layer thickness increases to 12.0 nm. For AZO/Cu films, besides the Cu crystalline peaks, there are copper oxide crystalline peaks. As Ag layer thickness increases from 4.0 to 12.0 nm, sheet resistance decreases from 6.37 to 3.91 Ω/sq and the average transmittance in the visible spectral region decreases from 83.7% to 72.6%, respectively. The average transmittance of AZO/Cu films with different Cu layer thicknesses is between 70.7% and 75.5%. The lowest sheet resistance is 19.2 Ω/sq when Cu layer thickness is 8.1 nm. The performance of the dual-layer films was also compared using a figure of merit. The results show that the high quality transparent and conductive films can be achieved by using AZO/metal dual-layer films.

In the present investigation, the electrochromic properties of a protonic solid state device: WO₃ / Ta₂O₅ / NiO_x prepared at room temperature (300K) is reported. The non-stoichiometric tungsten oxide thin film (100nm), the tantalum oxide thin film (360nm) and the nickel oxide thin film (50nm) are prepared by RF magnetron sputtering technique on ITO coated glass; The transmittance variation for Li⁺ device is +30% and for Ta⁺ device is -2%. The optical band gap for WO3 film is 3.11eV, for WO₃ / Ta₂O₅ / NiO_x multilayer films is 2.98eV.

Shaping aspheric surfaces on ultra-thin spherical mirrors is a new idea which combines optical fabrication and measurement, elasticity mechanics, active optics, etc. It can relieve pressures of fabrication, test and cost using large-aperture aspherical mirrors. Both appropriate actuator arrangement and efficient loads are the keys to achieve shaping aspheric surfaces. In order to determine the best actuator loads, the optimization of actuator forces is studied in this paper. Firstly, an example of shaping aspheric surfaces on a large off-axis ultra-thin mirror is presented, and its actuator arrangement and preliminary actuator loads satisfying surface accuracy have been given. Secondly, the corresponding relation between actuator forces and aspherical figure are analyzed, and the optimization objective is set up. Finally, the sequential quadratic programming (SQP) method for nonlinear constraint problem is applied to calculate best actuator forces. Simulation results indicate that the RMS aspheric surface error is significantly improved, and the number of actuators is also obviously decreased when the RMS error remains unchanged.

According to relative movement rule between lapping tool and workpiece in solid abrasive plane lapping this paper takes a point on the workpiece as a differential unit to analyze force and moment acting on it, then we integratefor whole workpiece, obtain the join moment acting on workpiece and get change relationship of join moment with workpiece size and eccentricity. Because there is a transcendental function in integral equation, analytical result of join moment of the lapping tool acting on the workpiece can not be got. By means of computer this paper gets digital results and draws a three-dimensional figure of moment changing with workpiece size and eccentricity, which proposes a theoretical base for selecting lapping parameters.

During diamond turning process of metal mirror, the variations of cutting resistance are studied in this paper. In the process of arc blade diamond turning, the diameter dependent variations of cutting force were explored, through the calculation of cutting section area, deformation coefficient of cuttings and cutting force. The study showes that the ratio of main cutting force F_z to radial force F_y decrease with the increase of corner radius and that unit cutting force increases with the decrease of cutting section. This helps the choice of diamond turning tools and machining parameters.

Diamond-like carbon (DLC) thin film is often used on the surface of Infrared windows as the protecting film. PECVD method is one of the principal ways to obtain DLC film. The key factors, which affect the deposition rate of DLC film, and how to achieve high speed rate have been analyzed in this work. We prepared high-speed deposition DLC film samples on Germanium and Silicon by RF-PECVD, and the relationships between deposition rate, RF power, vacuum degree and dimension size of substrates, deposition temperature have been investigated. We found that when the deposition temperature rises, the deposition rate would rise correspondingly but fall down later. According to MIL-48616 environmental stability standards, the environmental and physical durability test results and the curve of spectrum are also presented in detail in the paper.

Titanium-doped indium oxide (ITiO) thin films are deposited by direct current magnetron sputtering with different sputtering powers from a titanium-doped indium oxide ceramic target. The electrical and optical properties, microstructure characteristics of ITiO thin films are examined. The results demonstrate that all films show polycrystalline structure and the crystallinity is improved with increasing sputtering power. The resistivity of the ITiO films decreases with increasing sputtering power, and the lowest resistivity is about 4.13×10^-4 Ωcm with sputtering power of 180 W. The average transmittance above 80% is obtained for the ITiO films in a wide spectral range of 400~1500 nm.

A series of In-doped TiO₂ thin films are deposited by magnetron sputtering technique on glass substrates. The quantities of In-element in these thin films are increased gradually. Scanning electron microscope, X-ray diffraction spectroscopy and UV-visible spectroscopy are used to investigate the surface morphology, crystal structure and absorption spectrum of film. The analysis of SEM results show that the surface morphology of film is granulated, and that the size of the granules in the film is about 20~30nm. The analysis of XRD results indicates that the crystalline structure of film cannot be confirmed from XRD patterns. In-element reduces the diffraction intensity of TiO₂ film. Absorption spectrums suggest that absorption peak and absorption edge of the film change regularly according to variety of In-doped. The calculated value of optical constant of the film, bandgap, also changes regularly. O₂ has significant effects on optical performance.

If an ultra-thin mirror with 2-4mm thickness is applied on deployable space optical system, the mass of the system can be decreased while its diameter increasing, and the mirror surface active adjust is achievable. The advantage of the ultra-thin mirror compared with traditional light-weighted mirror described above make ultra-thin mirror a strong competitor for next generation space optical system. Many important institutions have researched on fabrication of ultra-thin mirror. Contrary, the advantage of ultra-thin mirror application is just the disadvantage in the process of fabrication. Because of the ultra thin thickness, large distortion will be caused by the pressure of grinding and polishing. Also, the distortion caused by temperature alteration and stress can not be ignored. These will all affect the precision of the surface and increase its fabrication difficulty. The factors will possibly cause surface distortion and relevant control method in the process of fabrication and measurement are discussed in this article. &slasho;195mm and &slasho;340mm ultra-thin mirror fabrication experiments are carried out and ameliorations of fabrication technology are summarized form these experiments. Finally, a &slasho;500mm ultra-thin mirror has fabricated and the experiment of active adjust indicates that this mirror can achieve acceptable surface quality.

When being used at oblique angels of incidence, the reflectance and transmittance of thin film exhibits strong polarization effect. For much application about beam splitter, this effect is undesired and should be reduced. Up till to now, most theoretical results published on non-polarizing beam splitter are valid for a very limit wavelength or angular range. Here, we present a beam splitter with low polarization, operating at 450 to 650nm wavelength range and 40 to 50 degree incident angle range. The paper presents lossless periodic dielectric multilayer in characteristic of low polarization in the working range of wavelength and incident angle range. The configuration can be made with current deposition technology.

Aluminum nitride (AlN) thin films are deposited by means of d.c. magnetism filter arc deposition. Various processing parameters, such as 0-V, -50V, -100V, -150V bias voltage and arc current of 55A, 75A and 90A, are optimized. Ellipsometry, X-ray diffraction (XRD) and fourier transform infra-red (FTIR) are carried out to characterize AlN thin films' properties. For 0-V and -50V bias, AlN films, prepared on silicon substrate, are show with 002 preferred orientation, and the films are oriented to 100 at the -100V bias. However, the films has no preferred orientation when using -150V bias voltage. Furthermore, the films are also shown without preferred orientation at 50A arc current (with -50 bias voltage), and presented obvious preferred orientation at 75A and 90A. In addition, ellipsometry and FTIR spectrum has shown that all the films extinction coefficient are near to zero and refractive index varied from 1.7 to 2.4. The deposition rate increases with the decrease of arc current and decreases with the positive bias voltage. By combining the spectrum of XRD and FTIR, the AlN films with good crystalline orientation, present obvious absorbing peak in To (A1) or To(E1) vibration.

Based on the particularities of illumination optical systems, the design of light-emitting diode (LED) primary optical system is performed by using optical modeling and Monte Carlo non-sequence ray tracking method. The intensity distributions of LEDs with different material and packaging parameters are obtained to get optimum values of reflector cup and epoxy resin structure. The modeling and designing methods, including the optimized parameters, can provide some referrence for LED primary optical system design.

LED (Light Emitting Diode) has many advantages in the intensity, wavelength, practicality and price, so it is feasible to apply in biomedicine engineering. A system for the research on the effect of highlight LED arrays to human organization is designed. The temperature of skin surface can rise if skin and organization are in irradiation by highlight LED arrays. The metabolism and blood circulation of corresponding position will be quicker than those not in the shine, so the surface temperature will vary in different position of skin. The structure of LED source arrays system is presented and a measure system for studying LED's influence on human organization is designed. The temperature values of shining point are detected by infrared temperature detector. Temperature change is different according to LED parameters, such as the number, irradiation time and luminous intensity of LED. Experimental device is designed as an LED arrays pen. The LED arrays device is used to shine the points of human body, then it may effect on personal organization as well as the acupuncture. The system is applied in curing a certain skin disease, such as age pigment, skin cancer and fleck.

Some practical methods are presented for analyzing and processing the images of self-organized patterns with Matlab 6.5, including "adumbrating the patterns", "adjusting the images", "locating the pattern units", "describing the brightness distribution", "Fourier transformation", and so on. Adjusting the images is to make some characteristics of the patterns more evidently. The method we use for adjusting the patterns is mapping the brightness of the original patterns to a new range of value. The spatial brightness distribution in the patterns can be obtained with the function "improfile", which computes the intensity values along a line or alone specified points in the image by using interpolation arithmetic. the types of the self-organized patterns can be determined by obtaining the spatial frequency spectrum of the patterns using Fourier transform. The location of the units is pinpointed by convolution operation between the unit digital picture and the pattern digital picture.

Reconnaissance range and image resolution are increasingly paid more attention to with the development of airborne reconnaissance, the optical system should be in characteristics of long focal length and wide field. At the same flight altitude, the wider field can enlarge ground covering width and increase the reconnaissance range Longer focal length can improve ground sample distance (GSD). Merits and advantages of reflecting system, catadioptric system and refractive system were represented, with the help of code V software, a refractive system was designed to meet the requirements, Optical material with special dispersion was adopted to remove second order spectrum. It has a focal length of 903mm, with the field angle of 4.5°×4.5°, the size of CCD pixels is 10um×10um, spectral scope is from 0.43um to 0.74um, modulation transfer function(MTF) is all above 0.5 in whole field when spatial frequency is at 50lp/mm, distortion is less than 1%, image quality reaches the diffraction limit. The system with long focal length and wide field can satisfy the demand of the wide ground overlay area and high resolution, and can apply in high altitude photograph.

A light uniformizing algorithm based on rectangular CPC is presented for micro-projection display. The designed optical engine with rectangular CPC consists of LED, fly's-eye lens and micro-display panel DMD. The light uniformity on the micro-display panel and energy efficiency of the optical engine with rectangular CPC is analyzed by means of software. Experimental results show that the proposed light uniformizing algorithm and system compared with other uniformizing light algorithm and system have advantages such as lesser capacity, lesser Etendue, higher light uniformity more than 92% and higher energy efficiency of 43% to meet the needs of micro-projection display.

Not only harmonic diffractive microlens has a common focus for a number of discrete wavelengths, but also the ordinary diffractive microlens which is modulo 2π has a common focus for a series of discrete wavelengths, the essence reason of this phenomena is the same, such wavelengths with common focus are called harmonic wavelengths. A number of focuses are generated when monochromatic light wave illuminates an ordinary diffractive microlens. The different focus corresponds to different diffractive order. A series of harmonic wavelengths are focalized by a diffractive microlens at a common focus corresponding to their own diffractive orders. One can design achromatic aberration microlens by using the above characteristic of diffractive microlens. In this paper the diffractive microlens design method and the formula of focallength for various diffractive orders are accounted for. A multilevel diffractive microlens is analyzed by using finite-difference time-domain (FDTD) method. Two-dimensional electric field amplitude distributions for different incident harmonic wavelength are given. The electric field along optical axis for the harmonic wavelengths is plotted at the same time. The results show that the harmonic wavelengths can have common focus. Furthermore, the shorter harmonic wavelength has higher resolution, shorter focal depth, and more focuses than the longer ones.

Indium tin oxide (ITO) films on flexible polyethylene terephthalate (PET) substrates with low square resistivity and high transmittance in visible region are prepared by DC magnetron sputtering deposition method. The dependence of electrical property of ITO films on substrate temperature and DC power is compared using PET and glass substrates. The results imply that the change trend of electrical property of ITO films is similar no matter what kind of substrate is used. Using the ITO-coated substrates as anode, organic light-emitting devices (OLEDs) consisted of PET/ITO/NPB/Alq/Mg:Ag are fabricated. The electroluminescence performance of the flexible devices is comparable to the identical devices made of ITO-coated rigid glass substrates.

DOE is often produced by lithography and ion beam etching. The etching depth error directly affects the diffraction performance of DOE. The uniformity of ion beam etching depth is particularly important for large-sized DOEs in that errors by ion beam etching uniformity would result in an obvious aberrant spot of intensity in the focal area of DOE, which consumedly reduces the uniformity of target field in uniform illumination. On the basis of the KZ-400 ion beam etching equipment the method of improving DOE ion beam etching uniformity is investigated. The step-by-step method is used to improve the uniformity of ion beam etching, in which the etching time and location are adjusted. Experimental result shows that in the range of 190mm along the major axis of ion beam source the etching uniformity of DOE increases from ±5% to ±1.3%.

TiN solar spectrally selective absorbing thin film with good spectrum absorbing selectivity is prepared by DC magnatron sputtering, using Ti as target material and Argon as working gas, on Si(111) substrate. Research shows: when keeping other technique parameter constant, with sputtering air pressure varied 0.35-1.5pa, cubic phase TiN thin films with a (200) preferred orientation are Synthesized; and thin film prepared with a sputtering air pressure of 0.35pa, is compact and uniform, with a golden colar and a film thickness of 132nm, shows the best crystallinity, least resistivity of 33.8Ω×cm (close to bulk resistivity of TiN), with average absorptivity α of visible light-near infrared (wavelength ranges 400-1000nm) at 0.83, and maximum reflectivity R of infrared at 0.90. Through analysis of film structure, film thickness, absorptivity and reflectivity, TiN thin film prepared with a sputtering air pressure of 0.35pa, has good spectrum absorbing selectivity, and therefore has high application potential and value in heat absorpbing surface of solar collector or photothermal conversion building material directly.

The time-correlated single photon counting spectrometer uses a peculiar splitter technique so the time spread can be dynamically and statically compensated. Design time-correlated single photon counting electronic system. Develop data collection and transfer chip based on PC, analyzer is used to measure time-resolved spectrum by opening the time windows. The system theory and design of the spectrometer are presented in detail, and the process of operation is introduced with the integration of the system. The spectrometer can measure fluorescence life-span and time resolution spectrum of different samples. Many standard samples have been measured and the data have been analyzed and contrasted. Experimental results show that the spectrometer's sensitive is single photon counting, and fluorescence life-span and time resolution is picosecond level.

Array waveguide grating (AWG) is an important plane optical element in dense wavelength division multiplex/demultiplex system. There are many virtue, channel quantity larger,lower loss, lower crosstalk, size smaller and high reliability etc. This article describs AWG fabrication technics utilizing IC(Integrated Circles) techniques, based on sixteen channel Silicon-Based Silica Array Waveguide Grating, put emphasis on discussing doping and deposition of waveguide core film,technics theory and interrelated parameter condition of photoetch and ion etching. Experiment result indicates that it depens on electrode structure, energy of radio-frequency electrode gas component, pressure ,flowing speed and substrate temperature by CVD depositing film .During depositing waveguide film by PE-CVD, the silicon is not reacted, When temperature becomes lower,it is reacted and it is easy to realize the control of film thickness and time with a result of film thickness uniformity reaching about 4% after optimizing deposition parameter and condition. We get the result of high etching speed rate, outline zoom, and side frame smooth by photoresist/Cr multiple mask and optimizing etching technics.

A numerical simulation pattern based on finite element algorithm is proposed for calculation of selective laser sintering transient temperature field. The patter is based on the transient thermal radiation and the boundary conditions is concerned soundly, particularly during the transient sintering the relation between thermal conductivity and transient sintering temperature is set up on the basis of practical test to simulate practical sinter process. As a typical and comprehensive sample, polystyrene SLS transient temperature field is analyzed. In the process of sintering the cube of 72mm×7mm×5mm, in case different parameters (laser power, scanning speed), both in a time the scanning line temperature and in a point the temperature variation with time could realize. At a time, the simulation result accords with the practical measurement result using the infrared thermometer. The results show the simulation transient sintering temperature is 252°C and that of practical measurement is 241°C with laser scanning speed 2000mm/s and laser output power 15W. the simulation transient sintering temperature is 313°C and that of practical measurement is 299°C with laser scanning speed 1750mm/s and laser output power 40W. With the simulation system of SLS transient temperature field developed in this paper, the SLS transient temperature field could be obtained rapidly and precisely to different materials and parameters, the basis of selecting sintering parameters soundly and next analyzing of stresses and defects were found firmly.

Laser is widely used in processing and measurement because of its fine directivity and concentrated energy. The quality of processing and measurement are mostly determined by the location of laser spot. However, it is difficult to locate its center. A new algorithm, based on Hough Transform and sub-pixel methods, is proposed to locate laser spot center at a sub-pixel level. In this algorithm, Hough Transform is utilized to detect the profile, center and radius of circle spot at a pixel level, and the centroid method and curve fitting method are utilized to locate the center to sub-pixel level. Simulation and experimental results show that the algorithm offers great accuracy in position locating for laser spot. This method can be used in laser processing and measuring system.

Femtosecond laser pulses with ultrashort time duration and ultrahigh peak power can cause the refractive index change in transparent materials and micron scale machining precision. Long period fiber gratings (LPFGs) with different grating lengths in the standard single mode fiber are fabricated. Using laser direct writing method, Femtosecond laser pulses with pulse width of 200 fs at a center wavelength of 800 nm in air is applied as laser source. The transmission spectra are studied in the range of 1510 nm to 1610 nm. The loss peak of 1552 nm, the transmission loss of 16 dB and the FWHM of 20 nm are obtained with the period of LPFG of 400 μm. According to the theory of mode field coupling for long period grating, transmission spectra of LPFGs are numerically simulated depending on the grating length.

Intelligent opto-electric instruments are synthetically products that are involved with optics, mechanics and electronics. An effective development platform is necessary for efficient development. According to the conception of integrated development and manufacture, an architecture of integrated development environment based on resource library and resource management is presented to resolve the shortcoming of weak reusability and portability of resource, long periods of development and weak openness of existing platform. The development environment provides a suite of standard resource integration and management interface to integrate and regulate existing models, algorithms, tools and components. Then reusable typical resource library is established by adding third party resource that accords with the interface defined. Resources in library are expressed as reusable components. System modeling, rapid prototype developing and online simulating and testing can be implemented rapidly and reliably by utilizing corresponding resources in library, so technique difficulty and development periods can be reduced, and development efficiency is improved. Because of describing resource by metadata and XML, the architecture is flexible and open, and can be improved continuously to adapt to development and upgrade of various intelligent opto-electric instrument to meet the requirement of efficient integrated development and manufacture perfectly.

An adaptive beam intensity shaping method based on the combination of a 61-element deformable mirror and stochastic parallel gradient descent algorithm is presented. This technique can adaptively adjust the voltages of 61 actuators on the deformable mirror to reduce the difference between target beam shape and actual beam shape. Numerical simulations results show that within the stroke range of the deformable mirror, the system can be well used to create Gaussian and super-Gaussian beam profiles on the focal plane that closely match the desired target parameters.

An ultra-precision synergistic finishing process integrated MRF and ELID grinding was proposed for shorten total finishing time and improve finishing quality. Sets of ultra-precision experiments were carried out to grind and finish some optical glass BK materials. ELID grinding, as pre-finishing, was employed to obtain high efficiency and high surface quality; and then, MRF, as the final finishing, was employed to improve further surface roughness and form accuracy. BK13 plane glass was processed by integrated ELID grinding using #4000 wheel and MRF. After ELID grinding, λ/5 P-V was obtained, and then, MRF 30 minutes, the form accuracy was improved to λ/28 P-V. Likewise, curvature BK7 glass lens was also used to test. After ELID grinding using #4000 wheel, form accuracy λ/5 P-V and surface roughness 261 nm rms were obtained; and then, MRF 17 minutes (2 cycles), the form accuracy and the surface micro-roughness were improved to λ/18 P-V and 0.56 nm rms. By applying the ultra-precision synergistic finishing process of ELID-grinding and MRF, the glass materials could be finished to sub-nanometer surface micro roughness and ~20 nm figure accuracy in a short time.

Parameters of fluid jet polishing (FJP) are analyzed in this paper. According to the theory of Computational Fluid Dynamics, we simulated the process of fluid jet polishing by using Computational Fluid Dynamics software. Based on the results of simulation, the distribution of flow field is showed and analyzed, and the distribution of important process parameters including the velocity and pressure of work piece wall, the grain concentration of slurry are gained. By analyzing the characteristic of FJP and the influences of Parameters to FJP, it is found that the distributions of pressure and velocity on work piece wall are related to the distribution of removed material, and the impact angle influences the distributions of velocity and material removal. By simulating fluid jet polishing process with different impact angle models, we found the optimal impact angle to the distribution of material removal.

To enhance the machining precision before polishing, 2-axis NC machining method is put forward for conic aspheric optical mirror manufacturing. The integrated geometric model and the corresponding machining parameters, such as suitable radius of tools, tool path interval, horizontal feed and axis feed are presented based on precision assurance for lower manufacturing cost and higher production. The feasibility of the scheme and the reliability of the model are proved with numerical examples by computer simulation. Therefore, it could provide a reference for NC control software system in producing quadric optical mirrors and for other kinds of aspherical surface manufacture.

According to elastic-plastic finite element theory, three-dimensional nonlinear elastic-plastic finite element simulation analysis on optical component material aluminum alloy 2A12 is carried out, and residual stress on machined surface is predicted and calculated, which provide the basis for improving the machining accuracy of optical component. Johnson-Cook's coupled thermal-mechanical model is used as work piece material model, Johnson-Cook's shear failure principle is used as work piece failure principle, coupled thermal-mechanical hexahedron strain hybrid modules and adaptive grid are used to mesh, while friction between tool and work piece uses modified Coulomb's law whose slide friction area is combined with sticking friction. By finite element analysis, simulation results of residual stress on the machined surface is gained under different cutting velocity, tool edge radius, and by analyzing and comparing the results, the basic influence law of various factors on residual stress on machined surface is found.

Asphericity which affects the manufacturing process and the grinding quantity is an important parameter of optical aspherics. In this paper, the approximation, the least square fitting, wavefront aberration, sag methods are given for the calculation of optical asphericity. The effects of different definitions of optical asphericity are analysed to optimize the process of manufacture. A sag method is presented to solve the best-fit sphere and asphericity for an off-aixs aspheric mirror with a rectangle aperture of 180mm×145mm, and polishing quantity and distribution plots are given. The optical manufacturing and testing technology for different choices of best-fit spheres and asphericity are described and analyzed. Therefore, proper definition of optical asphericity which is useful to manufacturing is very important for optical fabrication and test.

The magnitude requirement of space target detecting determines that the image of detecting telescope should have several performances: small spots, small 80% encircled energy diameter and good MTF(Modulation transfer function). So the aperture and field of view of optical system have some demands accordingly. The larger aperture, the more energy that telescope collects and higher magnitude the telescope detects; the wider field of view, the more extensive range which the telescope searches. Now most of ground telescopes whose apertures are from 500mm to 1000mm is on-axis optical system, so wide field of view becomes the most importance problem. To obtain large relative aperture and wide field of view, the paper introduces a catadioptric telescope with small aperture aspheric refractive corrector, whose conic surface will be used to remove the aberrations due to large relative aperture and wide field of view. As to the optical system, there is only one aspheric refractive corrector, and it is relatively easy for manufacturing because of its concave figure and normal material. The paper gives the example, and optimizes this optical system with ZEMAX program. And then the paper provides a specific analysis program for testing the aspheric refractive corrector. The aperture of this optical system is 750mm, and its relative aperture is 0.82, and the field of view is 3.6° diameter(diagonal). Its structure is simple and the image quality is also very good.

When we utilized femtosecond laser to micromachine Cr film with glass substrate, we found reversible dark-center diffraction of the transmitted probe beam passing through the chromium film and reversible bright-center diffraction of the reflected probe beam from the chromium film, which are induced by the pump femtosecond laser. The dark-center diffraction of the transmitted probe beam and the bright-center diffraction of the reflected probe beam appear and disappear with and without the pump beam. A view of diffractive optics with binary phase plate is put forward, which explains the reversible dark-center diffractive optical phenomenon. The pre-ablated hole on the metal film can be regarded as a uniform light filed without phase modulation, the surrounding circular part around the pre-ablated hole can be regarded as "phase modulated". Therefore, this diffraction optic view might be helpful for us to understand the phase change of the metal film introduced by the femtosecond laser pulse.

Problems occurred during machining steep aspheric parts with large sagittal height on double-spindle diamond turning machine are presented and the main reasons of the problems are described. And methods of solving these problems are also suggested. When we machine steep aspheric parts with large sagittal height on a 2 axis diamond turning machine, we have such problems as difficult control of part edge accuracy, poor roughness and rapid wear of the cutting tool. The main reasons for these problems lie in: 1) Measurement. To make accurate measurements, the measurement range of the profilometer must fall within the sagittal heights of the aspheric parts, and the measurement angle must also meet the requirements, an insufficient measurement angle, for example, will have a big impact on the measurement and fabrication accuracy of such parts; and 2) Machine and tool, firstly, the diamond cutting tool will suffer a very big force when turning the edge section, resulting in bigger micro-vibration in the tool and tool post, thus affecting the part accuracy and surface roughness. Secondly, the machine itself has location errors in axes X and Z during the processing, leading to the severest destruction in the steep section of the aspheric part by their resultant force. Lastly, anisotropy of diamond cutting tool hardness. The indentation hardness of the diamond is maximum in the direction of <1.0.0> of face (100) and the front clearance has the best strength at tool point in the direction of <1.0.0>. When cutting a steep aspheric part with large sagittal height, a bigger included angle of the diamond tool point arc will be used, and there will be a more deviation from the <1.0.0> lattice direction. So the tool hardness is consistently decreased, resulting in a rapid wear of the cutting tool when turning the steep section of the aspheric part, thus the accuracy and roughness in machining an aspheric part become more difficult to control. The paper is concluded with the solutions of turning steep aspheric parts with large sagittal height. Efforts have been made to reach an accuracy within 1.5 um, Ra 0.007 um (mold insert), and no apparent tool marks on the surface when machining steep aspheric parts with large sagittal height on double-spindle diamond turning machine.

This paper presents a compensation system based on wheel online dressing and online measuring. Because of its excellent dressing performance, the Green-Carbon wheel Dresser was chosen to dress the diamond wheel. And a measurement system was put forward, which included the method of diamond wheel arc detecting with displacement sensor, radius filtering, and the least-squares curve fitting. Considering the radius calculated, the compensation controlling points can be obtained. Compared with the traditional error compensation technology, advantages of this system include four aspects: no new error is brought due to the complete online operation; introducing a GC wheel dresser with tilting structure and lagging-dress method can enhance the dressing accuracy; the operation is convenient, because there is no need to make strict equal-angle measurement and to confirm zero setting; processing data through radius constraining and filtering can reach a high fitting precision, which is useful to the compensation machining later. Keywords: online dressing, online measuring, filtering, least squares method

Three-linear array tridimensional mapping camera consists of three independent linear CCD cameras. Unique position must be kept among the three linear CCD cameras. Optical lens is one of pivotal parts, MTF, resolving power, distortion are its important techno-items. The optical lens of space tridimensional mapping camera is the key to accomplish the tridimensional mapping mission. In order to meet the need of user, a design on optical lens of transmission semi-telecentric beam path in image space is expounded, and assembly method based on DFT(Design For Test) of single lens suit and whole optical lens are expounded. The test results indicates that the MTF of optical lens referred in the paper is 0.45(@77lp/mm); the ground resolution power is 5m; the distortion is 3/10000. They meet the need of user.

A new ultraprecision machining technology for potassium dihydrogen phosphate (KDP) crystals, deliquescent polishing technology for KDP crystals, which utilizes deliquescent effect for ultraprecision machining KDP crystals, is proposed. The principle and the advantages of technology are introduced. The deliquescent polishing procedure of KDP crystals is given. The deliquescent polishing experiments of KDP crystals are conducted, and the material removal ratios are calculated. Through the experiments, the effect of four processing parameters (velocity of polishing plate, velocity of drip, volume percentage of water in the deliquescent polishing fluid, polishing pressure) on material removal ratio in the deliquescent polishing of KDP crystals is researched. The plot of material removal ratio versus every processing parameter in the deliquescent polishing of KDP crystals is obtained, and the rules of material removal ratio in the deliquescent polishing of KDP crystals are reached.

The cooperation of Rayleigh scattering (RS) in fiber interference loop and stimulated Brillouin scattering (SBS) in fiber can change Q factor in resonant cavity, based on which a all-fiber Er-doped Q-switched fiber laser with interference loop is designed. During experiment, the attributes of output laser exploiting interference loops with different coupling ratios and lengths is investigated. A train of pulse laser with pulse duration of 7.2ns, pulse period of 4.709μs, average output power of 5.4mW at pump power of 37mW is obtained which has a good waveform and a peak power fluctuation of : 30%. The results show that interference loop with too high coupling ratio has no contribution to the generation of pulse laser and the coupling ratio of 10% is suit for it. Even if the coupling ratio of : 10% is chosen, the length of the loop has influence to the attribute of the output laser pulse and the length around 2m is conducive to obtaining good output.

This paper presents a ultra-precision manufacturing process of large stamping dies with confocal paraboloidal and hyperboloidal surfaces of Wolter mirror for an X-ray telescope. In order to improve the alignment of the two substrates and reduce the degeneration in imaging quality, two compound reflectors were formed from one thin substrate utilizing synthetic ELID grinding and arc-enveloped grinding method. Because the thin foil substrate was obtained by press forming, large stamping dies of foil substrate must be machined with high Fig. error and low roughness. In this ELID arc-enveloped grinding system, cast iron fiber bonded (CIFB) diamond wheels were 3-dimentional controlled to scan the workpiece and generate required surfaces. Through truing grinding wheel and ELID grinding for upper concave and lower convex stamping dies, attainable form accuracy, surface roughness were investigated.

In order to raise the accuracy of glass carving and improve deep cutting, a novel diode end-pumed solid-state laser is researched. Selecting proper volume of laser crytal, one continue wave laser diode which longitudinally pumped Nd:YAG crystal is performed and an applied optics coupling system is designed with self focusing.Computing with ray trace software and MATLAB software, the best parameter is obtained, so pumping beam is coupled efficiently to Nd:YAG.Used a Cr⁴⁺:YAG crystal with the singnal transmission of 82% and a line plane-concave cavity, nanosecond narrow pulse is gotten. After two thermal-electrical coolers kept the laser to work at constant temperature instead of water cooling, the volume of laser is markedly reduced. The method of thermal-electrical cooling could increase the system efficiency,achieve the effect of low mode output.Experimental results indicate that the maximum laser output energy in 1064 nm is 118mJ,pulse width is 5 ns, conversion efficiency from light to light is 15.7% under the condition of the incident power of 5 W and the diameter of the output laser spot is less than 1 mm. This end-pumped Nd:YAG Q-switched laser with the light output of high quality and long life, which has 0.01 mm accuracy after lens focusing can satisfy the glass carving with higher precision, rapid speed as well as easy control. It can be used in carving all kinds of glass and replace current CO₂ laser.

A diffractive/refractive system with a relative aperture of f/4.0, the EFL of 150mm at 3.7-4.8μm is designed. A diffractive optical element (DOE) is fabricated by means of diamond turning on a conic substrate of the Germanium lens in this system. The characteristics of the diffractive optical element are analyzed in the software of Diffsys. And the zone radius of DOE and step height are detected by profilometry and result is produced. Test results of DOE are coincided with the design figures and the DOE has tiny surface error and high diffractive efficiency. Result of Modulation Transfer Function (MTF) for the system is tested by Ealing and the tested value is closely approximate to diffractive limit. The DOE has better behaviour of chromatic aberration and athermalization.

Optical fiber delivery of high peak power Nd:YAG Q-switched laser pulse is required for applications such as material processing, medical or military. The maximal transmitting power is variously limited by optical breakdown of air in the focal point and the damage threshold of fiber. A coupling system of 600μm all-silica optical fiber fused with taper fiber coupler and 15MW, 8ns Nd:YAG laser pulses is presented, consisting of an inversed telescope and a taper fiber coupler without the use of a vacuum chamber. The taper fiber delivers light basing on the principle of total reflection. The influence of incidence angle and taper length on the reflection angle are theoretic analyzed based on geometric optics. The coupling efficiency of the 12 tapered fibers fused with 1meter fiber is measured under different incidence angle of, respectively, 20mrad, 40mrad and 60mrad. The experiment results show that the coupling efficiency decreases gradually with the increase of taper length for larger modal loss. The larger incidence angle also decreases the coupling efficiency, which is consistent with above theoretic analyze. For 20mrad incidence angle, the coupling efficiency reaches as 95.53%. No surface damage or bulk damage is observed for 20meters fiber. In conclusion, the system could transmit 15MW Nd:YAG laser pulses by 600μm all-silica optical fiber stably. Intensity of 600μm fiber output surface is 4.42GW/cm². The simplified coupling system resolves air breakdown of focal area and surface damage of fiber surface.

In this paper, bipolar pulse current electroforming is introduced. The influencing parameters, such as electrolyte parameter, additives, current density, PH value, temperature and pulse current parameters have been studied on experiments. Experiments on nickel electroforming in precision optical parts and moulds have been done. Results indicate that bipolar pulse current could improve the quality and precision, reduce internal stress duringoptical manufacturing.

A high efficiency and high brightness white LED driver with adaptive current control strategy in 0.5um CMOS process is presented in this paper. The current control mode is determined by output current level and input voltage value, switching between normal low drop-out (LDO) regulator and 2×charge-pump mode. The presented whiter LED driver is able to drive load current as large as 1.1A. The peak efficiency as high as 95% occurs at 220mA load current, with an output voltage ripple lower than 95mV at 1.1A output current can be achieved.

The infrared optical system is an important part of an infrared detection system. With the keeping upgrading of infrared detectors and requirements for infrared detection systems based on a variety of applications, higher requirements for infrared optical systems have been put forward in terms of performance and designing optimization. Based on infrared option system and DOE theory, the effects of environment temperature on optical systems are analyzed. This paper introduces DOE theory, aberration and color difference characteristic, etc. Refractive-diffractive mixed system is carried out by using DOE to infrared optical system, which results in high quality and simple optical system. The image quality of the optical systems is eva1uated by making use of modu1ation transfer function (MTF). A performance comparison is done between conventional refractive optical system and hybrid optical system, showing that hybrid optical system has obvious advantages in terms of image quality, volume, weight, environmental adaptability over traditional refractive optical system.

In order to make photoelectric encoder usable in a spaceflight camera which adopts CAN bus as the communication method, CAN bus interface of the photoelectric encoder is designed in this paper. CAN bus interface hardware circuit of photoelectric encoder consists of CAN bus controller SJA 1000, CAN bus transceiver TJA1050 and singlechip. CAN bus interface controlling software program is completed in C language. A ten-meter shield twisted pair line is used as the transmission medium in the spaceflight camera, and speed rate is 600kbps.The experiments show that: the photoelectric encoder with CAN bus interface which has the advantages of more reliability, real-time, transfer rate and transfer distance overcomes communication line's shortcomings of classical photoelectric encoder system. The system works well in automatic measuring and controlling system.

Collimator is an important equipment with high accuracy in optical experiment and measuement. In order to improve measuring accuracy, based on the particular aberration property of diffraction optical element, hybrid refractivediffractive aberration correction method is put forward. In this paper, a hybrid refractive-diffractive method is compared with conventional method with 80mm diameter, 500mm focal length and 550mm overall length. The resolution is less than 4.3". Having been optimized, the maximum spot is 5.2μm, and the modulation transfer function (MTF) at 50lp/mm is over 0.8, better than conventional method.

Laser-assisted machining (LAM) is an effective method machining difficult-to-machine materials such as ceramics which uses a high power laser to focally heat a workpiece prior to material removal with a traditional cutting tool. To understand the thermal process of laser heating and predict the operation parameters for experiment system, a transient, three-dimensional heat transfer model for LAM of silicon nitride is developed using Finite Element Method. The model is based on temperature-dependent thermophysical properties and considering convective heat transfer and radiation exchange. A method of locally refining mesh according to machining sequence is used to reduce calculating time. The effects of the operating parameters, such as laser power, laser beam diameter, laser preheat time, cutting depth, feed rate and rotational speed on the average temperature of cutting region and the temperature of laser incidence are investigated. The thermal stresses induced from the high temperature gradient are also investigated. The maximum normal thermal stress failure criterion is used to predict the possibility of cracking on silicon nitride material owing to thermal stress. The method of selecting optimizing operation parameters is presented.

A kind of new adaptive optics (AO) configuration, for which several deformable mirrors (DMs) with optical conjugation relationships are combined to correct high-order aberrations, is proposed. Based on theoretical analysis and numerical simulation, an integrated AO system with combinational-deformable-mirror (CDM) that consisted of two same deformable mirrors is built, and its correction capability is validated experimentally. The results indicate that the CDM in the AO system correct aberrations effectively as same as one single DM with more actuators by using the direct-gradient control algorithm in closed-loop. This design can improve wavefront spatial correction capability by increasing the number of actuators and the coupling coefficient. So it can be used for compensating high-order aberrations instead of one single costly DM with more actuators for the same performance.

Surface roughness of indium-tin-oxide (ITO) film plays a crucial role on the performance of organic lighting emitting devices (OLEDs). A set of polishing apparatus with carbon dioxide snow jet as an actuating medium is established, and the surface polishing of ITO glass are carried out by this equipment. The surface morphology of ITO film is measured by using an atomic force microscope (AFM) before and after polishing treatment. The results show that before polishing, the mean values of Ra, Rpv and the RMS of the ITO surface are 1.463, 46.87 and 2.726 nm, respectively. After polishing, the value decreases to 0.773 nm, 19.51 and 1.078nm. It indicates that the polishing method is effective to reduce the ITO surface roughness. Another merit of this polishing method is that the polishing process has a cleaning effect to the ITO glass surface The performance of OLED can be enhanced and the production cost of device can be reduced.

Semiconductors which exhibit a very rapid transition from opacity to transparency at the intrinsic edge are particularly useful in making excellent absorption filters. In this paper, we report the investigation on composition dependence of absorption edges in the evaporated Pb1-xGexTe thin films, which will be of a potentiality to fabricate a single-layer infrared short-wavelength cutoff filter by means of controlling the composition and processes. It is revealed that for thin films with an identical Te concentration, the absorption edges will shift towards short-wavelength with the increase of Ge concentration x in films; whereas, for those with a similar Ge concentration within a small range of deviation, the edges will also shift towards the short-wavelength with Te concentration approach to stoichiometry.ÿÿ

In this paper, using effective-medium theory (EMT) and finite different time domain (FDTD), the dependence of reflectivity to 1.06 μm incident light upon structural parameters of rectangular subwavelength surface-relief structure has been discussed, the reliability of FDTD has been proved, and the validity of the two theories has been contrasted. The influence of refractive index and filled factor to reflectivity has been analyzed detailedly. And the structural parameters also have been discussed by diffraction orders in the energy field of reflective area with FDTD. The results shows that the best filled factor is near 0.7, the structure periods should less than 0.6λ, and the structure thickness would be set to λ/4neff. It can be used as the basis for design and fabrication of surface structural materials with proper antireflection property.

In the latest 20 years, x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching, spatial exploration technology, high-energy physics, procedure diagnosis of inertial confinement fusion (ICF) etc. Since refractive index of materials in the x-ray region is lower than 1, and x-ray is strongly absorbed by materials, it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general, grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In order to ensure the tolerances of KBA, we take many measures to ensure the high requirements during the installation and adjustment process.

The substrate temperature is one of the most important parameters for the synthesis of high quality diamond thin films in hot filament chemical vapor deposition (HFCVD) system. Based on the principle of heat transfer, the substrate temperature is calculated in the single hot filament system, the influence of filament height, filament diameter and filament length on substrate temperature are also discussed. Results show that the substrate temperatures vary with the space position. In the direction of parallel with the filament, the substrate temperatures vary smoothly, but, in the vertical direction of the filament, the substrate temperatures change acutely. When H=8mm, L=7cm and d_f=0.5mm, the substrate temperatures are well-distributed, this will give the support of some technique parameters for the growth of large area HFCVD diamond thin films.

Erbium-doped fiber laser has many excellences, such as narrow bandwidth and long range to tune. It could be used in DWDM communication and sensing. We focuse on erbium-doped fiber laser, because it radiates at 1550nm lying in 3 rd window of low loss in fiber-optic communications. In this paper, by studying erbium-doped fiber ring laser's theory and using simulation method, we have obtained many key laser parameters, and designed a high efficiency erbium-doped fiber ring laser with a fiber Bragg grating used as filter .When the pump power is 150mW, a ring-cavity all-fiber laser worked at 1550.285 nm has been demonstrated with an output power of 45 mW and a bandwidth of 0.05 nm at 3dB. Its pumping efficiency is 30%. In the design, we have adopted many kinds of methods to stabilize its power. Finally the power stability is 0.20%. Such laser is suitable for communications and sensing.

For better explain the phenomena of edge effect, a Constant-Linear pressure distribution model is presented in this paper according to a series of computer simulations. The limitations of the existing models are analyzed. Experimental results show that the C-L model can correctly predict the material removal near border of work-piece.

RMnO₃ (R=La, Pr, Nd, Sm) Manganites prepared using solid-state reaction method were examined by Raman spectroscopy. Raman-active phonons in orthorhombic perovskitelike RMnO₃ were studied by measuring Raman spectra in various scattering configurations. The experimental Raman line wave numbers and the expected shapes for the phonon modes were compared to those reported for other perovskitelike compounds with Pnma structure and to the results of lattice dynamical calculations. The observed Raman lines in the spectra of RMnO₃ were assigned to definite atomic motions. The remaining spectral weight can be explained by the presence of dynamic John-Teller distortions that lower the symmetry of the cubic perovskite. It is clear that Raman spectroscopy has the advantage of being very sensitive to structure distortion and oxygen motion.

Cascaded chirped and phase-only sampled fiber Bragg gratings (CC-PSFBGs) are proposed for high efficient multi-channel comb filters in wavelength-division multiplexing (WDM) systems. A CC-PSFBG consists of replicated sections of chirped and phase-only sampled FBGs, in which the Talbot conditions for each section of phase-only sampled FBGs are satisfied. Under the condition of phase matching among the cascaded sections, an arbitrarily tunable channel spacing (tunable free spectral range, FSR) with both a controllable wavelength range and sufficient in-band energy efficiency can be implemented. It offers a useful tool for improving the design flexibility and the energy efficiency of conventional Talbot effect based multichannel comb filters.

Plasma polishing process finds important applications in the fabrication of super-smooth optical surfaces. It can be applied for the precise optical surface forming and to obtain optical surfaces with ultra-low roughness and without sub-surface damage (SSD). Published results show that the plasma polishing process is mainly used for the precise optical surface forming. Very limited results are reported in literatures on the process being used for the reducing of the optical surface roughness. A novel plasma polishing process has been developed in the Laboratory of Thin Film Techniques and Optical Test in Xi'an Technological University. In the process, highly stable SF₆ and Ar plasmas are generated by using capacitive coupled hollow cathode (CCHC) RF discharge method. Factors that affect the stability of the plasma, such as gas flow rate, pressure and discharge power are systematically investigated. The polishing processes of fused silica have been studied using CCHC RF plasma. When the process parameters of the gas flow, pressure, and plasma powerare optimized, the roughness of the silica surface can be reduced from 1.2nm to 1.0nm in rms with minimized SSD.

This paper aims to research the influence of hydrogen on the variation of mechanical properties and microstructure of diamond-like carbon (DLC) films synthesized by radio frequency plasma chemical vapor deposition (RF-PECVD). The DLC films were deposited on germanium substrates as protective layers with butane-hydrogen mixture gas. The films obtained are polycrystalline and texture-growth, the surface of the thin films is grain-like and dispersing incompact. The synthesis and post-plasma etching treatment of DLC films were prepared with low-temperature methods (T<150°C). The reactant gas is a high pure mixture of butane (99.9%) and hydrogen (99.99%). The effect of deposition parameters on the structure and properties of DLC thin films has been studied. DLC films deposited are studied by atomic force microscopy (AFM), Raman, Fourier-transform infrared (FTIR), nanoindentation and nanoscratch. Test results show the transmissivity of deposited DLC films from 8μm and 12μm region is higher than 60% averagely, which closees to theory value firstly. Secondly, with the increase of deposition voltage, the content of sp3C in the DLC thin films increases, the roughness of thin films decreases. Thirdly, with the increase of deposition frequency, the content of sp3C in the DLC thin films increases, the roughness of the thin films decreases. Finally, as the film thickness increases, the ratio of I(D)/I(G) increases and the hardness decreases. This indicates as the film thickness increases, the bonding is towards graphite structure and reducing hardness. The high sp2 fraction and low hardness explain the poor adhesion of large film thickness. The results reveal that increasing the concentration of hydrogen, thickness and roughness decreases.

A novel structure of highly birefringent polarization maintaining photonic crystal fiber is designed theoretically, the fiber has an elliptical core and five ring square hexagonal structure, with the average hole-diameter, d=2.5μm, and the ratio of average hole-diameter and hole-spacing d/Λ=0.4. The polarization mode field and birefringence are numerically simulated by Beam propagation method based on full vector model. Research results showes that two orthogonal polarized states of the fundamental mode become non-degenerate in the elliptical core PCFs and appear obviously an ellipse and strongly linear polarization. Furthermore, we firstly fabricated successfully the fiber with near elliptical core based on organic macromolecule polymer material by in-situ chemical polymerization technology and the secondary draw-stretching of the preforms. The polarization mode fields and transmission loss are measured, and the results are well accorded with theory, which will be promising to fabricate high birefringence polarization maintaining photonic crystal fiber based on polymer for applications in data communication networks and for the development of range of new polymer-based polarization maintaining fibers components.

The temperature of troposphere is an important meteorologic parameter, the pure rotational Raman-lidar technique has already used on effective temperature-measuring of troposphere at present. Because many low-intensity scattering is around high-intensity scattering, it is difficult to acquire Raman spectrum from high-intensity Mie+ Rayleigh scattering. So the prismatic system needs reach high capability. The double grating monochromator for a pure rotational Ramanlidar can provide better than 10^-7 suppression of spectral line due to unshifted Mie+ Rayleigh scattering, obtain highpurity rotational Raman spectrum, and improve transmission and stability of the optical system. The complex structure of the double grating monochromator is always difficult to Raman-lidar. Two optical paths of grating are compared and a conclusion can be drawn that the structure of beam path of grating of symmetrical arrange of optical fibre is better in grating efficiency than the structure of beam path of grating of linear arrange of optical fiber. Then a formula about relative of range of diffractive angle and order of grating is obtained through grating equation and rotational Raman equation. When grating constant is 600 line/mm, the fifth order of grating is optimal. According to these, we can optimize the double grating monochromator from the paths of grating and parameter of grating and improve transmission and stability of lidar temperature-measuring system, make the whole lidar system higher Signal-to-Noise, and attain more exact atmosphere outline.

The integrated optic gyroscope (IOG) has many advantages, such as small volume, light quality, low propagation loss, vibration-resisting and high stability, which is the development direction of high-precision and miniaturized optic gyroscope. The result of signal detection influences the precision and detecting sensitivity of IOG directly. Noise is the crucial factor to limit detecting precision. In the practical application, the output signal of IOG is mixed up with many sorts of noise, which interferes the detection of useful message and lead drift and instability of output signal of gyroscope. So increasing the precision and detecting sensitivity directly of IOG needs not only suppressing the noise origin, but also detecting the signal in noise with effective method. According to the characteristics of output signal from detector, a signal processing method for IOG is introduced, which detects signal from noise by taking advantage of digital filter and cross-correlation, based on a digital system comprised of a high-performance digital signal processor. The result of experiments shows that percent error is less than 3 percentage or large under condition of 10 dB signal-tonoise ratio. The information of rotation in IOG is extracted effectively from the output signal mixed up with noise by this method.

Femtosecond (fs) fiber laser is very useful in fiber sensor and OTDM optical soliton communication systems. To study the suppression of side bands and the broadening of spectrum width in fs fiber laser, passively mode-locked fiber ring laser were experimentally studied. This study was based on side bands generation principle and nonlinear polarization rotation (NPR) mode lock principle. 3m deeply doped fiber was used in the ring of NPR fiber laser in the experiments, so that there were enough group velocity dispersion (GVD), chirp and high-level nonlinear effects in the ring. And these effects would help suppressing side bands and broadening spectrum width. The fiber laser with low side bands, spectrum width of 25.4nm, spectrum width tuning range of 12.4nm and repetition rates of 15.8MHz was gotten in the experiments. The theoretical limiting pulse width was about 300fs and the pulse amplitude had gotten 4% fluctuation.

We have studied a cascade energy transfer based on the long-range dipole-dipole Forster energy transfer between polymer and two fluorescent dyes in surface emitting microcavities, which is formed by sandwiching a poly(N-vinylcarzole) (PVK) film doped with 8-trishydroxyquinoline (Alq3) and 4-(dicyanomethylene)-2-tert-butyl-6 (1, 1, 7, 7-tet ramethyljulolidyl-9-enyl)-4H-pyran(DCJTB) between a distributed Bragg reflector (DBR)(with a reflectivity of 99%) and a silver film (which depth is 140nm). The sample was optically pumped by a frequency-tripled Nd:YAG laser (Continuum Surelite I) delivering 5.55ns pulses at 355nm with a 10Hz repetition rate. By optimizing the concentrations of Alq3 and DCJTB in PVK, a low lasing threshold of about 9.62ΜJ per pulse attributed to efficient cascade Forster energy transfer form PVK and Alq3 to DCJTB was obtained. The full width at half maximum (FWHM) of the emission was 3nm with the peak wavelength at 630nm. Our results demonstrate that the PVK:Alq3:DCJTB could be a promising candidate as gain medium for red organic diode lasers.

In this work, We report on highly efficient organic solar cells based on bis[2-(4-tertbutylphenyl) benzothiazolato-N, C²,] iridium (acetylacetonate) [(t-bt)₂Ir(acac)], a material that has been investigated as dopants in organic light-emitting devices (OLEDs). Organic device with structure of indium tin oxide (ITO)/(t-bt)₂Ir(acac):CuPc/C₆₀/BCP/Ag, is fabricated. By doping (t-bt)₂Ir(acac) into standard CuPc/C₆₀ OPV cell, a high J_SC of 8.23 mA/cm², VOC of 0.36 V, and an exceptionally high power conversion efficiency of 1.42% are achieved. The performance improvement is mainly attributed to efficient light absorption by (t-bt)₂Ir(acac) in the range of 380-500 nm, leading to more effective exciton dissociation. Their findings motivate the use of phosphorescent dyes for increasing photon harvesting as well as charge transfer efficiency.

With their excellent mechanical, thermal, and optical properties, silicon nitride (SiNx) films are widely used as both supporting and insulating materials for MEMS structures. Practical applications of SiNx films rely on their film quality, which will affect the performance and stability of the related devices. In general, SiNx films are deposited by low pressure chemical vapor deposition (LPCVD) or high-frequency (13.56 MHz) plasma-enhanced chemical vapor deposition (HF-PECVD). However, up to now, less reports about the deposition of SiNx films by low-frequency plasma-enhanced chemical vapor deposition (LF-PECVD) have been made. This paper reports the preparation of SiNx thin films by PECVD with a low frequency (380 kHz). The process parameters were carefully optimized for the growth of SiNx films. And the thicknesses and refractive indices of SiNx films were characterized by spectroscopic ellipsometry with small mean square error (MSE<2.5) using Tauc-Lorentz fitting model. It was revealed that the thickness uniformity, deposition rate, and wet etching rate of the as-prepared SiNx films strongly depend on the key process parameters, including RF frequency, power, gas flow ratio, deposition temperature and pressure. Our results also indicated that the refractive index of SiNx film can be rationally tuned to be 1.874 ~ 2.145 by LF-PECVD. Moreover, the wet etching rate of SiNx film in a diluted HF solution can be controlled to be 7.4 to 65.9 nm/min, and the deposition rate ranges from 23.5 to 260.8 nm/min. We also experimentally confirmed that the SiNx thin films deposited with low frequency (380 kHz) exhibit better thickness uniformity, higher deposition rate and lower wet etching rate, compared with those deposited with high frequency (13.56 MHz). Particularly, 150-mm-diameter SiNx thin films with high thickness uniformity (thickness nonuniformity <1.0%) were successfully produced in this work. With their tunable physical properties, the LF-PECVD SiNx thin films exhibit great potential in microelectronics and optoelectronics applications. Moreover, the SiNx films prepared by LF-PECVD are compared with those produced by HF-PECVD and DF-PECVD.

We propose a novel CMOS readout structure without sample and hold (SH) circuit for uncooled microbolometers. In this readout circuit, all the pixels in one row can be integrated simultaneously, and the readout integrated circuit (ROIC) area can be reduced by as much as 30%. Moreover, a single capacitor implementation of both capacitive transimpedance amplifier (CTIA) and correlated double sampling (CDS) is utilized to improve noise performance. An experimental 40x30 ROIC chip has been designed and fabricated with 0.5 μm CMOS technology. The test results show that the ROIC has good linearity with 260μV RMS total output noise voltage and 1800x650 μm² total circuit area.

A novel kind of multilayer blue electrophosphorescent organic light-emitting diode (PHOLED) is developed via vacuum thermal deposition method. Host and dopant materials are co-deposited to fabricate as an emissive layer (EML) in one vacuum chamber. The (tpbi)₂Ir(acac) as dopant material is synthesized based on noble metal element iridium. The film thickness of each layer is in situ controlled with a quartz crystal microbalance. The typical device structure is ITO/CuPc (30nm)/NPB (40nm)/TPBi(30nm):(tpbi)₂Ir(acac) (X wt%)/Alq₃ (20nm)/LiF (1nm)/Al (100nm), where X wt% stands for the doping concentration ranging from 1 to 4 wt%. Optoelectronic characteristics including current, bias voltage, brightness, efficiency and spectrum of the devices is characterized. The results showed that the current of the device under low applied voltage is consistent with the Richaardon-Schotty emission, and has linear relationship under different voltages. When X wt% is 3 wt%, a maximum luminance efficiency of the PHOLED of 5.37lm/W with a luminance of 317cd/m² at 7.0V is obtained. When the driving voltage is 15 V, the brightness of the device reached to 7,827 cd/m², corresponding to the CIE coordinates of x=0.142, y=0.217.

A fluorene derivative of 2,3-bis(9,9-dihexyl-9H-fluoren-2-yl)quinoxaline (BFLYQ) with blue fluorescence peaking at 425 nm is synthesized. The blend film of BFLYQ and N,N'-di(naphthalen-2-yl)-N,N'-diphenyl-benzine (NPB) exhibited an additional bathochromic shifted and broadbanded emission at 513 nm besides blue light in photoluminescence (PL) spectrum. The bilayer device with a structure of indium-tin-oxide (ITO)/NPB (40 nm)/BFLYQ (40 nm)/Mg : Ag showed a low-energy emission peaking at green area in electroluminescent (EL) spectra, which is due to exciplex emission between NPB and BFLYQ molecules, and the blue emission from BFLYQ increased with the enhancement of bias voltage. Based on exciplex emission, using 4-(dicyanomethylene)-2-t-butyl-6-(1,1,7,7-tetramethyljulolidyl-9-enyl)-4H-pyran (DCJTB) as red dye, the color-tunable organic light-emitting diodes (OLEDs) are fabricated by conventional thermal vacuum deposition. The devices showed emission from red to white light with increasing the distance of DCJTB and the interface of NPB/BFLYQ. Also, the luminescent mechanism of DCJTB is discussed.

Organic thin film transistor (OTFT) with a simplified planar structure is described. The gate electrode and the source/drain electrodes of OTFT are processed in one planar structure. And these three electrodes are deposited on the glass substrate by DC sputtering technology using Cr/Ni target. Then the electrode layouts of different width length ratio are made by photolithography technology at the same time. Only one step of deposition and one step of photolithography is needed while conventional process takes at least two steps of deposition and two steps of photolithography. Metal is first prepared on the other side of glass substrate and electrode is formed by photolithography. Then source/drain electrode is prepared by deposition and photolithography on the side with the insulation layer. Compared to conventional process of OTFTs, the process in this work is simplified. After three electrodes prepared, the insulation layer is made by spin coating method. The organic material of polyimide is used as the insulation layer. A small molecular material of pentacene is evaporated on the insulation layer using vacuum deposition as the active layer. The process of OTFTs needs only three steps totally. A semi-auto probe stage is used to connect the three electrodes and the probe of the test instrument. A charge carrier mobility of 0.3 cm² /V s, is obtained from OTFTs on glass substrates with and on/off current ratio of 10⁵. The OTFTs with the planar structure using simplified process can simplify the device process and reduce the fabrication cost.

The influence of concentration effect of fluorescent dye dopant 5,6,11,12-tetraphenylnaphthacene (Rubrene) molecules on the performance of small organic light-emitting diodes (OLEDs) has been investigated. An ultrathin dye layer is deposited at the interface of host material via thermal vacuum deposition, dopant concentration is enhanced and the effect of concentration quenching is more obvious. Also, the photoluminescence (PL) spectra of Rubrene solution are provided to focus on concentration quenching. The devices have doping layer and ultrathin layer are compared via their optoelectronic performance. It has been found from the electroluminescence (EL) spectra of the devices that the concentration quenching effect of the doping dyes could be modulated through varying the thickness of ultrathin dye layer.

High performance organic light-emitting devices using two silole derivatives of 2,2,3,3-4,4-bisthienylsilole (TPBTSi) and 2,2,4,4-tetraphenyl-3,3-Bisthienylsilole (TPB3TSi) as emitting materials are fabricated by vacuum thermal evaporation method. N, N'-diphenyl-N,N'-bis (3-methylphenyl)-1,1'-biphenyl-4,4'-diamine (NPB) and tris(8-hydroxyquinolinolato) aluminum (Alq₃) are used as hole transporting layer (HTL) and electron transporting layer (ETL), respectively. The luminance-voltage and current density-voltage characteristics of two devices are investigated, and the performance difference is discussed. The results demonstrate that at a bias voltage of 16 V, the devices consisting of novel emissive materials of TPBTSi and TPB3TSi have a maximum luminance of 11290 and 7508 cd/m², and the peaks of electroluminescence (EL) spectra locate at 516 and 580 nm, respectively.

White organic light-emitting diodes (WOLEDs) are fabricated by thermal vacuum deposition method based on a novel starburst fluorene derivative of 1,2,3,4,5,6-hexakis(9,9-diethyl-9H-fluoren-2-yl) benzene (HKEthFLYPh). The photoluminescent (PL) spectrum of the HKEthFLYPh peaks at 374 nm, which overlapped with the absorption spectra of N,N'-di(naphthalen-2-yl)-N,N'-diphenyl-benzine (NPB), tris(8-hydroxyquinolinato)aluminum (Alq) and 5,6,11,12-tetraphenylnaphthacene (Rubrene) materials. And PL spectra of HKEthFLYPh : NPB, HKEthFLYPh : Alq and HKEthFLYPh : Rubrene blend in chloroform solution showed characteristics of NPB, Alq and Rubrene. Using HKEthFLYPh as energy transfer layer, NPB as a hole transporting and blue light-emitting layer, Rubrene as a yellow emissive layer, and Alq as an electron transporter, WOLEDs with a undoped structure are fabricated. The structure of WOLEDs are indium-tin-oxide (ITO)/NPB (40-x nm)/HKEthFLYPh (4 nm)/NPB (x nm)/Rubrene (1 nm)/Alq (40 nm)/Mg : Ag (200 nm). The results demonstrated that when x=0 nm the device showed a yellowish white light with the Commission Internationale de l'Eclairage chromaticity (CIE) coordinates changing from (x=0.37, y=0.40) to (x=0.34, y=0.37) under bias voltage from 4 to 10 V; when x=5 nm the device exhibited a pure white light emission with CIE coordinates changing from (x=0.32, y=0.30) to (x=0.34, y=0.34) under bias voltage from 4 to 10 V. Also, the pure white device had a turn-on voltage (defined as the bias required to produce a measurable luminance of 1 cd/m²) of 3.8 V, a luminance of 1137 cd/cm² at a bias voltage of 15 V, and a maximum luminance efficiency of 0.51 lm/W at 4.25 V.

Organic light emitting diode (OLEDs) are fabricated using a novel star-shaped hexafluorenylbenzene with a simple structure of indium-tin-oxide (ITO)/1,2,3,4,5,6-hexakis(9,9-diethyl-9H-fluoren-2-yl)benzene (HKEthFLYPh):N, N'-bis-(1-naphthyl)-N,N'-diphenyl-(1,1'-biphenyl)-4,4'-diamine (NPB)/2,9-dimenthyl-4,7-diphenyl-1,10-phenanthroline (BCP)/tris(8-hydroxyquinoline) aluminum (Alq₃)/Mg:Ag by spin coating method. The electroluminescent properties of the device are characterized. The results show that there is a new peak at 600 nm, which is no appearance in PL spectra. This new emission is proposed to be electroplex that occurred at the solid-state interface between HKEthFLYPh and BCP in addition to the exciton emission from NPB. The Commissions Internationale De L'Eclairage (CIE) coordinates of the device are (x=0.33, y=0.29) at 10 V, which obviously belongs to white light emission.

Multilayer organic light-emitting diodes are fabricated with a structure of ITO/CuPc/NPB/CBP:(t-bt)₂Ir(acac)/BCP/Alq/LiF:Al, and the current density vs voltage characteristic of organic phosphorescent devices is investigated. The current density characteristics of triple-layer devices with different emission layer thickness is simulated into three regions, which are no-emission region, emission region and saturated region, corresponding to ohmic contact model, trap charge limited current model and space charge limited current model. The film thickness of emission layer shows obvious effect on the device current density.

The characteristic of charge carrier recombination zone in N,N'-bis-(1-naphthyl)-N,N'-biphenyl-1,1'-biphenyl-4,4'-diamine (NPB) based OLEDs is studied using an ultrathin 5,6,11,12-tetraphenylnaphthacene (rubrene) as a probe. By adjusting the rubrene thickness and location in NPB light-emitting layer, the luminescent spectra and electrical properties of the devices are investigated. The results show that when the thickness ranges from 0.2 to 0.8 nm, the surface morphology of rubrene exists as the discontinuous island-like state locating on the surface of NPB film and seldom affect the electrical characteristics. While the location of rubrene shifted from the interface of NPB/2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline (BCP) to NPB side, the maximum exciton concentration is found within 2 nm away from the interface, which is the main charge carrier recombination zone. With an optimized structure of indium-tin-oxide (ITO)/NPB (40nm)/rubrene (0.3nm)/NPB (7nm)/BCP (30nm)/Mg:Ag, the device exhibits a turn on voltage as low as 3 V and stable white light. The peaks of EL spectra are located at 431 and 555 nm corresponding to the Commissions Internationale De L'Eclairage (CIE) coordinates of (0.32, 0.32), which are relatively stable under the bias voltage from 5 to 15 V. A maximum luminance of 5630 cd/m² and a maximum power efficiency of 0.6 lm/W is achieved. The balanced spectra are attributed to the stable confining of charge carriers and exciton by the thin emitting layers.

In the last few decades, conductive polymers such as polyaniline, polypyrrole, and polythiophene have been widely investigated as effective sensitive materials for chemical gas sensors. Among them, polyaniline (PANI) is frequently used because of its ease and cheap of synthesis, environmental stability and intrinsic redox reaction. However, problems with these conductive polymers include their low processing ability, poor mechanical strength and chemical stability. There are tremendous approaches for the enhancement of mechanical strength and chemical stability of organic materials by combining organic materials with inorganic counterparts in nano-size to form composite materials..which would optimize the characteristics of gas sensors. In the paper, polyaniline/Indium(III) Oxide(PANi/In2O3) nanocomposite thin films was prepared on a quartz substrate by combination techniques of electrostatic self-assembly and in situ chemical oxidation polymerization at 10°C. Infrared spectrum analysis (IR) of the composite and scanning electron microscope(SEM) of nanocomposite thin films were performed. PANi/In₂O₃ nanocomposite thin film gas sensor was fabricated on AT-Cut quartz crystal microbalance(QCM) of Ag electrodes, and the sensitive properties of gas sensor to CH₄ and CO are characterized and analyzed. The results indicate that PANi/In₂O₃ thin film gas sensor has good linear sensitive property to CH₄ and CO, and is more sensitive to CH₄, i.e., the sensitivity is 0.386Hz per ppm when the sensor is exposed to 500 ppm CH₄ while only 0.16Hz per ppm to the same concentration of CO. Such sensitive properties of gas sensor in the constant concentration of CH₄ at different temperature are also characterized. The result shows that temperature would affect the sensitive property of gas sensor.

Polymer doped electrophosphorescent organic light-emitting diodes with a structure of indium tin oxide (ITO) /poly(N-vinylcarbazole)(PVK) : bis(1,2-dipheny1-1H-benzoimidazole) iridium (acetylacetonate) [(pbi)₂Ir(acac)] (1wt%)(70 nm)/bathocuproine(BCP)(× nm)/tris(8-hydroxyquinolate)-aluminum (Alq₃)(30-× nm)/Mg:Ag have been fabricated. The light-emitting layer is processed by doping noble metal iridium complex (pbi)₂Ir(acac) into a carbazole copolymer of PVK matrix with the low doping concentration of 1wt% using spin coating method. The influence of film thickness of the hole blocking layer and electron transporting layer between the emitting layer and the cathode on the performance of device are investigated. Results show that to keep the whole thickness of the hole blocking layer and electron transporting layer as a constant, charge carrier recombination zone is transferred from electron transporting layer to light-emitting layer by gradual increase the hole blocking layer thickness. The device performance is enhanced simultaneously. The efficiency enhancement may be attributed to the formation of a narrow recombination zone, in which both charge carriers and excitons are confined. High charge concentrations in the emissive layer results in the efficient collision capture in the electron-hole recombination process, and exciton confinement leads to improving energy transfer and charge trapping in polymer doped phosphorescent system.

A method using UV-curable epoxy resin is described to modify organic polymer substrates without changing the bulk properties of substrate material. The reagents contain an acrylate or other photoactive group which, when exposed to light of appropriate wavelength, generates highly reactive intermediates that covalently bond with nearly any organic material. Applying epoxy resin onto the surfaces of such materials, the surface properties can be modified to achieve greatly increased bond strengths with conventional adhesives. Flexible organic light-emitting diode (FOLED) is fabricated on indium-tin oxide (ITO) plastic substrate by inserting a UV-curable epoxy resin as a buffer layer between plastic substrate and ITO film. A maximum luminance of FOLED of 4,860 cd/m² at 12 V is obtained.

The luminescent characteristics of a novel small molecule fluorene material, 6,6'-(9H-fluoren-9,9-diyl)bis(2,3-bis(9,9-dihexyl-9H-fluoren-2-yl)quinoxaline) (BFLBBFLYQ) for organic light-emitting diode are systemically investigated, especially focusing on the effect of hole transporter doping concentration. Double-layer devices with a structure of indium tin oxide (ITO)/emissive layer (EML)/2,9-dimethyl-4,7-diphenyl-l,10-phenanthroline (BCP)/Mg:Ag are fabricated by spin-coating method, where EML is BFLBBFLYQ and blend of BFLBBFLYQ: N,N'-biphenyl-N,N'-bis-(3-methylphenyl)-1,1'-biphenyl-4,4'-diamine (TPD), respectively. The results show that the performance of the device is improved two magnitudes by doping BFLBBFLYQ with TPD. In the electroluminescent (EL) spectra, the BFLBBFLYQ device show a blue light emission peaking at 485 nm, and the blend device exhibits a broad banded emission with 45 nm red-shifted peaking at 530 nm in green light area. The photoluminescent (PL) spectra of BFLBBFLYQ, TPD and BFLBBFLYQ: TPD blend in xylene solution and spin-coated film is also studied, yielding an evidence that exciplex maybe plays the role for low energy emission.

This paper presents a piezoelectric micro-bridge structure as a resonant gas sensor. The proposed micro-sensor is designed to expand the narrow range of frequency changing and make correction convenient for detection. The mechanical performance was simulated to obtain optimum design parameters by finite element method. The relationship between dimensions, layer thickness and resonance frequency is discussed. The results show that resonance frequency increased by about 0.6 MHz with a 8.25e-16 kg mass rise in gas-sensing layer in the frequency range of 8 GHz to 8.5 GHz. Thus, the sensor is very sensitive to the change of membrane mass and this makes it very suitable for concentration sensitive detector. Finally the fabrication process for the sensor suitable for batch fabrication is proposed.

Absorption spectra and Raman spectra of Dy:NaGd(WO₄)₂(Dy:NGW) and Dy:NaLa(WO₄)₂(Dy:NLW) crystal at room temperature are investigated. Although the structure of them are similar, there is a bit discrepancy between Dy:NGW and Dy:NLW of the set of spectra corresponding to the radius of Nd³⁺, La³⁺ and Gd³⁺. According to J-O theory, the oscillator strength and intensity parameter are calculated and discussed. Due to the disordered structure of the host, the absorption bands are strongly inhomogeneously broadened. The absorption broad bandwidth reduces the requirements on laser diodes for zero-phonon-line (ZL) pumping with respect to the spectral bandwidth and wavelength stability for different power levels. The same differences happen in the Raman spectra. It is beyond doubt that Dy³⁺-doped compounds, including the low energy-phonon crystals will be one kind of very promising material in the laser application.

An experimental system of a ternary logic optical computer, including its working principle, architecture and main components, is proposed. The main object of this paper is to give readers a holistic understanding of the ternary optical computer. This experimental system, which fully exploits the parallelism of optics, can have huge data bus width that is difficult for the general electronic computer to realize. The completeness of this system not only proves the feasibility of the ternary optical computer principle and the decrease-radix design theory, but also sets down a solid foundation for the research of the practicable hundreds-trit ternary optical computer.

In this paper, a method for designing a portable UV-Vis Spectrophotometer is introduced. A miniaturized dispersion system is developed based on Hamamatsu array detector S3904 - 1024Q and flat field concave holographic grating. In order to solve the contradiction between spectral width and energy-utilizing ratio of light source, multi-band optical fibers are employed, which one side of the multi-bands optical fiber is arranged to be rectangle as incidence slit. The touch screen is employed as input and output system of the spectrophotometer and the miniaturized fiber-optic UV - Vis light source is employed as light source. The research and testresults of prototypes show that the new spectrophotometer based on our new method is miniaturization in volume (190*170*100mm³), can realize multi-wavelength detection on-line, is easily handled (touch screen control) and the performance accords with the Chinese National Standard.

This article determines three kinds of materials: core and clad glass,cladding glass,acid-leaching glass and the match ability of physical and chemical performances of these materials is described.. The quantitative relationship between concentration, temperature, acid type and resolution time are studied to determine a series of suitable technical parameters. Many effective methods are identified to improve optical properties through a lager number of detecting and analyzing the properties of fiber image bundle, which lays a good foundation for wider application.

Large aperture optical system test has been a key problem for a long time. It could be solved by sub-aperture stitching method after the sub-apertures are tested. Sub-aperture stitching technology is a feasible method for testing large diameter optical system with small diameter interferometer sub-aperture stitching. Auto-collimating component will be needed with interferometer stitching method. Auto-collimating component is defined that the image could be kept stable when the optical component rotates about any axis in space. And the beam could be back along original optical path. By this means, auto collimation could be realized. The auto-collimating component is smaller than the test system. The whole wavefront of large aperture system could be tested through the method that the auto-collimating component moves along the guide rail and rotates about optical axis. A right angle roof prism is chosen as the auto-collimating component due to its character of easier manufacture. The active matrix, characteristic orientation and extreme axial is deduced with dynamic optics. The sub-aperture stitching testing process is simulated by ZEMAX in detail. The test result by stitching method is compared with that by directive test method for large aperture optical system. It is shown that the relative test error is less than 4.3λ ⁰/₀₀. The sub -aperture stitching test method is verified.

In computer controlled large aspheric mirror polishing process, it is crucially important to build an accurate stressed-lap surface model for shape control. It is desirable to provide a practical measure of prediction confidence to access the reliability of the resulting models. To build a reliable prediction model for representing the surface shape of stressed lap polishing process in large aperture and highly aspheric optical surface, this paper proposed a predictive model with its own confidence interval estimate based on a fuzzy neural network. The calculation of confidence interval accounts for the training data distribution and accuracy of the trained model with the given input-output data. Simulation results show that the proposed confidence interval estimation reflects the data distribution and extrapolation correctly, and works well in high-dimensional sparse data set of the detected stressed lap surface shape changes. The original data from the micro-displacement sensor matrix were used to train the neural network model. The experiment results showed that the proposed model can represent the surface shape of the stressed-lap accurately and facilitate the computer controlled optical polishing process.

A neural network based intelligent controller for an optical polishing machine with 60cm diameter active stressed lap has been developed. This paper briefly introduces the shape control strategy of the stressed-lap based optical polishing system. The dynamic change of the surface shape of the stressed lap during the operating process of polishing a large aspheric optical surface is investigated. The principle and structure of neural network based shape control system are discussed. The relationship between the stressed lap driven forces and surface shape is analyzed in detail. The original data from the micro displacement sensor matrix were used to train the neural network model. Simulation results show that the proposed control model can precisely produce the combined driven forces upon given surface shape of the stressed lap and improve the deformation precision.

This paper presents the principle of stressed mirror polishing for rapid and low fabrication of the large number of aspheric mirror. By means of establishing corresponding mathematical model, a proposed method for producing mid or large sized aspheric mirror is discussed in detail. Based on the mechanics of elasticity, we emphasize the feasibility of axisymmetric aspheric mirror and prepare for the next investigation of paraboloid mirror.

Many polishing techniques such as fixed-abrasive polishing, abrasive-free polishing and magnetorheological finishing etc., have been developed. Meanwhile, a new technique is proposed using the mixture of the electro-rheological (Er) fluid with abrasives as polishing slurry, which is a special process does not require pad. Electrorheological fluid is a special suspension liquid, whose viscosity has an approximate proportional relation with the electric strength applied. When the field strength reaches a certain limit, the phase transition occurs and the liquid acquires a solid like character, and while the electric field is removed, the fluid regains its original viscosity during the order of milliseconds. In this research work, we employed the characteristics of viscosity change of Er fluid to hold the polishing particles for micromachining. A point-contact electro-rheological finishing (Erf) tool was designed with a tip diameter 0.5~1mm. Both the anode and the cathode of the electric field were combined in the tool. The electric field could be controllable. When the tool moves across the profile of the work piece, by controlling the electric field strength as well as the other manufacturing parameters we can assure the deterministic material removal. Furthermore, the electro-rheological finishing process has been planned in detailed.

In order to get enough information about the target, avoid big chromatic aberration as a result of wide spectrum and the complexity of optical system and adapt different special environment temperature, a hybrid refractive/ harmonic diffractive optical system in far-infrared multi-band is described in the paper. This diffractive optical system has been designed an athermalized multi-band imaging system with harmonic diffractive element in 15-50μm spectrum, based on larger ¹dispersion capability and particular thermal dispersive power of harmonic diffractive element. Then, at the temperature range from 0°C to 40°C, this design can simultaneously meet with all requirements of the imaging system in five harmonic wave bands, including15.8-16.2μm, 18.5-20μm, 23-25μm, 30.5-33.5μm and 46-50μm. In each harmonic wave band, the magnification changes as a function of wavelength, which creates image registration error. To compensate this shortcoming, a zoom optical system is designed with three lenses by means of optical two- component method. The design results show that the hybrid refractive/harmonic diffractive optical system can realize athermalized and achromatic design, and the zoom optical system makes half image height at 3.53mm in every harmonic wave band and still realizes aberration compensation action. In the five harmonic wave bands, each optical transfer function approaches the diffraction limit at ambient temperature range of 0°C to 40°C. Finally, the system realizes the requirements of portability, mini-type and ease for fabrication.

This paper presents electromagnetic analysis of Si-based small period blazed reflection gratings for a period of 0.6 - 1.5μm in terms of rigorous coupled wave analysis (RCWA) and its fabrication by using dry etching method. Also, diffraction characteristics on the facet material are discussed on the basis of its efficiency. First, the optical and geometrical characteristics of blazed gratings are investigated and the first order diffraction efficiencies for TE and TM polarization are estimated under the phase-matching requirement for four kinds of gratings (period 0.6-1.5μm). Second, the optimized blazed gratings are successfully fabricated on a slanted silicon substrate by FAB etching method. From the results, the first-order TE and TM polarized diffraction efficiencies for four kinds of gratings are evaluated from optical testing and these results showed good agreement with these theoretical values, respectively. Also, it was found that diffraction efficiencies of gratings with the smaller period than the wavelength in dimension are obtained 0% for TE and TM polarization as expected. It is expected that this dry etching method for small size patterning in company with coating technology can be applicable to high performance optical devices.

To obtain a large-aperture high damage threshold grating compressor for a Perawatt laser system, the multi-piece tiled grating is an effective method. In order to avoid the influence of tiling error on the temporal and spatial characteristics of grating, the rotation error between sub-gratings needs to be controlled in 1μrad, the piston errors including in-plane shift and out-of-plane shift errors need to be controlled in 20nm. One mechatronic system is presented for tiled large-aperture planar gratings based on parallel mechanism with five freedoms. Five uniform feed drives are improved dual mode mechanism with servomotor and ballscrew as macro-actuator and piezoelectric transducer (PZT) with resolution of 1.2nm as micro-actuator. Key components of the mechanism are optimum designed based on finite element method (FEM) to achieve proper dynamics of the mechanical system. The proposed system is applied in experiment to tile two sub-aperture gratings of 200mm×400mm. Far-field diffraction patterns proves that the tiled grating can meet requirements of accuracy and stability of laser system.

Computer controlled optical surfacing (CCOS) technique is widely used in machining process of large and medium aspheric surfaces, because of its high accuracy, simple process conditions, low cost and other merits. The characteristic of the removal function of a polishing tool is a key factor in determining convergence rate in CCOS process. The shape parameters, which influence the characteristic of the removal function of a dual-rotation polishing tool, are the rotational speed ratio and the eccentricity ratio. A method is presented to optimize these two shape parameters, in which the error correcting capability of the removal function is considered. The optimized parameters are compared with those from other references. The results show that a removal function with a certain size has the highest error correcting capability when the eccentricity ratio is 0.8 and the rotational speed ratio -3. With the optimized parameters, the final figuring of a 500 mm f3 paraboloid mirror is accomplished. With 95 hours of polishing time, the mirror is taken from an rms deviation of 0.241 waves to an rms deviation of 0.015 waves, where a wave is 0.6328 μm. The results show that higher precision and efficiency will be achieved with the optimized parameters in CCOS.

The ANSYS analysis method is employed to analyze the stress field distribution within the whole cutting region. The surface degenerative layer is studied by a nano-mechanical measurement system. The results show that, the forming mechanism of surface degenerative layer is the change stress distribution in ultra-precision turning. The tensile stress is major in machined surface. The stress and strain increase with the accretion of depth of cut, and decrease with the accretion of cutting speed. In the three elements of cutting quantity, the cutting speed has the largest impact on the thickness of degenerative layer, followed the depth of cut, and the feed rate has the smallest impact.

In the past few years, wire sawing was developed quickly and became the promising brittle crystals slicing technology because of its advantages of processing large wafers of very small thickness, high surface quality, high yield, and ability to slice brittle crystals made of various materials. In the process, the thin wire, the processing tools, travels at high speed, and subjects to external excitation from many aspects. Dynamic effect is directly related to processing result, in this paper the dynamic effect of wiresaw in cutting region is studied, a suitable model can be present according to continuous gyroscopic system character. Research on wire oscillation form variation with the change of cutting depth; obtain the steady state response of wire with different process parameters on wire saw manufacturing process, and a better understanding of the wire saw operation can be developed. The effect the final surface finish of wafers is analyzed to improve the process quality.

Residual figure errors on the polished optical surfaces would affect the quality of the optical system. Among them, mid spatial frequency defects would produce small angle scattering, which has the effects of smearing out of the imaging core and degrading the resolution. In this paper, taking a classical Schmidt-Cassegrain system into consideration and a cosine-modulation function is stacked onto the primary mirror surface to simulate and analyze the effect of the mid spatial frequency. Actually, the mid spatial frequency irregularities could decay the resolution of imaging systems although the conventional specifications such as RMS and PV meet the requirements.

A precision rotating mode diamond turnimg method used for machining large optical asphercial elements is introduced. The position errors between spindles of workpiece and cutting tool system are discussed, and error models of correctly forming the aspherical reference sphere are set up. The constructed models are used in adjusting the machine for ensuring the machining accuracy and efficiency.