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MOEMS and Miniaturized Systems VIII
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Volume Details

Volume Number: 7208
Date Published: 6 February 2009

Table of Contents
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Front Matter: Volume 7208
Author(s): Proceedings of SPIE
The high versatility of silicon based micro-optical modulators
Author(s): Harald Schenk
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Miniaturized UV/VIS spectrometer made by MOEMS technology
Author(s): Katsumi Shibayama; Takafumi Yokino; Katsuro Hikita; Norihiro Iwasaki; Helmut Teichmann; Ulrich Staerker; Flavio DiPrima; Koei Yamamoto
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Advances in SLM development for microlithography
Author(s): Ulrike Dauderstädt; Per Askebjer; Peter Björnängen; Peter Dürr; Martin Friedrichs; Matthias List; Dirk Rudloff; Jan-Uwe Schmidt; Michael Müller; Michael Wagner
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Linear micromirror array for broadband femtosecond pulse shaping in phase and amplitude
Author(s): Stefan M. Weber; Severin Waldis; Wilfried Noell; Denis Kiselev; Jérôme Extermann; Luigi Bonacina; Jean-Pierre Wolf; Nico F. de Rooij
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Large area transmissive modulator for a remotely interrogated MEMS-based optical tag
Author(s): Mark E. McNie; Andrew M. Scott; Nicola Price; David J. Combes; Gilbert W. Smith; Kevin D. Ridley; Kevin M. Brunson; David C. Jones; Keith L. Lewis
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Fabrication of large-scale monocrystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Author(s): Fabian Zimmer; Frank Niklaus; Martin Lapisa; Thomas Ludewig; Martin Bring; Martin Friedrichs; Thor Bakke; Harald Schenk; Wouter van der Wijngaart
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Integrated position sensing for 2D microscanning mirrors using the SOI device layer as the piezoresistive mechanical-elastic transformer
Author(s): Jan Grahmann; Holger Conrad; Thilo Sandner; Thomas Klose; Harald Schenk
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Thermally actuated microshutter for MOEMS applications
Author(s): Derrick Langley; LaVern A. Starman; Ronald A. Coutu Jr.; Stanley Rogers
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Fabrication of 3D comb drive microscanners by mechanically induced permanent displacement
Author(s): D. Jung; D. Kallweit; T. Sandner; H. Conrad; H. Schenk; H. Lakner
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Micro-assembly of three-dimensional rotary MEMS mirrors
Author(s): Lidai Wang; James K. Mills; William L. Cleghorn
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Application of Si LEDs (450nm-750nm) in CMOS integrated circuitry-based MOEMS: simulation and analysis
Author(s): Lukas W. Snyman; Kingsley A. Ogudo; Monuko du Plessis; Gustav Udahemuka
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Novel MWIR microspectrometer based on a tunable detector
Author(s): Norbert Neumann; Martin Ebermann; Steffen Kurth; Karla Hiller
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MEMS analyzer for fast determination of mixed gases
Author(s): Thomas Otto; Ray Saupe; Alexander Weiss; Volker Stock; Oliver Throl; Wulf Grählert; Stefan Kaskel; Holger Schreck; Thomas Gessner
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Silicon oxynitride-based integrated optical switch
Author(s): G. Rehder; M. Stochero; M. I. Alayo
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Micro-interferometer with high throughput for remote sensing
Author(s): Alan Scott; Mirosław Florjańczyk; Pavel Cheben; Siegfried Janz; Brian Solheim; Dan-Xia Xu
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Addressable microshutter array for a high-performance infrared miniature dispersive spectrometer
Author(s): S. Ilias; F. Picard; C. Larouche; R. Kruzelecky; W. Jamroz
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New astronomical instrument using MOEMS-based programmable diffraction gratings
Author(s): Frederic Zamkotsian; Patrick Lanzoni; Thierry Viard; Christophe Buisset
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Advanced microbolometer detectors for a next-generation uncooled FPA for space-based thermal remote sensing
Author(s): Fraser Williamson; Linda Marchese; Georges Baldenberger; François Châteauneuf; Francis Provencal; Jean-Sol Caron; Fabien Dupont; Jocelyne Osouf; Patrick Couture; Linh Ngo Phong; Tim Pope
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Large micromirror array for multi-object spectroscopy in a cryogenic environment
Author(s): Michael Canonica; Severin Waldis; Frederic Zamkotsian; Patrick Lanzoni; Pierre-Andre Clerc; Wilfried Noell; Nico de Rooij
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Nanosatellite distributed far infrared radiometers
Author(s): L. Ngo Phong; F. Châteauneuf
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MEMS for pico- to micro-satellites
Author(s): H. R. Shea
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Hybrid microtransmitter for free-space optical spacecraft communication: design, manufacturing, and characterization
Author(s): Sara Lotfi; Kristoffer Palmer; Henrik Kratz; Greger Thornell
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Scanning photon microscope based on a MEMS 2D scanner mirror
Author(s): Heinrich Grüger; Jens Knobbe; Thomas Egloff; Marc Althaus; Michael Scholles; Harald Schenk
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Liquid-filled varifocal lens on a chip
Author(s): Seung Tae Choi; Jeong Yub Lee; Jong Oh Kwon; Seungwan Lee; Woonbae Kim
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Feedback stabilized deformable membrane mirrors for focus control
Author(s): Sarah J. Lukes; Phillip A. Himmer; Eric J. Moog; Steven R. Shaw; David L. Dickensheets
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Design and fabrication of a MEMS mirror for miniature laser projection
Author(s): René Sanders; Diederik van Lierop; Boudewijn de Jong; Herman Soemers
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Empirical analysis of form drag damping for scanning micromirrors
Author(s): Wyatt O. Davis
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Fine-pitch high-efficiency spatial optical modulator for mobile display applications
Author(s): Jong Hyeong Song; Sang Kyeong Yun; Hee Yeoun Kim; Seungdo An; Heung Woo Park; Yoon Joon Choi; Victor Yurlov; Anatoliy Lapchuk; Chung Mo Yang; Sung Jun Lee; Jae Wook Jang; Ki Un Lee; Ki Suk Woo; El M. Bourim
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Integrated incandescent microlamp coupled to SiOxNy waveguide
Author(s): D. O. Carvalho; M. N. P. Carreño; G. P. Rehder; M. I. Alayo
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