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Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
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Volume Details

Volume Number: 7206
Date Published: 6 February 2009

Table of Contents
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Front Matter: Volume 7206
Author(s): Proceedings of SPIE
Hybrid wafer-level vacuum hermetic micropackaging technology for MOEMS-MEMS
Author(s): Sonia Garcia-Blanco; Patrice Topart; Karine Le Foulgoc; Jean-Sol Caron; Yan Desroches; Christine Alain; Francois Chateauneuf; Hubert Jerominek
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Packaging of a silicon-based biochip
Author(s): Thomas Velten; Margit Biehl; Werner Haberer; Timo Koch; Pedro Ortiz; Neil Keegan; Julia Spoors; John Hedley; Calum McNeil
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Radiometric packaging of uncooled microbolometer FPA arrays for space applications
Author(s): S. García-Blanco; P. Cote; M. Leclerc; N. Blanchard; Y. Desroches; J.-S. Caron; L. Ngo Phong; F. Chateauneuf; T. Pope
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Fine leak batch testing of multiple MEMS packages
Author(s): Changsoo Jang; Byeng Dong Youn; Suk-Jin Ham; Bongtae Han
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Examining internal gas compositions of a variety of microcircuit package types and ages with a focus on sources of internal moisture
Author(s): R. K. Lowry; R. C. Kullberg
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In situ measurement of gas diffusion properties of sealing polymers for MEMS packages by an optical gas leak test
Author(s): Changsoo Jang; Arindam Goswami; Bongtae Han
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Dispersive evaluation and self-sensing of single-fiber/acid-treated CNT-epoxy nanocomposites using electromicromechanical techniques and acoustic emission
Author(s): Joung-Man Park; Jung-Hoon Jang; Zuo-Jia Wang; Joel GnidaKouong; Duc-Huyen Ngo; Woo-Il Lee; Jong-Kyoo Park; K. Lawrence DeVries
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Tribological behavior of micron-scale polycrystalline silicon structural films in ambient air
Author(s): D. H. Alsem; R. van der Hulst; E. A. Stach; M. T. Dugger; J. Th. M. De Hosson; R. O. Ritchie
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Low-cycle fatigue testing of silicon resonators
Author(s): Pierre-Olivier Theillet; Olivier Pierron
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Reliability study of micromechanical actuators for electrostatic RMS voltage measurements using bulk-silicon technology
Author(s): Jan Dittmer; Rolf Judaschke; Stephanus Büttgenbach
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An acoustic phonon detection test setup for evaluating the frequency stability of clamped-clamped beam resonators
Author(s): C.-L. Wong; M. Palaniapan
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Novel test structures for characterization of microsystems parameters at wafer level
Author(s): Alexey Shaporin; Petra Streit; Hendrik Specht; Jan Mehner; Wolfram Dötzel
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The concept of a new simple low-voltage cathodoluminescence set-up with CNT field emission cathodes
Author(s): Piotr Psuja; Dariusz Hreniak; Wieslaw Strek
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Analysis of image quality for laser display scanner test
Author(s): H. Specht; S. Kurth; D. Billep; T. Gessner
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Environmental testing of COTS components for space applications
Author(s): Rajeshuni Ramesham
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Development of a novel surface acoustic wave MEMS-IDT gyroscope
Author(s): Haekwan Oh; Keekeun Lee; Wen Wang; Sungjin Yun; Sangsik Yang
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