This PDF file contains the front matter associated with SPIE Proceedings Volume 6959, including the Title Page, Copyright information, Table of Contents, Introduction, and the Conference Committee listing.

Wide bandgap semiconductor ZnO and GaN nanowires have shown the ability to detect many types of gases, biological and chemical species of interest In this review we give some recent examples of using these nanowires for pH sensing, glucose detection and hydrogen detection at ppm levels.

Bulk single crystals of CdZnTe compound semiconductor is used for room temperature radiation detection in commercial radiation sensors. A large volume of detector material with low defect density is required for increasing the detection efficiency. Manufacture of such a bulky detector-quality material with low defect density is expensive. In this communication, synthesis of nanowires arrays of CdZnTe that can be used for detecting low energy radiation is reported for the first time. CdZnTe ternary compound semiconductor, referred as CZT, was electrodeposited in the form of nanowires onto a TiO₂ nanotubular template in non-aqueous electrolytes using a pulse-reverse process at 130 °C. Very high electrical resistivity of the CZT nanowires (in the order of 10¹⁰ Ω-cm) was obtained. Such a high resistivity was attributed to the presence of deep defect states such as cadmium vacancies created by the anodic cycle of the pulse-reverse electrodeposition process. Stacks of series connected CZT nanowire arrays were impressed with different bias potentials. The leakage current was in the order of tens of PicoAmperes. When exposed to a radiation source (Am -241, 60 keV), the current flow in the circuit increased. The preliminary results indicate that the CZT nanowire arrays can be used as radiation detector materials at room temperature with a much low bias potential (0.7 - 2.3 V) as against 300 - 500 V applied to the bulk detector materials.

Using chemical bath deposition(CBD) method we fabricated hexagonally, vertical aligned ZnO nanorod arrays on glass. XRD pattern of the sample shows only (002) diffraction peaks were observed, indicating excellent (001) orientation and well vertical alignment of the ZnO arrays. SEM results of samples fabricated under different condition show that we can control the diameter of the nanorods by using growing solution with different concentration. To attain the desired length, we ushered a novel multi-growth method, with which we obtained ZnO nanorod arrays thicker than 10μm. PL spectra of the sample shows strong UV emission.

JPL has developed high performance cold cathodes using arrays of carbon nanotube bundles that routinely produce > 15 A/cm² at applied fields of 5 to 8 V/μm without any beam focusing. They have exhibited robust operation in poor vacuums of 10^-6 to 10^-4 Torr- a typically achievable range inside hermetically sealed microcavities. A new double-SOI process to monolithically integrate gate and additional beam tailoring electrodes has been developed. These electrodes are designed according to application requirements making carbon nanotube field emission sources application specific (Application Specific electrode-Integrated Nanotube Cathodes or ASINCs). ASINCs, vacuum packaged using COTS parts and a reflow bonding process, when tested after 6-month shelf life have shown little emission degradation. Lifetime of ASINCs is found to be affected by two effects- a gradual decay of emission due to anode sputtering, and dislodging of CNT bundles at high fields (> 10 V/μm). Using ASINCs miniature X-ray tubes and mass ionizers have been developed for future XRD/XRF and miniature mass spectrometer instruments for lander missions to Venus, Mars, Titan, and other planetary bodies.

The lifetime of a patterned carbon nanotube film is evaluated for use as the cold cathode field emission ionization source of a miniaturized mass spectrometer. Emitted current is measured as a function of time for varying partial pressures of nitrogen gas to explore the robustness and lifetime of carbon nanotube cathodes near the expected operational voltages (70-100 eV) for efficient ionization in mass spectrometry. As expected, cathode lifetime scales inversely with partial pressure of nitrogen. Results are presented within the context of previous carbon nanotube investigations, and implications for planetary science mass spectrometry applications are discussed.

The development of carbon nanotube-based nanoelectromechanical (NEM) switches is described in this work for their potential application in communication and memory systems. Our first NEM structure consists of single walled nanotubes (SWNTs) suspended over shallow trenches in a SiO₂ layer, with a Nb pull electrode beneath. DC measurements of these devices show well-defined ON and OFF states as the tube is actuated electrostatically at a few volts. For high frequency applications, electromagnetic modeling of these devices was performed using FEMLAB to calculate the quasi-static capacitance. An equivalent circuit of our switch was developed from which the swept frequency response was simulated up to 100 GHz in the ON and OFF states. A second NEM switch structure, where the tubes are perpendicular to the substrate is also discussed, which is primarily being developed for nonvolatile memory applications. Here, the growth of multi-walled nanotubes (MWNTs) from deep nanopores is described using thermal chemical vapor deposition (CVD) and plasma-enhanced (PE) CVD with Fe and Ni catalyst, respectively, in preparation for the formation of a vertical switch architecture.

The microshutter array (MSA) is a key component in the James Webb Space Telescope Near Infrared Spectrometer (NIRSpec) instrument. The James Webb Space Telescope is the next generation of a space-borne astronomy platform that is scheduled to be launched in 2013. However, in order to effectively operate the array and meet the severe operational requirements associated with a space flight mission has placed enormous constraints on the microshutter array subsystem. This paper will present an overview and description of the entire microshutter subsystem including the microshutter array, the hybridized array assembly, the integrated CMOS electronics, mechanical mounting module and the test methodology and performance of the fully assembled microshutter subsystem. The NIRSpec is a European Space Agency (ESA) instrument requiring four fully assembled microshutter arrays, or quads, which are independently addressed to allow for the imaging of selected celestial objects onto the two 4 mega pixel IR detectors. Each microshutter array must have no more than ~8 shutters which are failed in the open mode (depending on how many are failed closed) out of the 62,415 (365x171) total number of shutters per array. The driving science requirement is to be able to select up to 100 objects at a time to be spectrally imaged at the focal plane. The spectrum is dispersed in the direction of the 171 shutters so if there is an unwanted open shutter in that row the light from an object passing through that failed open shutter will corrupt the spectrum from the intended object.

This paper describes the business scope to which DLP® Products works under with emphasis placed upon some of the technological complications and challenges present when developing an actuator array with the ultimate intention of rendering visual content at high-definition and standard video rates. Additionally, some general thoughts on alternative applications of this spatial light modulation technology are provided.

We are implementing nano- and micro-technologies to develop a miniaturized electron impact ionization mass spectrometer for planetary science. Microfabrication technology is used to fabricate the ion and electron optics, and a carbon nanotube (CNT) cathode is used to generate the ionizing electron beam. Future NASA planetary science missions demand miniaturized, low power mass spectrometers that exhibit high resolution and sensitivity to search for evidence of past and present habitability on the surface and in the atmosphere of priority targets such as Mars, Titan, Enceladus, Venus, Europa, and short-period comets. Toward this objective, we are developing a miniature, high resolution reflectron time-of-flight mass spectrometer (Mini TOF-MS) that features a low-power CNT field emission electron impact ionization source and microfabricated ion optics and reflectron mass analyzer in a parallel-plate geometry that is scalable. Charged particle electrodynamic modeling (SIMION 8.0.4) is employed to guide the iterative design of electron and ion optic components and to characterize the overall performance of the Mini TOF-MS device via simulation. Miniature (< 1000 cm³) TOF-MS designs (ion source, mass analyzer, detector only) demonstrate simulated mass resolutions > 600 at sensitivity levels on the order of 10^-3 cps/molecule N₂/cc while consuming 1.3 W of power and are comparable to current spaceflight mass spectrometers. Higher performance designs have also been simulated and indicate mass resolutions ~1000, though at the expense of sensitivity and instrument volume.

A carbon nanotube-based thermal conductivity vacuum gauge is described which utilizes 5-10 μm long diffusively contacted SWNTs for vacuum sensing. By etching the thermal SiO₂ beneath the tubes and minimizing heat conduction through the substrate, pressure sensitivity was extended toward higher vacuums. The pressure response of unannealed and annealed devices was compared to that of released devices. The released devices showed sensitivity to pressure as low as 1 x 10^-6 Torr. The sensitivity increased more dramatically with power for the released device compared to that of the unreleased device. Low temperature electronic transport measurements of the tubes were suggestive of a thermally activated hopping mechanism where the activation energy for hopping was calculated to be ~ 39 meV.

Solar system exploration and the anticipated discovery of biomarker molecules is driving the development of a new miniature time-of-flight (TOF) mass spectrometer (MS). Space flight science investigations become more feasible through instrument miniaturization, which reduces size, mass, and power consumption. However, miniaturization of space flight mass spectrometers is increasingly difficult using current component technology. Micro electro mechanical systems (MEMS) and nano electro mechanical systems (NEMS) technologies offer the potential of reducing size by orders of magnitude, providing significant system requirement benefits as well. Historically, TOF mass spectrometry has been limited to large separation distances as ion mass analysis depends upon the ion flight path. Increased TOF MS system miniaturization may be realized employing newly available high speed computing electronics, coupled with MEMS and NEMS components. Recent efforts at NASA Goddard Space Flight Center in the development of a miniaturized TOF mass spectrometer with integral MEMS and NEMS components are presented. A systems overview, design and prototype, MEMS silicon ion lenses, a carbon nanotube electron gun, ionization methods, as well as performance data and relevant applications are discussed.

Dip Pen Nanolithography^® (DPN^®) is an inherently additive SPM-based technique which operates under ambient conditions, making it suitable to deposit a wide range of biological and inorganic materials. Massively parallel two-dimensional nanopatterning with DPN is now commercially available via NanoInk's 2D nano PrintArray^TM, making DPN a high-throughput, flexible and versatile method for precision nanoscale pattern formation. By fabricating 55,000 tip-cantilevers across a 1 cm² chip, we leverage the inherent versatility of DPN and demonstrate large area surface coverage, routinely achieving throughputs of 3x10⁷ μm² per hour. Further, we have engineered the device to be easy to use, wire-free, and fully integrated with the NSCRIPTOR's scanner, stage, and sophisticated lithography routines. In this talk we discuss the methods of operating this commercially available device, subsequent results showing sub-100 nm feature sizes and excellent uniformity (standard deviation < 16%), and our continuing development work. Simultaneous multiplexed deposition of a variety of molecules is a fundamental goal of massively parallel 2D nanopatterning, and we will discuss our progress on this front, including ink delivery methods, tip coating, and patterning techniques to generate combinatorial libraries of nanoscale patterns. Another fundamental challenge includes planar leveling of the 2D nano PrintArray, and herein we describe our successful implementation of device viewports and integrated software leveling routines that monitor cantilever deflection to achieve planarity and uniform surface contact. Finally, we will discuss the results of 2D nanopatterning applications such as: 1) rapidly and flexibly generating nanostructures; 2) chemically directed assembly and 3) directly writing biological materials.

Solid phase direct-write (SPDW) patterning is a promising technique for nanoscale device fabrication. It enables the deposition of a range of materials with the precision and relatively low cost inherent in scanning force microscopy. The ability to deposit controlled 2D and 3D patterns at the nanometer scale and image them with the same instrument adds versatility to nanodevice design and fabrication. This technique works by loading an atomic force microscopy tip with a solid phase "ink" then reversing the process to write a pattern. Linewidths between 40nm and 500nm can be written, with the dimension varied by user specified parameters. To date, four materials have been successfully deposited: carbon, silicon, tungsten oxide and molybdenum oxide. This report presents an overview of SPDW and its application to the direct write fabrication of electronic devices.

Carbon Nanotubes (CNT) were synthesized on heated scanning probes and under ambient conditions without requiring Chemical Vapor Deposition (CVD) apparatus. Dip pen techniques were utilized for deposition of catalyst precursors on the probe tips in the form of aqueous solution of metal salts. A layer of Fullerene (C60) was deposited on the probe tip using a microfluidics apparatus and the probes were heated individually using a microheater. The temperature of the heated probes reached ~350 °C during the synthesis of CNT. The synthesized CNTs were subsequently characterized using scanning electron microscopy (SEM) and Raman Spectroscopy. The Raman spectroscopy showed peaks in the Radial Breathing Mode (RBM) mode, as well as the Graphitic band. The RBM peaks indicate that the synthesized SWCNT has a diameter of ~1 nm. The single peak in the Raman spectra in RBM mode is indicative of SWCNT of a single chirality. Hence this process can be optimized to synthesize SWCNT of a specific chirality.

Microcantilevers (MCLs) hold a position as a cost-effective and highly sensitive sensor platform for medical diagnostics, environmental, and fast throughput analysis. One of recently focus in this technology is the development of biosensors based on the conformational change of proteins on MCL surfaces. The surface stress changes due to conformational change of the proteins upon interaction with specific analytes are promising as transducers of chemical information. We will discuss our recent results on several biosensors due to conformational change of proteins. The proteins include glucose oxidase (GOx), organophosphorus hydrolyses (OPH), Calmodulin (CaM), and Horseradish peroxidase (HRP).

Inertial navigation systems based upon optical gyroscopes tend to be expensive, large, power consumptive, and are not long lived. Micro-Electromechanical Systems (MEMS) based gyros do not have these shortcomings; however, until recently, the performance of MEMS based gyros had been below navigation grade. Boeing and JPL have been cooperating since 1997 to develop high performance MEMS gyroscopes for miniature, low power space Inertial Reference Unit applications. The efforts resulted in demonstration of a Post Resonator Gyroscope (PRG). This experience led to the more compact Disc Resonator Gyroscope (DRG) for further reduced size and power with potentially increased performance. Currently, the mass, volume and power of the DRG are dominated by the size of the electronics. This paper will detail the FPGA based digital electronics architecture and its implementation for the DRG which will allow reduction of size and power and will increase performance through a reduction in electronics noise. Using the digital control based on FPGA, we can program and modify in real-time the control loop to adapt to the specificity of each particular gyro and the change of the mechanical characteristic of the gyro during its life time.

There are significant efforts to develop gyroscopes using MEMS technology; accuracies of gyroscopes varying from rate-grade, through tactical-grade, to inertial grade. The random walk varies from 0.5 °/√h through 0.05 °/√h to 0.001 °/√h. The most common approach is to use vibratory gyros, which use mechanical elements (proof-mass) to sense the rotation. There are several types of vibratory gyroscopes now commercially available from Robert Bosch, BEI Syrtron Donner, Silicon Sensing Systems, MEMSens, and Analog Devices. Any higher accuracy gyroscopes require a rotating disk which is electrostatic levitated and spun. This device also does not have bearings and with large spinning velocity very high accuracy can be obtained. There are two publicly known attempts to develop MEMS rotating gyroscopes, one in Japan by the group associated with Tokimec and a similar concept is being developed in Europe led by M. Kraft. The European approach has more theoretical character. At AMNSTC we developed and fabricated another rotating gyroscope, which differs from the Tokimec design in several ways: three instead of four levitation electrodes are used, new 6 phase or 4 phase spinning concepts are implemented, better layout of vertical electrodes was used, new concept of vias were developed, and new fabrication method was developed, which used standard MEMS processing with as few as 5 masking steps, allowing the realization of low cost inertial measurement systems. Several batches of gyroscopes were fabricated and measured.

A new generation of inertial measurement technology is being developed enabling a 10-micron particle to be "aware" of its geospatial location and respond to this information. The proposed approach combines an inertially-sensitive nano-structure or nano fluid/structure system with a nano-sized chemical reactor that functions as an analog computer. By using chemistry to perform the necessary computational steps in our device, it is possible to overcome traditional limitations on device size. The proposed nanodevice utilizes mechanical sensing and chemical recording to record the time history of various state variables. Using a micro-track containing regions of different temperatures and thermally-sensitive liposomes (TSL), a range of accelerations can be recorded and the position determined. Through careful design, TSL can be developed that have unique transition temperatures and each class of TSL will contain a unique DNA sequence that serves as an identifier. Acceleration can be detected through buoyancy-driven convection. As the liposomes travel to regions of warmer temperature, they will release their contents at the recording site, thus documenting the acceleration. This paper will present the initial proof-of-concept experimental results achieved from chemical recording of the state variable temperature. The experiment focuses on the liposome release of the DNA due to temperature variations and subsequent binding and recording of the time history. These results prove the feasibility of this method of sensing and recording of the history of state variables.

A label-free DNA hybridization detector using carbon nanotube transistor arrays is developed. The sensors are comprised of a network of carbon nanotubes covered by thin oxide layer, which serve as efficient charge transducers for biomolecules in solution. Probe DNA sequences are immobilized on the gate oxide, and the conductance is measured before and after exposure and hybridization with a target DNA. Complementary binding results in a net charge doubling at the oxide surface which induces a positive shift in the threshold voltage and concomitant increase in the current at fixed bias. The method does not involve chemical functionalization of the carbon nanotubes and is compatible with protocols in conventional DNA microarrays. Most importantly, the technique does not require reporter molecules or tagging labels, which greatly simplifies the operation and reduces the cost. We have shown a measurable response to hybridization with target concentration of ~1 nM. The implementation, theory of operation, device fabrication and solutions to pertinent engineering issues to build practical system are discussed.

To fabricate the more complex structures, developing simplified methods will create greater utility for researchers. Herein, we present a method to build three-dimensional structures through the optical method combined with photoactivation chemistry and Al₂O₃ nanopore membrane. This phase transition reaction in this material was initiated by the UV-light energy from the fluorescent microscope. This method merges an optical approach along with phase shifting chemical restructuring through the transition of the chemical from an aqueous to a solid phase. We also fabricated the square three-dimensional microstructure based on this method. This method has potential applications in a variety of fields, which include building three-dimensional complex structures such as microfluidics, lab-on-chip and small-scale scaffolds for tissue engineering.

DNA analysis, specifically single nucleotide polymorphism (SNP) detection, is becoming increasingly important in rapid diagnostics and disease detection. Temperature is often controlled to help speed reaction rates and perform melting of hybridized oligonucleotides. The difference in melting temperatures, Tm, between wild-type and SNP sequences, respectively, to a given probe oligonucleotide, is indicative of the specificity of the reaction. We have characterized Tm's in solution and on a solid substrate of three sequences from known mutations associated with Cystic Fibrosis. Taking advantage of Tm differences, a microheater array device was designed to enable individual temperature control of up to 18 specific hybridization events. The device was fabricated at Sandia National Laboratories using surface micromachining techniques. The microheaters have been characterized using an IR camera at Sandia and show individual temperature control with minimal thermal cross talk. Development of the device as a real-time DNA detection platform, including surface chemistry and associated microfluidics, is described.

Photonic crystals are fabricated on plastic surfaces, producing narrow bandwidth resonances at any desired wavelength. While shifts in the resonant wavelength quantify the density of adsorbed biomaterial, the resonances also enhance the output of adsorbed fluorophores. The combined attributes of photonic crystals enable highly sensitive label-free detection and greatly amplified sensitivity of any fluorescence-based assay for applications in life science research, drug discovery, and environmental pathogen detection. Applications for label-free selective detection of viral pathogens with sensitivity of ~30 focal forming units, and detection of spore pathogens with single-unit resolution are highlighted. Amplified fluorescence, meanwhile, enables gene expression detection of DNA at concentrations ~2 orders of magnitude lower than detection on optically passive surfaces.

Metallic nanoparticles usually exhibit localized surface plasmon resonance (LSPR) due to the collective oscillation of electrons upon light excitation. Different applications require specific LSPR wavelengths and absorbance spectra. The ability to engineer the nanostructure and to tune the location of the LSPR wavelength is very important for the sensing applications. We present a simple but versatile fabrication technique, the oblique angle deposition, to tune the LSPR wavelength of Ag thin films. Oblique angle deposition was used to produce silver nanoparticle films with nominal thickness from 5 nm to 100nm and two deposition angles, 0° and 85°. With increasing thickness, the LSPR wavelength is blue shifted. At the large deposition angle, the LSPR wavelength is blue shifted by 3nm on average with every 5nm thickness increment. The stability of the Ag LSPR substrate under liquid environment has been studied, and a surface passivation method is proposed. Those substrates are capable of detection 10^-10 M NeutrAvidin.

When wafer with patterned Al connections will be machined by wet etching as subsequent microfabrications, silicon nitride (SiN) is used as passivation and mask layer. We use low temperature deposition process, e.g., plasma-enhanced chemical vapor deposition (PECVD), for depositing SiN. What we experienced is that the wet etching by using Tetramethyl Ammonium Hydroxide (TMAH-water) solution leads the failure of micromachining MEMS sensors and actuators. Damage of aluminum connection by the etching solution is found as the killer reason. In this paper, we have investigated the etching of Al in different TMAH solutions. The result shows that due to deposition of SiN after Al metallization, pinholes are always formed on SiN because of the Al crystal hillocks formed during the SiN deposition. The edge of the Al pattern is not perfectly covered because of poor step coverage of PECVD SiN on Al. The in situ method for passivation of the aluminum during the wet etching has been used. By adding the surfactants, the passivation technique for Al during the Si micromachining in TMAH-water solution is achieved. The quality of Si anisotropic wet etching which includes etching rate, surface roughness and undercutting have been affected significantly.

Surface plasmon resonance sensors are a popular technology for the optical detection of surface adsorption, for applications ranging from drug-development to pathogen detection. Here, we will discuss the integration of nano-hole arrays to provide high-sensitivity detection, with a lower detection limit, speed and cost. Calculations will be presented that suggest that in-hole detection is more sensitive than detecting binding from the surface around the nano-holes. In-hole detection also has the benefit of increased speed due to rapid diffusive transport, yet it provides the challenge of microfluidic/nanofluidic integration. We will outline our recent efforts to produce nano-hole arrays with through-hole detection.

This paper presents recent progress in the development of MEMS deformable mirrors for space and defense applications. Two different MEMS DM designs are described, along with their corresponding uses in space and defense systems. The designs build on a conventional surface micromachining technology and feature an electrostatic actuation architecture pioneered at Boston University. Key performance characteristics are presented. The device characteristics make them useful for a range of wavefront control applications that include low-power optical modulation, adaptive optics imaging, and laser communication, on both ground-based and space-based platforms.

Simultaneous detection of intensity and polarization at the pixel-level has many important applications in the mid-infrared region. In this work a large-format aluminum wire grid micro polarizer array has been fabricated and tested on silicon substrates. The arrays were made on 150mm silicon wafers using a 193nm deep-UV stepper, with each array spanning over 1-million pixels. A unique multilayer design and a large-area nanoscale projection lithography combined with high-aspect ratio wire-grid structures were utilized to achieve optimum extinction coefficient and transmission. Measured extinction coefficients on test samples exceeded 30-dB, with maximum transmission around 90%. These arrays could be designed to match the focal-plane array geometry for integration with mid-IR imagers.

In spin electronic devices, passing a spin-polarized current through the device is a better way to switch the magnetic configuration than applying an external magnetic field with an external current line, because there are several drawbacks associated with the use of external magnetic fields in terms of energy consumption and the risk of crosstalk. One good method is using a current to induce domain wall motion from a constriction in a spin-valve structure, which generates much interest in the case of spin-dependent electron transport across a nanocontact or a nanoconstriction. The samples are fabricated on a SiO₂/Si substrate using electron beam lithography and a lift-off technique. Electron beam lithography was used to define the nanocontact structure and radio frequency magnetic sputtering with pure Ar was used to deposit an Al₅₀Fe₅₀ alloy layer about 30 nm thick and an Au cap-layer about 2 nm thick. Ultrasonic assisted lift-off in acetone is used to obtain the wire and the constriction. The I-V measurement is performed at room temperature without applied magnetic field. A sharp drop in resistance was observed in the 50-nm-wide nanocontact, which is attributed to the removal of the domain wall from the contact by the reflection of spin polarized electron. In the low resistance state, no domain wall is pinned at the contact, while in the high resistance state the presence of a domain wall must be responsible for the additional resistance, which is the domain wall resistance.

Ferromagnetic nanowires poise an intriguing way of separating cells. The length of nanowires affects the cell separation yield and cellular internationalization process of nanowires. While the application of nanowires brings new exciting perspectives in biomedical engineering, the interaction between nanowires and cells needs to be further exploited. This paper presents the study on the interactions of various Ni and Au nanowires with adherent and suspended cells, and the effects of magnetic field on the cell adherent behavior in the presence of Ni nanowires.

In this Paper we present growth and characterization of ZnO nanowires on wideband gap substrates, such as SiC and GaN. Experimental results on the ZnO nanowires grown on p-SiC and p-GaN are presented with growth morphology, structure analysis, and dimensionality control. We also present experimental results on individual nanowires such as I-V measurements and UV sensitivity measurements with use of polymer coating on ZnO nanowires. The ZnO nanowires can be used for a variety of nanoscale optical and electronics applications.

In Dip Pen Nanolithography® (DPN®), ink transport is reported to occur through the water meniscus formed between the AFM tip and the substrate by capillary condensation. It is imperative to understand the ink transport mechanisms in order to develop reliable commercial applications of DPN, and NanoInk is at the forefront of these efforts. In this work, we model the dot patterns of 16-Mercaptohexadecanoic acid (MHA) created by evaporative coating of a 1D 18 cantilever array and perform predictive modeling with solution based MHA cantilever inking results. We extend the functionality of the NanoInk 2D nano PrintArray^TM (2D array) by measuring the uniformity of 1-octadenethiol (ODT) dot patterns created. Further, we try to quantify the uniformity of patterns created by the 2D array, in a more statistically quantitative way. We do this by measuring the dot diameters of over 200 ODT ink patterns over a 1x1cm² area and examining the uniformity of the ODT vapor inking protocol developed.