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PROCEEDINGS VOLUME 6882

Micromachining and Microfabrication Process Technology XIII
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Volume Details

Volume Number: 6882
Date Published: 13 February 2008

Table of Contents
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Front Matter: Volume 6882
Author(s): Proceedings of SPIE
Advances in the fabrication of surface modified microfluidic devices in nonfluorescing UV cured materials
Author(s): M. P. C. Watts; N. Cramer; R. Sebra; H. Simms; K. Masters; T. Haraldsson; K. Anseth; C. Bowman
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Micromachining of a fiber-to-waveguide coupler using grayscale lithography and through-wafer etch
Author(s): Thomas Dillon; Mathew Zablocki; Shouyan Shi; Janusz Murakowski; Dennis Prather
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Laser beam shaping for micromaterial processing using a liquid crystal display
Author(s): U. Klug; M. Boyle; F. Friederich; R. Kling; A. Ostendorf
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A novel fabrication technology for anti-reflex wafer-level vacuum packaged microscanning mirrors
Author(s): M. Oldsen; U. Hofmann; H. J. Quenzer; J. Janes; C. Stolte; K. Gruber; M. Ites; F. Sörensen; B. Wagner
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Parallel-kinematic-mechanism-based monolithic XY micropositioning stage with rotary comb drive actuators
Author(s): Deepkishore Mukhopadhyay; Jingyan Dong; Placidus M. Ferreira
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Micro-inductors integrated on silicon for DC-DC converters
Author(s): T. El Mastouli; J.P. Laur; J.L. Sanchez; M. Brunet; D. Bourrier; M. Dilhan
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Electrodeposition of Au for self-assembling 3D microstructures
Author(s): M. E. Kiziroglou; A. Goswami Mukherjee; R. W. Moseley; P. Taylor; S. Pranonsatit; A. S. Holmes; E. M. Yeatman
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Fabrication of integrated channel waveguides in polydimethylsiloxane (PDMS) using proton beam writing (PBW): applications for fluorescence detection in microfluidic channels
Author(s): C. N. B. Udalagama; S. F. Chan; S. Homhuan; A. A. Bettiol; T. Wohland; F. Watt
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MEMS post-processing of MPW dies using BSOI carrier wafers
Author(s): A. Goswami Mukherjee; M. E. Kiziroglou; A. S. Holmes; E. M. Yeatman
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Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching
Author(s): Prem Pal; Kazuo Sato; Miguel A. Gosalvez; Mitsuhiro Shikida
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TCAD tool for innovative MEMS and MOEMS: an all-in-one solution
Author(s): U. Triltsch; S. Büttgenbach
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Sensitivity and stress effects of composite membranes with micro/macro porous silicon for pressure sensor applications
Author(s): L. Sujatha; Enakshi Bhattacharya
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Three dimensional waveguide fabrication in PMMA using femtosecond laser micromachining system
Author(s): Nitin Uppal; Panos S. Shiakolas; Mohsin Rizwan
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Aspect ratios, sizes, and etch rates in photostructurable glass-ceramic
Author(s): J. Stillman; J. Judy; H. Helvajian
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Dry film process development for electroplating and lift-off of metal layers
Author(s): Phaninder R. Kanikella; Matthew J. O'Keefe; Chang-Soo Kim
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Electrical properties of thin epoxy-based polymer layers filled with n-carbon black particles
Author(s): Marta Klanjšek Gunde; Nina Hauptman; Marijan Maček
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