Share Email Print


Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies III
For the purchase of this volume in printed format, please visit

Volume Details

Volume Number: 6672
Date Published: 10 September 2007

Table of Contents
show all abstracts | hide all abstracts
Front Matter: Volume 6672
Author(s): Proceedings of SPIE
Interferometry for wafer dimensional metrology
Author(s): Klaus Freischlad; Shouhong Tang; Jim Grenfell
Show Abstract
Warpage of thin wafers using computer aided reflection moire method
Author(s): Chi Seng Ng; Kok Yau Chua; Meng Tong Ong; Yoke Chin Goh; Anand K. Asundi
Show Abstract
Auto-scanning white-light interferometer
Author(s): Jin-Liang Chen; Chi-Hong Tung; Ching-Fen Kao; Calvin C. Chang
Show Abstract
Use of light-emitting diode (LED) in interference microscopy
Author(s): Marc Jobin; Raphael Foschia
Show Abstract
Optical system for investigations of low-cost diffraction gratings
Author(s): Przemyslaw Czapski; Lukasz Platos; Michal Jozwik
Show Abstract
Calibration of a reversed-wavefront interferometer for polarization coherence metrology
Author(s): Dean P. Brown; Alexis K. Spilman; Thomas G. Brown; Miguel A. Alonso; Riccardo Borghi; Massimo Santarsiero
Show Abstract
High resolution interferometric metrology for patterned wafers
Author(s): Shouhong Tang; Klaus Freischlad; Petrie Yam
Show Abstract
Measuring height variation over entire wafer surface with high lateral resolution
Author(s): Shouhong Tang; Brian Clendenin
Show Abstract
3D phase micro-object studies by means of digital holographic tomography supported by algebraic reconstruction technique
Author(s): B. J. Bilski; A. Jozwicka; M. Kujawinska
Show Abstract
Limitations of Rayleigh Rice Perturbation Theory for describing surface scatter
Author(s): John C. Stover; James E. Harvey
Show Abstract
Unified scatter model for rough surfaces at large incident and scatter angles
Author(s): James E. Harvey; Andrey Krywonos; John C. Stover
Show Abstract
Inverse scattering simulation for a 1-D surface reconstruction
Author(s): Anting Wang; Zu-Han Gu
Show Abstract
BRDF and MBR of a retro-reflected tag for free-space optical communication
Author(s): Zu-Han Gu
Show Abstract
A structure that more than doubles the intensity of an enhanced backscattering peak
Author(s): T. A. Leskova; A. A. Maradudin; E. R. Méndez; Zu-Han Gu
Show Abstract
Experimental reconstruction for inverse scattering of one-dimensional surfaces
Author(s): Zu-Han Gu; Anting Wang
Show Abstract
Generation of partially coherent light in rough surface scattering and suppression of the speckle it produces
Author(s): T. A. Leskova; A. A. Maradudin; E. R. Méndez; Anting Wang; Zu-Han Gu
Show Abstract
Polarization of grating diffraction simulated by vector Kirchhoff model
Author(s): Soe-Mie Foeng Nee; Tsu-Wei Nee
Show Abstract
Theoretical and experimental investigations of non-goniometric scatterometry
Author(s): Cornelius Hahlweg; Hendrik Rothe
Show Abstract
Progress toward traceable nanoscale optical critical dimension metrology for semiconductors
Author(s): Heather J. Patrick; Thomas A. Germer
Show Abstract
A novel parameter proposed for 2D and 3D topography measurements and comparisons
Author(s): John Song; Ted Vorburger
Show Abstract
Calibration of integrating sphere system designed for roughness correction in optical calibration of gauge blocks
Author(s): Chu-Shik Kang; Jae Wan Kim; Jong-Ahn Kim; Tae Bong Eom
Show Abstract
Measurement of ultra low film stress, local stress distribution and flatness by imaging nanotopography based on low coherence phase shifting interferometry in conjunction with wafer and film thickness metrology
Author(s): Alexander Pravdivtsev; Manuel Santos II; Ann Koo
Show Abstract
Ellipsometric porosimetry: fast and non destructive method of porosity characterization of solid oxide fuel cell material based on YSZ thin film
Author(s): Alexis Bondaz; Laurent Kitzinger; Christophe Defranoux
Show Abstract
A hybrid phase unwrapping method for correction the error
Author(s): Yong-Tong Zou; Chi-Hong Tung; Calvin C. Chang
Show Abstract
Development of a precision dual level stage system for the dimensional metrology of large range surface topography
Author(s): Jong-Ahn Kim; Jae Wan Kim; Tae Bong Eom; Chu-Shik Kang
Show Abstract
3D phase object measurement using an off-axis Fresnel hologram
Author(s): Ching-Yang Lin; Gu-Liang Chen; Ming-Kuei Kuo; Chi-Ching Chang; Hong-Fai Yau
Show Abstract
Precision measurement of LED angular intensity distribution
Author(s): O. Muzychko
Show Abstract

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?