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MOEMS and Miniaturized Systems VI
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Volume Details

Volume Number: 6466
Date Published: 20 January 2007

Table of Contents
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Front Matter: Volume 6466
Author(s): Proceedings of SPIE
Miniaturized FTIR-spectrometer based on an optical MEMS translatory actuator
Author(s): Thilo Sandner; Andreas Kenda; Christian Drabe; Harald Schenk; Werner Scherf
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Uniform tilt-angle micromirror array for multi-object spectroscopy
Author(s): Severin Waldis; Pierre-Andre Clerc; Frederic Zamkotsian; Michael Zickar; Wilfried Noell; Nico de Rooij
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Using MEMS technology for cost effective recycling of plastics
Author(s): Yariv Geller
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Investigation and characterization of high-efficient NIR-scanning gratings used in NIR micro-spectrometer
Author(s): F. Zimmer; A. Heberer; Th. Sandner; H. Grueger; H. Schenk; H. Lakner; A. Kenda; W. Scherf
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Tunable infrared detector with integrated micromachined Fabry-Perot filter
Author(s): Norbert Neumann; Martin Ebermann; Karla Hiller; Steffen Kurth
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An indium phosphide-based near-infrared MOEMS microspectrometer for agri-food and environmental monitoring
Author(s): Michel Garrigues; J. Leclercq; Romain Gil-Sobraqués; Olivier Parillaud; Michel Crochon; Jean-Michel Roger; Octave Amore; Bruno Vilotitch
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MEMS compatible illumination and imaging micro-optical systems
Author(s): A. Bräuer; P. Dannberg; J. Duparré; B. Höfer; P. Schreiber; M. Scholles
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The iMoD display: considerations and challenges in fabricating MOEMS on large area glass substrates
Author(s): Clarence Chui; Philip D. Floyd; David Heald; Brian Arbuckle; Alan Lewis; Manish Kothari; Bill Cummings; Lauren Palmateer; Jan Bos; Daniel Chang; Jedi Chiang; Li-Ming Wang; Edmon Pao; Fritz Su; Vincent Huang; Wen-Jian Lin; Wen-Chung Tang; Jia-Jiun Yeh; Chen-Chun Chan; Fang-Ann Shu; Yuh-Diing Ju
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Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors
Author(s): M. Scholles; A. Bräuer; K. Frommhagen; Ch. Gerwig; H. Lakner; H. Schenk; M. Schwarzenberg
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Electrostatic 1D microscanner with vertical combs for HD resolution display
Author(s): Jin-Woo Cho; Yong-Hwa Park; Young-Chul Ko; Byeung-Leul Lee; Seok-Jin Kang; Seok-Whan Chung; Won-kyoung Choi; Yong-Chul Cho; Seok-Mo Chang; Jin-Ho Lee; John Sunu
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Electro-opto-mechanical cantilever-based logic gates
Author(s): G. Rehder; M. I. Alayo; H. B. Medina; M. N. P. Carreño
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High-performance silicon scanning mirror for laser printing
Author(s): Wyatt O. Davis; Dean Brown; Mark Helsel; Randy Sprague; Greg Gibson; Arda Yalcinkaya; Hakan Urey
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Fracture strength of SOI springs in MEMS micromirrors
Author(s): Shu-Ting Hsu; Alexander Wolter; Wolf-Dietrich Owe; Harald Schenk
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Zoom camera based on liquid lenses
Author(s): S. Kuiper; B. H. W. Hendriks; J. F. Suijver; S. Deladi; I. Helwegen
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Reflectance and fluorescence imaging with a MEMS dual–axes confocal microscope
Author(s): Hyejun Ra; Wibool Piyawattanametha; Yoshihiro Taguchi; Olav Solgaard
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High-speed three-dimensional endoscopic OCT using MEMS technology
Author(s): Zhongping Chen; Woonggyu Jung; Yeh-Chan Ahn; Ali Sepehr; William B. Armstrong; Matt Brenner; Daniel T. McCormick; Norman C. Tien
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A new micro laser camera
Author(s): Christian Drabe; Richard James; Thomas Klose; Alexander Wolter; Harald Schenk; Hubert Lakner
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Update on MEMS-based scanned beam imager
Author(s): Richard James; Greg Gibson; Frank Metting; Wyatt Davis; Christian Drabe
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Spherical artificial compound eye captures real images
Author(s): Jacques Duparré; Daniela Radtke; Andreas Tünnermann
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Fabrication of micromechanical and microoptical systems by two-photon polymerization
Author(s): Carsten Reinhardt; A. Ovsianikov; Sven Passinger; Boris N. Chichkov
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Investigation of a seesaw structure for elevating the micro-optical device by CMOS-MEMS process
Author(s): Chien-Chung Tsai; Shang-Che Tsai; Yi-Cheng Huang
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Long-term stability of NIST chip-scale atomic clock physics packages
Author(s): S. Knappe; V. Gerginov; V. Shah; A. Brannon; L. Hollberg; J. Kitching
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Six-axis compliant mechanisms for manipulation of micro-scale fiber optics components
Author(s): Shih-Chi Chen; Martin L. Culpepper; Scott Jordan
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Investigation of motion behavior for the opposite connection micro-optical devices by CMOS-MEMS process
Author(s): Chien-Chung Tsai; Yi-Cheng Huang; Shang-Che Tsai
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Improved homogenization of fly's eye condenser setups under coherent illumination using chirped microlens arrays
Author(s): F. C. Wippermann; P. Dannberg; A. Bräuer; S. Sinzinger
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Novel modeling approach for multi-disciplinary micro domains
Author(s): Mehrnaz Motiee; Amir Khajepour; Raafat R. Mansour
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