The singularity structure is revealed for space-charge-limited (p-regime) and temperature-limited (T-regime) emission in case of relativistic beams in external magnetic field. This structure is described by three-term formula in p-regime: linear combination of two branch points with regular functions of longitudinal coordinate as coefficients. In T-regime the formula consists two terms and one branch point. For T-regime the partial differential equations for regular functions are formulated. It is shown that for axially symmetric flows under p- and T-regime conditions (zero start velocity), Bush's theorem is invalid. The results of regularization for inner and outer tasks in the formation theory of relativistic quasiaxially symmetric three-dimensional beams are given.

The limits of validity for non-relativistic and relativistic spherical diode theory as instrument of mathematical and physical testing for trajectory analysis programs in case of essentially many-scaled electron flows are discussed. The influence of self magnetic field and initial thermal velocities which determine these limits are investigated.

The forming electrodes are calculated for ribbon and cylindrical bipolar beams on basis of exact parametric equations for equipotentials in the first case, combination of analytically continued plane bipolar diode equation and integral form of solution for Laplace equation in the second case.

Basing on perturbation technique, discussed are some urgent problems of computational charged particle optics including numerical evaluation of fringe fields and field perturbations caused by small deviation of the shape of electrodes from rotational or planar symmetry as well as aberrational analysis of charged particle beams in the most general tensor form. It is shown that perturbation technique, being combined with other numerical approaches such as the tau- variations method and generalized method of initial parameters variation, proves to be most promising for evaluation of mechanical tolerances and simulation of Coulomb repulsion effects and charged particles scattering upon a fine-structure grid.

The peculiarity of the numeric simulation of the thermoemission electron guns consists in the principal necessity of taking into account the contribution of the electrons' charge into the potential distribution in the beam formation region. Ths fact makes the mathematical model essentially nonlinear especially in the high-perveance operation mode. Moreover, the charge density is extremely high in the vicinity of emitting surfaces, rising infinitely in the limit of zero initial velocities. A special semi-analytical approach has been applied to deal with the charge singularity. Being combined with traditional finite-element numerical techniques, this approach provides an efficient way to simulate thermoemission electron guns.

An electron magnetron-injection gun (MIG) for a high-power relativistic gyrotron has been modeled numerically. The influence of the electrons locked in a trap between the cathode and the working space on the beam parameters has been analyzed. It is proposed to remove such electrons by means of a special diaphragm installed at the beginning of the transportation channel, which makes it possible to increase the pitch-factor and reduce the velocity spread of the formed helical electron beam.

One of the most common methods of a choice of a movement trajectory of a particle from a set of trial short on scale is the approach of Hamilton - Lagrange, and also the principle of least action (PLA) connected to it [l, 2). Up to now PLA frequently had only theoretical value and practically it was not used for the solution of applied problems. A classical problem of electron optics is calculation of a mechanical trajectory of a charged particle in the given force field. In this work the PLA is used for the solution of this problem.

It is offered, designed and digitally simulated new electron - optical element - combined axially symmetric electromagnetic mirror. It is shown, that coefficients of chromatic and spherical aberrations of this mirror have the sign opposite to a usual sign of axial aberrations in axially symmetric optics of charged particles. Their absolute sizes are equal to the double size of a projection of a paraxial optical way of the charged particle in electromagnetic field of a mirror to an axis of symmetry of a mirror. It allows to change the negative coefficients of axial aberrations in a wide range from several millimeters up to meter, without changing of a mirror focus and energy of the charged particles. It allows in turn to compensate the positive coefficients values of axial aberrations of the modern optimized ion and electron objectives. We propose in this paper the method and the electron - optical scheme of full correction of the chromatic and spherical aberrations coefficients in the axially symmetric ion and electron objectives, based on these properties of the mirror. The proposed electron - optical scheme of the corrector has approximately in 5 times less adjusting (mechanical plus electric) degrees of freedom and, hence, it is much more stable than the unique scheme of the corrector working in electron optics. It is shown that the combined electromagnetic mirror, on the contrary of the existing scheme, can be applied not only in electron but also in ion optics.

Physic-mathematical model of geometry of high voltage glow discharge electron-optical systems (HVGD EOS), formed profile electron beams, is proposed in the article. Well-known principles, was used early for modeling of glow discharge electron guns, generated the point-focus electron beams, are use as foundation of proposed model. Details of symmetry of electrodes systems are taken into account for forming the mathematical equations. Plasma boundary position in formed EOS model is defined from equivalent one-dimensional discharge model and recalculated with taken into account the volume, which occupied the anode plasma corresponding to EOS spatial geometry. Influence of EOS geometry parameters to plasma boundary position and its emission properties have been investigated theoretically.

The paper presents a series of electron-beam and ion-plasma installations for microphotoelectronic industry. The vacuum film deposition installation allows conducting unbreakable process of ion-beam etching, magnetron sputtering, and resistance-heated evaporation aimed to make a multi-component contact with the p-type semiconductor regions. Using the low-energy ions for substrate cleaning and etching reduces radiation damage of the substrate material and helps to avoid p-region inversion. The ion-beam etching installation is designed to etch semiconductor and metal materials in either inert or reactive gas environment to produce silicon MOS multiplexors. The electron-beam welding installation is designed for sealing the evacuated cases of photodiode array detectors.

The grounds to choose the construction of the cold-cathode ion-sources for microphotoelectronic production are presented.

Discussed are the principles of building automatic control systems for electron- and ion-beam technological equipment. It is shown that such systems must provide unbreakable control of the technological processes, failure-safe evacuation and quality control.

The ion-optical system forming the beam on the entrance of the monopole mass-spectrometer has been proposed. Its general features are the earthing of the emacting electrode to decrease the energy spread in the beam and using of the deflecting system of the untraditional construction (good combining with the axially symmetrical electrodes) which does not let the scattering electrons pass in monopole. The analytical expression of the potential distribution in such deflecting system has been found. The calculation of the ion trajectories has been made by the author program. The parameters of the investigated system and earlier used one in the monopole mass-spectrometer have been compared.

The results of modeling of the electro-optic system proposed and designed for the powerful multiple beam klystron Toshiba E3736 have been represented. Toshiba E3736 is the 10MW L-band six-beam klystron being developed for the superconductive accelerator projects TESLA (XFEL), ILC. The key features of device are the new compact scheme of the confined flow multiple beam shaping, the most low cathode loading (<2.1 A/cm²) in comparison with analogues, a controlled beamlet size (diameter) in the drift tubes of klystron.

Problems of decrease of anode voltage, mass, and dimensions of powerful pulse traveling-wave tube (TWT) with grid modulation, as well as broadening the operating frequency range of signals to be amplified are considered. It is shown, this is achieved by the increase of a perveance of an electron beam formed by the original three-grid electron gun. The features of focusing the high-perveance electron beam by PPM system are shown. Main parameters of such TWTs are presented.

Method of calculation of the main plasma-filled TWT characteristics is suggested and some results presented. The base features of vacuum and plasma modes are examined qualitative and proved by calculations.

The Low Energy Particle Toroidal Accumulator (LEPTA) was commissioned in September 2004 at JINR. The facility is dedicated to studies of particle beam dynamics in a storage ring with longitudinal magnetic field focusing (so called "stellatron"), application of circulating electron beam to electron cooling of antiprotons and ions in adjoining storage ring, electron cooling of positrons, and positronium in-flight generation. The last modes of the ring operation enables setting of numerous experiments with positronium in-flight and generation of directed and "monoenergetic" flux of antihydrogen. The positronium (Ps) atoms appear in recombination of positrons with cooling electrons inside the cooling section of the ring. An assembling of the storage ring LEPTA was completed during year 2004. Peculiarity of the storage ring is focusing of circulating particles with longitudinal magnetic field which covers whole orbit. As result, the particle motion in the ring is coupled in transverse plane. First results of the experimental study of the particle dynamics in the ring performed with circulating electron beam are presented. The beam lifetime was achieved above 20 ms at electron energy of 4 keV and vacuum pressure of 30 mTorr. The limitations of the beam lifetime and the possibility of its enhancement are discussed in the report.

Problems of secondary electrons (SE) energy spectrum simulation are discussed in present article. It is shown that secondary electrons shoot energy spectrum (ES) simulated using discrete looses approximation coincides with Landau distribution function.

In this work we discuss the problems of the energy-angular spectrum of backscattered and true secondary electrons simulation using the discrete (DLA) and the continuous (CLA) loss approximations. The presence of an angular spectrum artefact - the deviation from the sinusoidal distribution over the range of 177-18O° from the beam direction is shown.

Problems of simulation of deposited during beam irradiation charge and energy (dose) simulation. Results obtained using Monte-Carlo method in discrete and continuous looses. Analytical approximations for depth-dose and charge-dose for Si, Au, Ag, Cu, GaN obtained.

Using developed simulalion program based on Monte-Carlo method in discrete looses approximation (DLA) we carried out analysis of secondary electrons (SE) energy spectrums (ES). The possibility of determination of thickness and depth of subsurface structures using ES of SE is shown.

Roentgenofluorescent analysis of substance composition is the widespread method, permitting to determine a wide spectrum of chemical elements. The present work is devoted to study of opportunities of the optimum parameters selection for realization of the quantitative RFA solid bodies by methods of mathematical modeling.

Opportunities of reception of interval estimations of the functional dependence connecting the intensity of monochromatic cathodoluminescence with electron beam energies are considered at the account of casual character of the initial information. The account of casual character of the initial information is carried out with use of the confluence analysis. The methods of mathematical modeling receive interval estimations of functional dependences for directly zoned semiconductors.

New opportunities of modelling of dependence of intensity monochromatic cathodeluminescence from electron beam energy for two-layer semiconductor structure on the basis of GaAs are considered, diffusion of nonbasic carriers of a charge in which is described with use of model of independent sources.

Scanning electron microscope, equipped with EDAX module, can be used as an analytical device for studying the microelectronic structures, among which the multilayered objects represent a large part of the specimens under study. Three types of signals are registered with this method - secondary electrons (SE), hackscattered electrons (BSE) and x-ray radiation yield (X-ray) - providing the useful information about a specimen tested.