Share Email Print


MEMS/MOEMS Components and Their Applications II
Editor(s): Albert K. Henning

*This item is only available on the SPIE Digital Library.

Volume Details

Volume Number: 5717
Date Published: 22 January 2005

Table of Contents
show all abstracts | hide all abstracts
Aerospace applications of MEMS
Author(s): Siegfried W. Janson
Show Abstract
Fabrication and characterization of vertical travel linear microactuator
Author(s): Risaku Toda; Eui-Hyeok Yang
Show Abstract
Piezoelectric unimorph MEMS deformable mirror for ultra-large telescopes
Author(s): Yoshikazu Hishinuma; Eui-Hyeok Yang; Bruce Martin Levine; Eric E. Bloemhof
Show Abstract
MEMS adaptive optics system on multiple telescopes: experimental results
Author(s): Sergio Raffaele Restaino; Jonathan R. Andrews; Christopher C. Wilcox; Don M. Payne
Show Abstract
Mounting a deformable mirror onto a controllable tip/tilt platform
Author(s): Christopher C. Wilcox; Sergio Raffaele Restaino; Jonathan R. Andrews; Don M. Payne; Scott W. Teare
Show Abstract
Status of the MEMS industry
Author(s): J. C. Eloy; E. Mounier
Show Abstract
RF MEMS: status of the industry and roadmaps
Author(s): Jeremie Bouchaud; Henning Wicht
Show Abstract
Compact and high-accuracy RF MEMS capacitive series devices
Author(s): Xavier Rottenberg; Bart Nauwelaers; Walter De Raedt; Harrie A. C. Tilmans
Show Abstract
Benzocyclobutene (BCB)-based spiral inductor for wireless application
Author(s): Kee-Keun Lee; Bruce C. Kim
Show Abstract
Frequency response of piezoresistive-based MASA resonators with electrostatic vertical comb-drive actuation
Author(s): Harold L. Stalford; David S. Epp
Show Abstract
Optical MEMS: boom, bust, and beyond
Author(s): Richard S. Payne
Show Abstract
Design and fabrication of micromirror for MOEMS devices by CMOS-MEMS common process
Author(s): Chien-Chung Tsai; Pao-Ting Cheng; Yao-Chen Tseng
Show Abstract
Design and fabrication of pitch-tunable blaze grating
Author(s): Yu-Sheng Yang; Cheng-Hsien Liu
Show Abstract
Optical and electrodynamic analysis of a novel spatial light modulator
Author(s): Jie Zhang; Hongqiao Fu; Shanglian Huang; Yi Wu
Show Abstract
Large silicon micromirror modeling and fabrication
Author(s): Alexandre Marchese; Henri Camon; Christian Ganibal
Show Abstract
Novel Hadamard transform spectrometer realized using a dynamically driven micromirror array as a light modulator
Author(s): Marian Hanf; Alexey V. Schaporin; Ramon Hahn; Wolfram Doetzel; Thomas Gessner
Show Abstract
Discrete microactuator of arbitrary positioning for linearization of VOA characteristic
Author(s): Jong Hyun Lee; Man Geun Kim
Show Abstract
Fabrication of out-of-plane refractive concave and convex microlens arrays
Author(s): Ren Yang; Steven A. Soper; Wanjun Wang
Show Abstract
Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope
Author(s): Shih-Chia Chang; Michael W. Putty
Show Abstract
Investigation of actuation behavior for microarray thermal actuator based upon electrical analysis
Author(s): Chien-Chung Tsai; Tsa-Hsien Yang; Yi-Chao Huang
Show Abstract
Fabrication of cantilever probes with integrated piezoresistive read-out and built-in piezoelectric actuators
Author(s): Steve Olson; Bruce Altemus; Balasubramanian Sankaran; Natalya Tokranova; Robert Geer; James Castracane; Bai Xu
Show Abstract
UV-LIGA fabrication of microscale two-level mold inserts for MEMS applications
Author(s): Ren Yang; Jing Jiang; Wanjun Wang; Wen Jin Meng
Show Abstract
Latching shock sensors for health monitoring and quality control
Author(s): Michael R. Whitley; Michael S. Kranz; Roy Kesmodel; Sherrie J. Burgett
Show Abstract
Development of robust self-assembled microvalves for robust hydraulic actuators
Author(s): Bo Li; Sal Gerace; Quanfang Chen
Show Abstract
Novel high-Q torsion microresonator
Author(s): Prakash R. Apte; Anand Gawarikar; G. Ajishna; Sanjib K. Sahoo
Show Abstract
Compensation of model eye’s aberration by using deformable mirror
Author(s): Hiroyuki Kawashima; Michiko Nakanishi; Noriko Takeda; Isao Minegishi; Akio Kobayashi
Show Abstract
Design of a micropower generator
Author(s): Zhong-quan Wen; Zhi-yi Wen; Xia Li; Xue-hua Liu; Gang Chen
Show Abstract
Electrostatic microrelays with adjustable parameters
Author(s): Nikolay Ivanovich Mukhurov; Georgiy Ignatievich Efremov
Show Abstract

© SPIE. Terms of Use
Back to Top